Inficon Composer Elite Gas Concentration Monitor Manuale Utente

OPERATING MANUALComposer Elite™Gas Concentration MonitorPN 074-566-P1BCover Page

TOC - 2 PN 074-566-P1BComposer Elite Operating ManualChapter 2Installation2.1 Composer Elite Installation Guidelines. . . . . . . . . . . . . . . . .

5 - 34PN 074-566-P1BComposer Elite Operating Manual12 Heater 2 Current - Expectations Not Met0x0000 0800 SC SS Self Clear ACTION(SC): SC shuts off Hea

5 - 35PN 074-566-P1BComposer Elite Operating Manual 19 All CC/SC Command Retries Have Failed0x0004 0000 CC SS Cleared on readNOTE: CC has transmitted

5 - 36PN 074-566-P1BComposer Elite Operating Manual5.6.5 Remote CommandsMessage = R <Command ID>(<Sensor>)(<Heater>)Command ID = &l

5 - 37PN 074-566-P1BComposer Elite Operating Manual 5.7 Composer Elite Communications ExamplesCommands and responses are all done using hexadecimal r

5 - 38PN 074-566-P1BComposer Elite Operating Manual5.7.3 Update Command, Carrier Molecular WeightCommand Format: U <Command ID> <Sensor 1-5&

5 - 39PN 074-566-P1BComposer Elite Operating Manual 5.7.5 Status Command, Current DataCommand Format: S 0 <Sensor 1-5> <Internal Parameter&g

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6 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 6Composer Elite Multi-Sensor Software6.1 IntroductionComposer Elite Multi-Sensor Software

6 - 2PN 074-566-P1BComposer Elite Operating Manual6.2.4 Software InstallationTo install Composer Elite Multi-Sensor Software:1 Insert the 074-5028-G1

6 - 3PN 074-566-P1BComposer Elite Operating Manual 6.3 OperationIf Composer Elite MultiSensor Software is not already open, click Windows Start >&

TOC - 3PN 074-566-P1BComposer Elite Operating Manual 3.3.2.6 Sensor Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6 - 4PN 074-566-P1BComposer Elite Operating Manual6.3.1 User LoginComposer Elite Multi Sensor Software is locked until a user name and password are e

6 - 5PN 074-566-P1BComposer Elite Operating Manual Figure 6-3 Comm Settings window5 Application Version displays the Composer Elite Multi-Sensor Soft

6 - 6PN 074-566-P1BComposer Elite Operating ManualFigure 6-5 Data storageIn the Save Options pane, the Interval number allows you to skip data points

6 - 7PN 074-566-P1BComposer Elite Operating Manual File Type 1One file is created, named ComposerEliteMultiSensorLog-Cmds_YYYY_MM_DD.CSV, where YYYY,

6 - 8PN 074-566-P1BComposer Elite Operating ManualDepthConcentration state (1 or 0)Heater 1 StatusHeater 2 Status11 point data - Amplitude 111 point d

6 - 9PN 074-566-P1BComposer Elite Operating Manual 6.3.5 Sensor VersionOnce a sensor is communicating with Composer Elite Multi-Sensor Software, Sens

6 - 10PN 074-566-P1BComposer Elite Operating Manual6.3.7.1 Gas On the Parameters window Gas tab, select the appropriate Carrier and Precursor gases (

6 - 11PN 074-566-P1BComposer Elite Operating Manual 6.3.7.2 Heater The Heater tab (see Figure 6-9) provides lists for changing temperature setpoints

6 - 12PN 074-566-P1BComposer Elite Operating Manual6.3.9 DataThis pane displays the live reading of the given parameters (see Figure 6-11). Figure 6-

6 - 13PN 074-566-P1BComposer Elite Operating Manual 6.3.10 GraphTabs display the data of Frequency, Temperature, Concentration, Amplitude, and PWM. C

TOC - 4 PN 074-566-P1BComposer Elite Operating Manual5.4.1.3 Message Router (02h) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6 - 14PN 074-566-P1BComposer Elite Operating ManualTemperature 1 & 2 . . . . . . . . . . . . . Comparison of the temperatures of the resonant cha

