Inficon Cygnus Thin Film Deposition Controller Manuale Utente

OPERATING MANUALCygnusThin Film Deposition MonitorIPN 074-379-P1K®

TOC - 2 IPN 074-379-P1K Cygnus Operating ManualChapter 2Operation2.1 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 16 IPN 074-379-P1K Cygnus Operating ManualXTL FL INHBT (ON/OFF) ###The ON action prohibits the Crystal Fail output relay from activating. This is

4 - 17IPN 074-379-P1KCygnus Operating Manual4.6 I/O MapThe I/O Map is selected by pressing the F2 key (I/O MAP) in the General Parameters display.

4 - 18 IPN 074-379-P1K Cygnus Operating ManualThe following names are used by Cygnus to identify the relays selected for the corresponding functions:

4 - 19IPN 074-379-P1KCygnus Operating Manual4.7 Floppy DiskFigure 4-13 Floppy Disk DisplayParameters can be saved to and loaded from the diskette

4 - 20 IPN 074-379-P1K Cygnus Operating ManualThe key choices are changed to CONTINUE and CANCEL. Selecting CONTINUE saves the file to the diskette.

5 - 1IPN 074-379-P1KCygnus Operating ManualChapter 5Remote Communications5.1 Remote Communications OverviewThis instrument may be remotely controll

5 - 2 IPN 074-379-P1K Cygnus Operating ManualThe following pin assignments should be used when constructing a cable:The port incorporates hardware fl

5 - 3IPN 074-379-P1KCygnus Operating Manual5.2.2 IEEE488 PortAn IEEE488 circuit card may be purchased and installed into Cygnus, IPN 760-142-G1. Th

5 - 4 IPN 074-379-P1K Cygnus Operating Manual5.3 Message ProtocolsThe message protocol serves as a structure for the contained command or response i

5 - 5IPN 074-379-P1KCygnus Operating ManualDetails of the following are given later in the document. Command Group = 1 ASCII byte, specifying catego

TOC - 3IPN 074-379-P1KCygnus Operating ManualChapter 4General Parameters4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 6 IPN 074-379-P1K Cygnus Operating Manual5.3.2.2 Response Packet (Instrument to Host Message)<Length><CCB><Timer><Response

5 - 7IPN 074-379-P1KCygnus Operating ManualF = Cannot do now (e.g. some commands require the channel or console to be in Ready / Stop.L = Length Err

5 - 8 IPN 074-379-P1K Cygnus Operating Manual5.4.2 HELLO CommandThe format is:H<Command ID>Response:ACK<<Byte>|<Integer>|<St

5 - 9IPN 074-379-P1KCygnus Operating Manual5.4.3 Parameter CommandsQuery commands are used to request established parameter values. There is a spec

5 - 10 IPN 074-379-P1K Cygnus Operating Manual5.4.3.1.2 Update All ParametersUpdate: The message format is:UA <All configuration parameters>Le

5 - 11IPN 074-379-P1KCygnus Operating Manual5.4.3.2.2 Update Channel ParametersUpdate: The message format is:UC <Command ID><Channel Numbe

5 - 12 IPN 074-379-P1K Cygnus Operating Manual9(0x09)Crystal Stability Int 0 910(0x0a)Maximum Power% float 0.01 99.9911(0x0b)Minimum Power% float 0.0

5 - 13IPN 074-379-P1KCygnus Operating Manual24(0x18)Max Power Option0 = Continue1 = Idle Ramp2 = StopInt 0 225(0x19)Scale 0 = Power1 = +/- 10 Å/s2 =

5 - 14 IPN 074-379-P1K Cygnus Operating Manual34(0x22)Sensor Type 1 = Single2 = CrystalTwo6 = CrystalSix7 = Rotary12 = Crystal12Int 1 1235(0x23)Senso

5 - 15IPN 074-379-P1KCygnus Operating Manual47(0x2f)Dep after PreDep0 = Non Deposit Control1 = Deposit, No Auto Soak2 = Deposit, Auto SoakInt 0 248(

TOC - 4 IPN 074-379-P1K Cygnus Operating Manual5.4.3.3 General Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 16 IPN 074-379-P1K Cygnus Operating Manual5.4.3.3 General Parameters5.4.3.3.1 Query General ParametersThe message format is:QG<Command ID>