6 - 15PN 074-566-P1BComposer Elite Operating Manual 6.3.12 AnnotationWhile datalogging, click Annotation to add an annotation to the stored data file

6 - 16PN 074-566-P1BComposer Elite Operating Manual6.3.13 Composer Elite Multi-Sensor Software Warnings and ErrorsThe warnings and errors log (see Fi

7 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 7Maintenance7.1 Scheduled MaintenanceComposer Elite System components do not have wear or

7 - 2PN 074-566-P1BComposer Elite Operating Manual1 Remove the plugs from the two VCR-2 service ports (see Figure 7-1). When removing the plugs, simul

7 - 3PN 074-566-P1BComposer Elite Operating Manual 5 Inject small amounts of helium into each of the two service ports. Verify the leak rate does not

7 - 4PN 074-566-P1BComposer Elite Operating Manual1 If not already removed, remove the plugs from the Acoustic Sensor’s two VCR-2 service ports (see F

7 - 5PN 074-566-P1BComposer Elite Operating Manual 7 Attach the leak detector to the other service port. 8 Evacuate the Secondary Containment Chamber

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8 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 8Troubleshooting8.1 IntroductionTroubleshoot Composer Elite problems by observing errors a

TOC - 5PN 074-566-P1BComposer Elite Operating Manual Chapter 6Composer Elite Multi-Sensor Software6.1 Introduction. . . . . . . . . . . . . . . . .

8 - 2PN 074-566-P1BComposer Elite Operating Manual8.3 Failure Mode and Effects Analysis (FMEA)Table 8-1 FMEASymptom Possible Cause Effect on Concent

8 - 3PN 074-566-P1BComposer Elite Operating Manual Concentration drift / offset Reference Zero was performed before Acoustic Sensor was completely pur

8 - 4PN 074-566-P1BComposer Elite Operating ManualConcentration is noisy Acoustically noisy environment.Noisy Concentration. Locate Acoustic Sensor f

8 - 5PN 074-566-P1BComposer Elite Operating Manual Temperature readout exceeds 71°C and then displays 99.999°C until Acoustic Sensor cools to 71°C. Te

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9 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 9Measurement and Theory9.1 Speed of Sound and Gas CompositionThe speed of sound, C, in an

9 - 2PN 074-566-P1BComposer Elite Operating ManualComposer Elite determines the speed of sound by precisely determining the gases’ fundamental resonan

9 - 3PN 074-566-P1BComposer Elite Operating Manual Where f and f2 are the resonant frequencies of the mixture and pure gas, respectively.Combining 12,

9 - 4PN 074-566-P1BComposer Elite Operating Manual9.2 Measuring the Speed of SoundA simple explanation of the functioning of Composer Elite is that i

9 - 5PN 074-566-P1BComposer Elite Operating Manual advantage is negated by modern electronics’ ability to generate precision sine waves with resolutio

TOC - 6 PN 074-566-P1BComposer Elite Operating ManualChapter 9Measurement and Theory9.1 Speed of Sound and Gas Composition . . . . . . . . . . . . .

9 - 6PN 074-566-P1BComposer Elite Operating Manual9.3 Composer Elite OverviewThe Composer Elite System Block Diagram (see Figure 9-2) depicts the gen

9 - 7PN 074-566-P1BComposer Elite Operating Manual 9.4 Description of SubsystemsThree major components comprise the Composer Elite System:  Sensor C

9 - 8PN 074-566-P1BComposer Elite Operating ManualThe sending microphone cartridge provides the source of acoustic energy to excite the diaphragm. It

9 - 9PN 074-566-P1BComposer Elite Operating Manual Figure 9-4 Acoustic sensor main components 2Inlet Tube Heater(Heater 2)Resonant Chamber Heaters (H

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A - 1PN 074-566-P1BComposer Elite Operating Manual Appendix ABibliographyA. Wajid, C. Gogol, C. Hurd, M. Hetzel, A. Spina, R. Lum, M. McDonald, R. J