5 - 17IPN 074-379-P1KCygnus Operating Manual5(0x05)Data Logging Path0 = Off,2 = File, Page Format3 = File, Comma Delimited036(0x06)Print Screen Path

5 - 18 IPN 074-379-P1K Cygnus Operating Manual5.4.3.4 Input Name Parameters5.4.3.4.1 Query Input NameQuery: The message format is:QI<Input Numbe

5 - 19IPN 074-379-P1KCygnus Operating Manual5.4.3.5 Logic Statements ParametersFormat of Logic Statement:If Event 1 (###) AND/OR Event 2 (###) AND/

5 - 20 IPN 074-379-P1K Cygnus Operating ManualRight parenthesis . . . . . . . . . . . . ")" 0x29Ampersand (and) . . . . . . . . . . . . &

5 - 21IPN 074-379-P1KCygnus Operating ManualTable 5-6 shows Event Codes in HEX notation.  "s" indicates Channel Number: 0 to 6 "n&q

5 - 22 IPN 074-379-P1K Cygnus Operating ManualTable 5-7 shows Action Codes in HEX notation. "s" indicates Channel number: 0 to 6 "n&

5 - 23IPN 074-379-P1KCygnus Operating Manual5.4.3.6 Output Name Parameters5.4.3.6.1 Query Output NamesQuery: The message format is:QO<Output Nu

5 - 24 IPN 074-379-P1K Cygnus Operating Manual5.4.3.7 Type of Output Parameters5.4.3.7.1 Query Output TypeQuery: The message format is:QT<Output

5 - 25IPN 074-379-P1KCygnus Operating Manual5.4.4.1 Status Channel CommandThe message format is:SC<Command ID><Channel Number>Command I

TOC - 5IPN 074-379-P1KCygnus Operating Manual6.3.3 Routing XIU Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 26 IPN 074-379-P1K Cygnus Operating Manual5(0x05)State byte, encoding as follows:0 = Ready1 = Crucible Switch2 = Rise 13 = Soak 14 = Rise 25 = So

5 - 27IPN 074-379-P1KCygnus Operating Manual14(0x0E)Data Log Multple pieces of information, as follows:Year (Integer)Month (IntegerDay (Integer)Hour

5 - 28 IPN 074-379-P1K Cygnus Operating Manual17(0x11)State before Stop Byte. See state encodings listed with SC5. If not currently in Stop, will ret

5 - 29IPN 074-379-P1KCygnus Operating Manual23 Enhanced Sensor StatusByte, same as 11 with bits 7 and 6 set per Z-Ratio type.Bit 1 Bit 0 0 0

5 - 30 IPN 074-379-P1K Cygnus Operating Manual5.4.4.2 Status General CommandsThe message format is:SG<Command ID>|<Command ID><Action

5 - 31IPN 074-379-P1KCygnus Operating Manual5(0x05)General Errors 2 Bytes0x8000 Power Loss0x4000 No Disk in Drive0x2000 Disk is Full0x1000 D

5 - 32 IPN 074-379-P1K Cygnus Operating Manual5.4.5 REMOTE CommandsRemote commands perform an action based on the specific command given. Commands a

5 - 33IPN 074-379-P1KCygnus Operating Manual5.4.5.1 Remote Channel Action CommandsThese commands are used to affect actions associated with Channel

5 - 34 IPN 074-379-P1K Cygnus Operating Manual7(0x07)Go to Post Deposit (Idle Ramp). Cannot be done if in Ready, Stop, Crucible Switch, or while crys

5 - 35IPN 074-379-P1KCygnus Operating Manual5.4.5.2 Remote General Action CommandsThe message format is:RG<Command ID>(<Action Value>)C

TOC - 6 IPN 074-379-P1K Cygnus Operating Manual8.4.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 36 IPN 074-379-P1K Cygnus Operating Manual6(0x06)Clear Logic Statement<Action Value> to False. Only takes action if the Logic Statement Eve

5 - 37IPN 074-379-P1KCygnus Operating Manual5.4.6 Negative Response Error CodesAn error code in the form of a single ASCII character is returned wh

5 - 38 IPN 074-379-P1K Cygnus Operating ManualThe successful response byte should be (refer to section 5.3.2.2 on page 5-6 for details for CCB and Ti

6 - 1IPN 074-379-P1KCygnus Operating ManualChapter 6Installation and Interfaces6.1 Location GuidelinesBefore you permanently install this controlle

6 - 2 IPN 074-379-P1K Cygnus Operating ManualNOTE: Do not allow water tubes to freeze. This may happen if the tubes pass through a cryogenic shroud a

6 - 3IPN 074-379-P1KCygnus Operating Manual6.1.2 Sensor InstallationFigure 6-1 shows a typical installation of an INFICON water cooled crystal sens

6 - 4 IPN 074-379-P1K Cygnus Operating ManualGenerally, install the sensor as far as possible from the evaporation source (a minimum of 10" [25.