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B - 1PN 074-566-P1BComposer Elite Operating Manual Appendix BMaterial TableB.1 IntroductionTable B-1 represents the Molecular Weight and Gamma Fact

B - 2 PN 074-566-P1BComposer Elite Operating Manualnitrogen N228.010 1.399oxygen O232.000 1.395phosphoryl trichloride POCl3153.330 1.168silicon chlor

C - 1PN 074-566-P1BComposer Elite Operating Manual Appendix COutline DrawingsC.1 Composer Elite Acoustic Sensor Figure C-1, 761-014-1-b-outl Outli

1 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 1Introduction1.1 IntroductionComposer Elite™ is designed to measure the precursor concentr

C - 2 PN 074-566-P1BComposer Elite Operating ManualFigure C-1 761-014-1-b-outl Outline Composer Elite Sensor Page 1 of 2

C - 3PN 074-566-P1BComposer Elite Operating Manual Figure C-2 761-014-2-b-outl Outline Composer Elite Sensor Page 2 of 2

C - 4 PN 074-566-P1BComposer Elite Operating ManualFigure C-3 761-016-1-outl Composer Elite Controller Outline

1 - 2PN 074-566-P1BComposer Elite Operating Manual1.2 Using this ManualPlease take a moment to read the following.1.2.1 Symbols and their Definition

1 - 3PN 074-566-P1BComposer Elite Operating Manual 1.2.2 General Cautions and WarningsWARNING - Risk Of Electric ShockDangerous voltages are present

1 - 4PN 074-566-P1BComposer Elite Operating Manual1.3 How To Contact INFICONWorldwide customer support information is available under Contact >>

1 - 5PN 074-566-P1BComposer Elite Operating Manual 1.4 Unpacking and Inspection1 If Composer Elite has not been removed from its shipping container,

1 - 6PN 074-566-P1BComposer Elite Operating Manual1.4.1 Parts and Options OverviewSensor Control Unit . . . . . . . . . . . . . . . . . . . . . . PN

1 - 7PN 074-566-P1BComposer Elite Operating Manual 1.4.2 Sensor Control Unit Power-Up VerificationIt is not necessary to have Acoustic Sensors or com

1 - 8PN 074-566-P1BComposer Elite Operating Manual1.5 Specifications1.5.1 Composer Elite System Operating SpecificationsOperating Pressure Range .

1 - 9PN 074-566-P1BComposer Elite Operating Manual 1.5.2 Composer Elite Sensor Control UnitSize H x W x D . . . . . . . . . . . . . . . . . 132.8 x 2

1 - 10PN 074-566-P1BComposer Elite Operating Manual1.5.3 Acoustic SensorSize . . . . . . . . . . . . . . . . . . . . . . . . . 124 mm (4.88 in.) bet

1 - 11PN 074-566-P1BComposer Elite Operating Manual Mounting Requirements . . . . . . . . . . M4-0.7 (4), max. screw penetration 6.4 mm (0.25 in.) dep

1 - 12PN 074-566-P1BComposer Elite Operating Manual1.5.4.2 Rated InputOperational Voltage Range . . . . . . . 100 to 240 V(ac) +/- 10% (ac)Frequency

1 - 13PN 074-566-P1BComposer Elite Operating Manual 1.5.6 Computer Requirements for Composer Elite Multi-Sensor SoftwareProcessor . . . . . . . . . .

1 - 14PN 074-566-P1BComposer Elite Operating Manual1.5.10 Perimeter for Maintenance Access Acoustic Sensor to be removed from the process gas tubing

2 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 2Installation2.1 Composer Elite Installation GuidelinesThe requirements and recommendation

www.inficon.com [email protected]©2013 INFICON®OPERATING MANUALComposer Elite™Gas Concentration MonitorPN 074-566-P1BTitle Page

2 - 2PN 074-566-P1BComposer Elite Operating Manual2.1.1.2 Pressure and Tubing SizeThe Composer Elite System is designed to operate with the gases in

2 - 3PN 074-566-P1BComposer Elite Operating Manual 2.1.2 Grounding and Shielding2.1.2.1 Power Supply Grounding RequirementWARNING - Risk Of Electric

2 - 4PN 074-566-P1BComposer Elite Operating Manual2.1.2.3 Composer Elite System Grounding RequirementCAUTIONThe Sensor Control Unit and Acoustic Sens

2 - 5PN 074-566-P1BComposer Elite Operating Manual 2.1.2.4 Electrical Interference ReductionWhen Composer Elite is integrated into a deposition syste

2 - 6PN 074-566-P1BComposer Elite Operating Manual2.1.3 Composer Elite Location Selection2.1.3.1 Selecting The Acoustic Sensor LocationLocate the Ac

2 - 7PN 074-566-P1BComposer Elite Operating Manual The Interconnect Cable route should be planned to minimize external electrical interference. (Refer

2 - 8PN 074-566-P1BComposer Elite Operating Manual2.2 Composer Elite Installation2.2.1 Installing The Sensor Control Unit in a 19 in. (48.26 cm) Rac

2 - 9PN 074-566-P1BComposer Elite Operating Manual 2.2.2 Installing The Acoustic SensorWARNINGMany gases used for film growth are toxic at very low e

2 - 10PN 074-566-P1BComposer Elite Operating Manual4 Install new VCR-4 gaskets (see section 7.3, Spare Parts, on page 7-5) into the VCR fittings on th

2 - 11PN 074-566-P1BComposer Elite Operating Manual 2.2.3 Installing Interconnect, Power Supply, and Communications Cables 1 Set the Sensor Control U

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.Beckhoff® and TwinCAT® are registered tr

2 - 12PN 074-566-P1BComposer Elite Operating Manual5 Insert the 24 V Power Supply output-cable connector into the Sensor Control Unit power connector

3 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 3Operation3.1 Initialization and SetupApplication-specific parameter values must be entere

3 - 2PN 074-566-P1BComposer Elite Operating Manualcontrol knob to change the value for that digit. To save the changes, press Save. To cancel changes,

3 - 3PN 074-566-P1BComposer Elite Operating Manual 3.2.2 Special Tools and MaterialsFlowing a pure gas through the Acoustic Sensor at process pressur

3 - 4PN 074-566-P1BComposer Elite Operating Manual3.3 How To Use Composer EliteThe following sections explain how to start, stop, and power down Comp

3 - 5PN 074-566-P1BComposer Elite Operating Manual 3.3.2 Composer Elite Screen DescriptionsBoot Screen, see section 3.3.2.1Indicators Displayed On Sc

3 - 6PN 074-566-P1BComposer Elite Operating Manual3.3.2.2 Indicators Displayed On ScreensAT TEMP . . . . . . . . . . . . . . . . . . . . . Indicates

3 - 7PN 074-566-P1BComposer Elite Operating Manual ERRORS, WARNINGS, or ERRS & WRNS may be displayed, depending on whether errors, warnings, or bo

3 - 8PN 074-566-P1BComposer Elite Operating Manual3.3.2.4 System Overview ScreenThe System Overview screen displays information about the system’s ha

3 - 9PN 074-566-P1BComposer Elite Operating Manual 3.3.2.5 Errors and Warnings ScreenThe Errors and Warnings screen displays current hardware errors

3 - 10PN 074-566-P1BComposer Elite Operating Manual3.3.2.6 Sensor ScreenOn the Overview screen, press Sensor Data to display the Sensor screen (see F

3 - 11PN 074-566-P1BComposer Elite Operating Manual Pressing Advanced Data displays acoustic information when a cell is attached. This information dis

3 - 12PN 074-566-P1BComposer Elite Operating Manual3.3.2.7 Sensor Parameters ScreenThe Sensor Parameters screen displays all available settings for a

3 - 13PN 074-566-P1BComposer Elite Operating Manual Allow user zero. . . . . . . . . . . . . . . . Is a user-defined reference zero allowed?Default va