6 - 5IPN 074-379-P1KCygnus Operating Manual6.1.3 Control Unit InstallationThe control unit is designed to be rack mounted. It may be also used on a

6 - 6 IPN 074-379-P1K Cygnus Operating Manual6.2.2 Connections to Earth GroundThere are two earth connectors: The ground connection on the controll

6 - 7IPN 074-379-P1KCygnus Operating ManualIn many cases, a braided ground strap is sufficient. However, there are cases when a solid copper strap (

1 - 1IPN 074-379-P1KCygnus Operating ManualChapter 1Introduction and Specifications1.1 IntroductionCygnus is a closed loop process controller desig

6 - 8 IPN 074-379-P1K Cygnus Operating Manual6.3 Connecting the ControllerThe operation of the controller depends on the proper connection of power

6 - 9IPN 074-379-P1KCygnus Operating ManualIf the nominal line voltage is 230 V(ac), use the 240 V(ac) nominal setting whose input range includes 23

6 - 10 IPN 074-379-P1K Cygnus Operating ManualFigure 6-4 Voltage Selector Drum and Fuse6.3.3 Routing XIU CablesXUI to controller cables can be 15’

6 - 11IPN 074-379-P1KCygnus Operating Manual6.3.4.2 Input/Relay Module ConnectionsThe Input/Relay module, IPN 760-162-G1, is included as standard e

6 - 12 IPN 074-379-P1K Cygnus Operating ManualTable 6-3 Input/Relay Pin ConnectionsI/O Board #1 I/O Board #3Relay # Pins TTLInput #Pin Relay # Pins

6 - 13IPN 074-379-P1KCygnus Operating Manual6.3.4.3 RS-232C CommunicationsRS-232C serial communications is included in the controller as standard e

6 - 14 IPN 074-379-P1K Cygnus Operating Manual6.3.4.4 Isolated +24 V(dc) SupplyAn isolated +24 V(dc) power supply is available on a 9-pin D-Sub conn

6 - 15IPN 074-379-P1KCygnus Operating Manual6.3.4.5 Optional DAC CardAn optional Digital to Analog Converter (DAC) card can be installed into the C

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7 - 1IPN 074-379-P1KCygnus Operating ManualChapter 7Calibration Procedures7.1 Importance of Density, Tooling and Z-RatioThe quartz crystal microbal

1 - 2 IPN 074-379-P1K Cygnus Operating Manual1.2 Instrument Safety1.2.1 Definition of Notes, Cautions and WarningsWhen using this manual, please pa

7 - 2 IPN 074-379-P1K Cygnus Operating Manual[1]where:D1 = Initial density settingTx = Thickness reading on CygnusTm = Measured thickness7 A quick ch

7 - 3IPN 074-379-P1KCygnus Operating Manual7.4 Laboratory Determination of Z-RatioNOTE: On Cygnus, the Auto Z function is available to automaticall

7 - 4 IPN 074-379-P1K Cygnus Operating Manual6 Using the density value from step 1 and the recorded values for Fco and Fc, adjust the Z-Ratio value i

7 - 5IPN 074-379-P1KCygnus Operating Manual7.5.1 Procedure OverviewThe procedure consists of steps to deposit on both crystals having only one sour

7 - 6 IPN 074-379-P1K Cygnus Operating Manual7.5.3 Detailed ProcedureProceed as follows to calculate the amount of cross talk at Sensor Channel N du

7 - 7IPN 074-379-P1KCygnus Operating ManualProceed as follows to calculate the amount of cross talk at Sensor Channel (N+1) due to material from Sou

7 - 8 IPN 074-379-P1K Cygnus Operating Manualenter the appropriate Final Thickness values into Channels N and (N+1) and set the Max Power Option for

8 - 1IPN 074-379-P1KCygnus Operating ManualChapter 8Troubleshooting, Status and Error Messages8.1 Status and Error MessagesABBREVIATED AVERAGEDurin

8 - 2 IPN 074-379-P1K Cygnus Operating ManualDISK IS FULLThere is not enough capacity on the floppy disk to save the requested configuration file or

8 - 3IPN 074-379-P1KCygnus Operating ManualILLEGAL INPUTAn attempt was made to enter an invalid parameter or a function key was pressed and the func

1 - 3IPN 074-379-P1KCygnus Operating Manual1.2.2 General Safety InformationWARNING - Risk Of Electric ShockDo not open the instrument case! There a

8 - 4 IPN 074-379-P1K Cygnus Operating ManualMEM ALLOC FAILThis message appears if a Data Log or Print Screen operation fails because of an overuse o

8 - 5IPN 074-379-P1KCygnus Operating ManualNO SWITCH THIS DISPThe crystal switch function using the Hand Held controller is not allowed when the ins

8 - 6 IPN 074-379-P1K Cygnus Operating ManualRATEWATCHER HOLDThe RateWatcher feature is active. The sensor shutter is closed. The previous sample per

8 - 7IPN 074-379-P1KCygnus Operating ManualUNABLE TO AUTO Z #Indicates the requested Auto Z measurement cannot be completed due to the crystal condi

8 - 8 IPN 074-379-P1K Cygnus Operating Manual8.2 Troubleshooting GuideIf the instrument fails to work, or appears to have diminished performance, th

8 - 9IPN 074-379-P1KCygnus Operating Manual8.2.1 Major Instrument Components and AssembliesMONITOR KIT750-402POWER SUPPLY760-211-G1, 2, 3, 4CRT / M

8 - 10 IPN 074-379-P1K Cygnus Operating Manual8.2.2 Troubleshooting the InstrumentTable 8-1 Troubleshooting the InstrumentSYMPTOM CAUSE REMEDY1. po

8 - 11IPN 074-379-P1KCygnus Operating Manual4. some keys on front panel function while others do nota. faulty keypad or faulty keypad ribbon cablea.

8 - 12 IPN 074-379-P1K Cygnus Operating Manual9 crystal fail message is always ona. XIU/oscillator not connecteda. verify proper sensor/oscillator co

8 - 13IPN 074-379-P1KCygnus Operating Manual8.2.3 Troubleshooting Transducers/SensorsNOTE: Many sensor head problems may be diagnosed with a DVM (D

1 - 4 IPN 074-379-P1K Cygnus Operating Manual1.2.3 Earth GroundCygnus is connected to earth ground through a sealed three-core (three-conductor) pow

8 - 14 IPN 074-379-P1K Cygnus Operating Manual2. crystal ceases to oscillate during deposition before it reaches its "normal" lifea. crysta

8 - 15IPN 074-379-P1KCygnus Operating Manual4. crystal oscillates in vacuum but stops oscillation after open to aira. crystal was near the end of it

8 - 16 IPN 074-379-P1K Cygnus Operating Manual6. poor thickness reproducibilitya. variable source flux distributiona. move sensor to a more central l

8 - 17IPN 074-379-P1KCygnus Operating Manual8. CrystalSix and Crystal12: crystal switch problem (does not advance or not centered in aperture)a. los

8 - 18 IPN 074-379-P1K Cygnus Operating Manual8.2.4 Troubleshooting Computer CommunicationsTable 8-3 Troubleshooting Computer CommunicationsSYMPTOM

8 - 19IPN 074-379-P1KCygnus Operating Manualb. B = illegal value b. the parameter's value sent is outside the range for the given parameter, ve

8 - 20 IPN 074-379-P1K Cygnus Operating Manual8.3 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all transd

8 - 21IPN 074-379-P1KCygnus Operating ManualFigure 8-1 Standard Crystal Sensor (Exploded)8.3.2 Shuttered and Dual SensorsThere is no difference in

8 - 22 IPN 074-379-P1K Cygnus Operating Manual8.3.3 Bakeable SensorFor the Bakeable sensor, the procedure is the same as the regular crystal except

8 - 23IPN 074-379-P1KCygnus Operating Manual8.3.4 Sputtering SensorObserve the general precautions for replacing crystals and follow the instructio