3 - 14PN 074-566-P1BComposer Elite Operating Manual3.3.3 Description of Rear PanelThe rear panel of Composer Elite is shown in Figure 3-8. Figure 3-8

3 - 15PN 074-566-P1BComposer Elite Operating Manual 3.3.3.5 Control SlotThis slot is occupied by the Control card. RS-232 and DeviceNet connectors ar

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4 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 4Applications Guide4.1 Advice and TipsThe following paragraphs review many common question

4 - 2PN 074-566-P1BComposer Elite Operating ManualThe correct (user set) Reference Zero is retained until a new Reference Zero is established, the Set

4 - 3PN 074-566-P1BComposer Elite Operating Manual 4.1.4 What To Do when the Specific Heat Ratio for a Gas is UnknownQuantitative accuracy for an aco

4 - 4PN 074-566-P1BComposer Elite Operating Manual4.1.5 What is the Ideal Operating Environment?In an ideal operating environment, parameters that in

4 - 5PN 074-566-P1BComposer Elite Operating Manual 4.1.7 What is the Effect of Flow Variation?There is virtually no flow induced effect on concentrat

4 - 6PN 074-566-P1BComposer Elite Operating Manualsound. The resonant method does not lose accuracy because of uncertainty of guessing when the center

4 - 7PN 074-566-P1BComposer Elite Operating Manual 4.1.9 What is the Long Term Stability of this Measurement System?There does not appear to be any t

4 - 8PN 074-566-P1BComposer Elite Operating Manual4.1.10 What Happens if the Reference Zero is Improperly Set?If the Reference Zero is set when the c

4 - 9PN 074-566-P1BComposer Elite Operating Manual 4.1.11 How to Sample Flow with a Composer EliteWhen the flow through a process pipe exceeds the Ac

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5 - 1PN 074-566-P1BComposer Elite Operating Manual Chapter 5Remote Communications5.1 IntroductionComposer Elite supports RS-232C and DeviceNet commun

5 - 2PN 074-566-P1BComposer Elite Operating ManualOnly serial communications baud rate of 115,200 is supported. The communications interface operates

5 - 3PN 074-566-P1BComposer Elite Operating Manual 5.4 DeviceNet Communications For DeviceNet Messaging, the transmit/receive message count field is

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

5 - 4PN 074-566-P1BComposer Elite Operating Manual5.4.1 DeviceNet Objects 5.4.1.1 CIP Type DefinitionsRefer to ODVA™ CIP™ classes.5.4.1.2 Identity

5 - 5PN 074-566-P1BComposer Elite Operating Manual 5.4.1.3 Message Router (02h)Not used.5.4.1.4 DeviceNet Object (03h)DeviceNet objects are shown in

5 - 6PN 074-566-P1BComposer Elite Operating Manual5.4.1.5 Assembly Object (04h)This assembly object uses static assemblies and holds the Composer Eli

5 - 7PN 074-566-P1BComposer Elite Operating Manual 5.4.1.6 Connection Object (05h)Connection objects are shown in Table 5-6.The supported services ar

5 - 8PN 074-566-P1BComposer Elite Operating ManualTable 5-7 Instance #2 (Poll or "COS/Cyclic Consuming")# Name Access Type Comments1 State

5 - 9PN 074-566-P1BComposer Elite Operating Manual Table 5-8 Instance #3 (Bit-Strobe)# Name Access Type Comments1 State Get USINT 0 = Nonexistent1 =

5 - 10PN 074-566-P1BComposer Elite Operating ManualTable 5-9 Instance #4 (COS/Cyclic Producing)# Name Access Type Comments1 State Get USINT 0 = Nonex

5 - 11PN 074-566-P1BComposer Elite Operating Manual 5.4.1.7 Acknowledge Handler Object (2Bh)The supported services are: Class - Get Attribute Single

5 - 12PN 074-566-P1BComposer Elite Operating ManualTable 5-11 Instance Attributes (01h)5.4.2 DeviceNet Data Sets5.4.2.1 InitializationAfter a power

5 - 13PN 074-566-P1BComposer Elite Operating Manual 5.4.2.2.2 Sensor 1-5 Data SetAll of the basic and advanced data associated with a single sensor.