1 - 5IPN 074-379-P1KCygnus Operating Manual1.2.4 Main Power ConnectionWARNING - Risk Of Electric ShockThis instrument has line voltage present on t

8 - 24 IPN 074-379-P1K Cygnus Operating Manual8.3.5 Crystal SnatcherUse the crystal snatcher, supplied with the sensor, as follows:1 Insert crystal

8 - 25IPN 074-379-P1KCygnus Operating Manual8.4 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: 760-601-G2 is fully compatible with all Th

8 - 26 IPN 074-379-P1K Cygnus Operating Manual8.4.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to a

8 - 27IPN 074-379-P1KCygnus Operating Manual8.4.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 8-6 on page 8-25. Remove

8 - 28 IPN 074-379-P1K Cygnus Operating Manual11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from the Crystal Interface Unit

8 - 29IPN 074-379-P1KCygnus Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the fi

8 - 30 IPN 074-379-P1K Cygnus Operating Manual8.4.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system

8 - 31IPN 074-379-P1KCygnus Operating Manual8.4.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature Ran

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9 - 1IPN 074-379-P1KCygnus Operating ManualChapter 9Measurement and Control Theory9.1 BasicsThe Quartz Crystal deposition monitor, or QCM, utilizes

1 - 6 IPN 074-379-P1K Cygnus Operating Manual1.3 How To Contact Customer SupportWorldwide support information regarding: Technical Support, to cont

9 - 2 IPN 074-379-P1K Cygnus Operating Manualmeasurement of the crystal’s frequency shift. The quantitative knowledge of this effect provides a means

9 - 3IPN 074-379-P1KCygnus Operating Manualcrystal to a holder and not produce any undesirable effects. Contouring also reduces the intensity of res

9 - 4 IPN 074-379-P1K Cygnus Operating ManualFigure 9-3 Thickness Shear Displacement9.1.2 Period Measurement TechniqueAlthough instruments using eq

9 - 5IPN 074-379-P1KCygnus Operating Manualmonitor crystal’s period is (n/Fr)/m where n is the number of counts in the second accumulator. The preci

9 - 6 IPN 074-379-P1K Cygnus Operating Manualfor a number of materials, and has been found to be valid for frequency shifts equivalent to Ff = 0.4Fq.

9 - 7IPN 074-379-P1KCygnus Operating Manualinto a greater frequency shift than that which would be produced with a new crystal. In the extreme, the

9 - 8 IPN 074-379-P1K Cygnus Operating Manualmeasurement system uses the phase/frequency properties of the quartz crystal to determine the resonant f

9 - 9IPN 074-379-P1KCygnus Operating Manualfundamental mode continuously, but also it can be implemented to alternate between one or more other mode

9 - 10 IPN 074-379-P1K Cygnus Operating Manualassignment refer to the number of phase reversals in the wave motion along the three axes of the crysta

9 - 11IPN 074-379-P1KCygnus Operating ManualNeedless to say, similar errors occur with the Z-Match™ technique under similar circumstances. However,

1 - 7IPN 074-379-P1KCygnus Operating Manual1.4 Cygnus Specifications1.4.1 MeasurementCrystal Frequency . . . . . . . . . . . . . . 6.0 MHz (new c

9 - 12 IPN 074-379-P1K Cygnus Operating ManualOf these categories, the open loop methods are considered superior. They are considered superior becaus

9 - 13IPN 074-379-P1KCygnus Operating ManualA controller model used extensively is the PID type, shown in Laplace form in equation [9]. [9]Where M(

9 - 14 IPN 074-379-P1K Cygnus Operating Manualwhere error = e = setpoint minus the measured rate. The ISE measure is relatively insensitive to small

9 - 15IPN 074-379-P1KCygnus Operating Manualcontrol is now comprised of multiple readings instead of a single rate measurement, taking advantage of

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A - 1IPN 074-379-P1KCygnus Operating ManualAppendix AMaterial TableCAUTIONSome of these materials are toxic. Please consult the material safety data

A - 2 IPN 074-379-P1K Cygnus Operating ManualBe 1.850 0.543 BerylliumBeF21.990 *1.000 Beryllium FluorideBeO 3.010 *1.000 Beryllium OxideBi 9.800 0.79

A - 3IPN 074-379-P1KCygnus Operating ManualCrB 6.170 *1.000 Chromium BorideCs 1.870 *1.000 CesiumCs2SO44.243 1.212 Cesium SulfateCsBr 4.456 1.410 Ce

A - 4 IPN 074-379-P1K Cygnus Operating ManualHf 13.090 0.360 HafniumHfB210.500 *1.000 Hafnium Boride,HfC 12.200 *1.000 Hafnium CarbideHfN 13.800 *1.0

A - 5IPN 074-379-P1KCygnus Operating ManualMgAl2O68.000 *1.000 SpinelMgF23.180 0.637 Magnesium FluorideMgO 3.580 0.411 Magnesium OxideMn 7.200 0.377

1 - 8 IPN 074-379-P1K Cygnus Operating Manual1.4.2.1 Instrument Set Up ParametersTest On. . . . . . . . . . . . . . . . . . . . . . . Yes / NoTime C

A - 6 IPN 074-379-P1K Cygnus Operating ManualNiO 7.450 *1.000 Nickel OxideP3N52.510 *1.000 Phosphorus NitridePb 11.300 1.130 LeadPbCl25.850 *1.000 Le

A - 7IPN 074-379-P1KCygnus Operating ManualSiO 2.130 0.870 Silicon (II) OxideSiO22.648 1.000 Silicon DioxideSm 7.540 0.890 SamariumSm2O37.430 *1.000

A - 8 IPN 074-379-P1K Cygnus Operating ManualTIBr 7.560 *1.000 Thallium BromideTICI 7.000 *1.000 Thallium ChlorideTII 7.090 *1.000 Thalliurn Iodide (

A - 9IPN 074-379-P1KCygnus Operating ManualZrN 7.090 *1.000 Zirconium NitrideZrO25.600 *1.000 Zirconium Oxide10.000 *1.000 USERTable A-1 Material T

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Index - 1IPN 074-379-P1KCygnus Operating ManualIndexAacoustic impedance 9-9action definitions 4-14active oscillator 9-6, 9-8aerial mass density 9-10

Index - 2 IPN 074-379-P1K Cygnus Operating ManualHhand-held controller 2-28hello command 5-8host/server 5-1II/O map 4-17IAE 9-14idle ramp 3-6IEEE488

Index - 3IPN 074-379-P1KCygnus Operating ManualSsafety 1-2Sales and Customer Service 1-6secondary tooling 3-3sensordiagnosing problems 8-13emulator

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1 - 9IPN 074-379-P1KCygnus Operating ManualRate & Thickness Control with Shutter open . . . . . . . . . . . . . . . . . 0.001 to 999.9 Å/secR

1 - 10 IPN 074-379-P1K Cygnus Operating ManualON Final Thickness . . . . . . . . . . . . . 0 / 1 / 20 = Go to Non-Deposit Control1 = Go to Idle Ramp2

1 - 11IPN 074-379-P1KCygnus Operating ManualCrystal Fail Option . . . . . . . . . . . . . . 0 / 1 / 20 = Time Power,1 = Idle Ramp2 = StopCan be sele

1 - 12 IPN 074-379-P1K Cygnus Operating Manual1.4.4 DisplayType / Color / Size . . . . . . . . . . . . . . CRT / Amber / 5" H x 9" W (127

1 - 13IPN 074-379-P1KCygnus Operating Manual1.4.5 Source / Recorder OutputsQuantity . . . . . . . . . . . . . . . . . . . . . . 6 standard, an add

1 - 14 IPN 074-379-P1K Cygnus Operating Manual1.4.6 Logic ProcessingType . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements Logica

1 - 15IPN 074-379-P1KCygnus Operating Manual1.4.8 Remote CommunicationsRS232C Serial Port . . . . . . . . . . . . . StandardBaud Rates. . . . . .

www.inficon.com [email protected] to our continuing program of product improvements, specifications are subject to change without notice.©20

1 - 16 IPN 074-379-P1K Cygnus Operating Manual1.4.11 Operating EnvironmentUsage. . . . . . . . . . . . . . . . . . . . . . . . Indoor onlyTemperatur

1 - 17IPN 074-379-P1KCygnus Operating Manual1.5 Unpacking and Inspection1 If the Cygnus control unit has not been removed from its shipping contain

1 - 18 IPN 074-379-P1K Cygnus Operating Manual1.6.2 Pre-Installed Options or SparesAdditional Sensor Module (std.) . . . . 760-1132-G1 (up to 2 extr