5 - 14PN 074-566-P1BComposer Elite Operating Manual5.4.2.2.3 All 5 Sensor Card Data SetThis data set returns a compound set of current data values fo

5 - 15PN 074-566-P1BComposer Elite Operating Manual Sensor 1Temperature 230.0 – 65.0 C Float The current temperature value of second temperature senso

5 - 16PN 074-566-P1BComposer Elite Operating ManualSensor 3SS, LS, MH1/PC, MH2/UZ, AT, CS, ER, RS, BM, WARefer to Table 5-18Integer Status bits Refer

5 - 17PN 074-566-P1BComposer Elite Operating Manual Sensor 4Heater 1 Status0 - 6 Short 0 = Off1 = Not at temp2 = At temp3 = Failed4 = Cable Disconnect

5 - 18PN 074-566-P1BComposer Elite Operating Manual5.4.2.2.4 Sensors 1,2,3 Error/Warning Data SetThis data set returns a compound set of current data

5 - 19PN 074-566-P1BComposer Elite Operating Manual 5.4.2.2.5 Sensors 4,5 Error/Warning Data SetThis data set returns a compound set of current data

5 - 20PN 074-566-P1BComposer Elite Operating Manual5.4.2.2.6 5 Sensors' Concentration Data SetThis data set returns a compound set of concentrat

5 - 21PN 074-566-P1BComposer Elite Operating Manual 5.4.3 DeviceNet INFICON MessagingAll information exchanges are formatted and accessed via the Ass

5 - 22PN 074-566-P1BComposer Elite Operating Manual5.5.1 CommandThis section describes the command format.See section 5.6, Communication Commands, on

5 - 23PN 074-566-P1BComposer Elite Operating Manual 5.5.2.1 Response Packet (Composer Elite to Host Message)<Length><Command><Command

TOC - 1PN 074-566-P1BComposer Elite Operating Manual Table Of ContentsCover PageTrademarksDisclaimerCopyrightDeclaration Of ConformityWarrantyChapte

5 - 24PN 074-566-P1BComposer Elite Operating Manual12 (0x0C) . . . Uninstalled sensor number17 (0x11) . . . Message length incorrect for given comm

5 - 25PN 074-566-P1BComposer Elite Operating Manual UZ Zero Reference (Bit 28) 0|1 Bit When sensor number is 1-5:0= Sensor is using Factory Zero.1= Se

5 - 26PN 074-566-P1BComposer Elite Operating ManualBM Boot Monitor (Bit 22) 0|1 Bit When sensor number is 1-5:0= Sensor is currently running applicati

5 - 27PN 074-566-P1BComposer Elite Operating Manual 5.6 Communication CommandsThe following shows a summary of the available commands. The headers/tr

5 - 28PN 074-566-P1BComposer Elite Operating Manual5.6.1 Hello CommandMessage = H <Command ID> <Sensor> <Internal Parameter>Command

5 - 29PN 074-566-P1BComposer Elite Operating Manual 5.6.3 Update CommandsMessage = U <Command ID><Sensor><Internal Parameter><Da

5 - 30PN 074-566-P1BComposer Elite Operating Manual5.6.4 Status CommandsMessage = S <Command ID>(<Sensor>)(<Temperature Zone>|<H

5 - 31PN 074-566-P1BComposer Elite Operating Manual Table 5-21 Status commandsSCommand IDName Parameter Range (low/high)Data TypeNote0 Current Data

5 - 32PN 074-566-P1BComposer Elite Operating Manual1 Current TemperatureTemperature Zone 1|2 30.0 - 65.00(ºC) 99.999Float Current Zone Temperature 1 f

5 - 33PN 074-566-P1BComposer Elite Operating Manual 29 DeviceNet HW Failure 0x1000 0000 CC Self Clear NOTE: Indicates that the DeviceNet module is sel