1 - 19IPN 074-379-P1KCygnus Operating ManualStandard Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 750-211-G1Stand

1 - 20 IPN 074-379-P1K Cygnus Operating Manual1.7 Initial Power-On VerificationA preliminary functional check of the instrument can be made before f

1 - 21IPN 074-379-P1KCygnus Operating Manual1 Confirm that AC line voltage is supplied and proper for the instrument. Line voltage should be indicat

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2 - 1IPN 074-379-P1KCygnus Operating ManualChapter 2Operation2.1 Front Panel ControlsOperational controls for Cygnus are located on the front panel

2 - 2 IPN 074-379-P1K Cygnus Operating Manual4 System SwitchesAn array of four keys that provide START, STOP, RESET and STOP ALL functions, for proce

2 - 3IPN 074-379-P1KCygnus Operating Manual2.2 Rear Panel InterfacesInterfaces for Cygnus are located on the rear panel of the instrument as depict

TrademarksThe trademarks of the products mentioned in this Operating Manual are held by the companies that produce them.INFICON® and Cygnus® are trade

2 - 4 IPN 074-379-P1K Cygnus Operating Manual8 8 Relay x 14 Output I/O Card (optional)Provides pin connection for 8 relays rated for 30 V(dc) or 30 V

2 - 5IPN 074-379-P1KCygnus Operating Manual2.3.1 ALL CHANNELS DisplayFigure 2-3 All Channels DisplayNOTE: The four channel ALL CHANNELS display is

2 - 6 IPN 074-379-P1K Cygnus Operating ManualALL CHANNELS Display Function KeysF1 GENERAL PARMSTo view the GENERAL PARAMETERS display, press function

2 - 7IPN 074-379-P1KCygnus Operating ManualFigure 2-4 Cygnus Display HierarchyGENERALPARMSGENERALMAINTENANCECHANNEL(F1)(F2) (F6)LOGICDIRECTORYI/OMA

2 - 8 IPN 074-379-P1K Cygnus Operating Manual2.3.1.1 GENERAL PARAMETERS DisplayFigure 2-5 GENERAL PARMATERS DisplaySee Chapter 4 for a detailed des

2 - 9IPN 074-379-P1KCygnus Operating Manual2.3.1.2 General MAINTENANCE DisplayThese displays provide a simple method for system maintenance and dia

2 - 10 IPN 074-379-P1K Cygnus Operating ManualQ (Crystal Quality value field)This field displays the value currently accumulated in the Crystal Quali

2 - 11IPN 074-379-P1KCygnus Operating ManualF3 CHANGE TIME/DATETo access the display to edit the time and date for the instrument, press function ke

2 - 12 IPN 074-379-P1K Cygnus Operating ManualF3 TEST XIUTo initiate the XIU Self Test, press function key F3. The XIU Self Test determines whether t

2 - 13IPN 074-379-P1KCygnus Operating ManualFigure 2-8 CHANNEL DisplayCHANNEL Display Description1 Identifies the channel number associated with th

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Pl

2 - 14 IPN 074-379-P1K Cygnus Operating Manual10 Channel sensor information This region of the Channel identifies the sensor type currently defined i

2 - 15IPN 074-379-P1KCygnus Operating ManualCHANNEL Display Function KeysF1 CHANNEL PARMSTo access the PROCESS (see Figure 2-9) and HARDWARE (see Fi

2 - 16 IPN 074-379-P1K Cygnus Operating Manual2.3.1.3.1 Channel Parameters DisplayThe Channel Parameters Display contains CHANNEL specific material

2 - 17IPN 074-379-P1KCygnus Operating Manual2.3.1.3.1.1 HARDWARE PROCESS DisplayThe Channel HARDWARE display contains channel specific hardware rel

2 - 18 IPN 074-379-P1K Cygnus Operating ManualSENSOR MAINTENANCE Display Description (refer to Figure 2-11)Sensor TypeIndicates the Sensor Type as de

2 - 19IPN 074-379-P1KCygnus Operating ManualSENSOR MAINTENANCE Display Function KeysF1 CRYSTAL SWITCHTo initiate a crystal switch, press function ke

2 - 20 IPN 074-379-P1K Cygnus Operating Manual2.3.1.3.2.1 Channel SOURCE MAINTENANCE DisplayFigure 2-12 Channel SOURCE MAINTENANCE DisplayChannel S

2 - 21IPN 074-379-P1KCygnus Operating Manual2.4 Crystal Life, Starting Frequency and ActivityOn the CHANNEL display, crystal life is shown as a per

2 - 22 IPN 074-379-P1K Cygnus Operating Manual2.5 Defining a ProcessThe following procedure is used to define a process. (All steps do not necessari

2 - 23IPN 074-379-P1KCygnus Operating Manual2.6 State DescriptionsTable 2-1 State DescriptionsSTATE CONDITION RELAY CONTACT STATUSSubstrate Shutte

2 - 24 IPN 074-379-P1K Cygnus Operating Manual2.7 Special FeaturesCygnus has several special features to enhance the performance of the instrument.2

2 - 25IPN 074-379-P1KCygnus Operating ManualA crystal switch will NOT automatically occur: During a state of STOP or READY. During deposition, if

2 - 26 IPN 074-379-P1K Cygnus Operating Manual2.7.3 Source/Crucible SelectionCygnus can control a source with up to 64 crucibles, through up to six

2 - 27IPN 074-379-P1KCygnus Operating Manual.NOTE: If the crucible output type were normally closed (NC), Table 2-2 would need to be modified by exc

2 - 28 IPN 074-379-P1K Cygnus Operating Manual2.7.4 Hand-Held ControllerA Hand-Held Controller, see Figure 2-13, is provided as an accessory with th

2 - 29IPN 074-379-P1KCygnus Operating Manual2.7.5 Test ModeThis instrument contains a software-controlled test mode which simulates actual operatio

2 - 30 IPN 074-379-P1K Cygnus Operating Manual2.7.7 Lock CodesA Program Lock Code can be entered to prevent unauthorized changing of parameters. Thi

2 - 31IPN 074-379-P1KCygnus Operating ManualDATE: MM-DD-YYYYTIME: XX:XXCHANNEL #: #RUN TIME: XX:XXDEPOSITION TIME: XX:XXTHICKNESS: ###.### kÅAVE. AG

2 - 32 IPN 074-379-P1K Cygnus Operating ManualIf two Channels are co-deposited, the first Channel to have a source shutter close will be data-logged

3 - 1IPN 074-379-P1KCygnus Operating ManualChapter 3Channel Parameters3.1 IntroductionCygnus can store the definition parameters for 6 Channels (or

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

3 - 2 IPN 074-379-P1K Cygnus Operating Manual3.2 Channel ParametersChannel definition is done by pressing the F1 function key on the CHANNEL display

3 - 3IPN 074-379-P1KCygnus Operating ManualThe tooling factor is calculated using the equation:[1]where TFi = Initial Tooling Factor, Tm = Actual Th

3 - 4 IPN 074-379-P1K Cygnus Operating ManualMAXIMUM POWER . . . . . . . . . . . . . 0.0 to 99.99% (default = 90.00)This parameter is used to set the

3 - 5IPN 074-379-P1KCygnus Operating ManualDEP AFTER PREDEP . . . . . . . . . . . 0, 1, 2 (default = 1)This parameter is used to determine which rat

3 - 6 IPN 074-379-P1K Cygnus Operating ManualAVERAGING TIME . . . . . . . . . . . . . 0 to 30 min (default = 0)This parameter value determines the a

3 - 7IPN 074-379-P1KCygnus Operating ManualCRUCIBLE. . . . . . . . . . . . . . . . . . . . 1 to the maximum number of crucibles programmed. (default

3 - 8 IPN 074-379-P1K Cygnus Operating ManualCRYSTAL STABILITY . . . . . . . . . . . 0 to 9 (default = 0)The Crystal Stability parameter can also be

3 - 9IPN 074-379-P1KCygnus Operating ManualMAX POWER OPTION . . . . . . . . . . 0, 1, 2 (default = 1)This parameter value determines what action wi

3 - 10 IPN 074-379-P1K Cygnus Operating ManualRATEWATCHER OPTION . . . . . . . . 0, 1, 2 (default = 0)This parameter controls the use of the RateWatc

3 - 11IPN 074-379-P1KCygnus Operating Manual If the noise is crystal frequency resolution limited — the thickness change over one second provides t

3 - 12 IPN 074-379-P1K Cygnus Operating Manual3.3 Channel Hardware ParametersChannel Hardware parameters define the digital-to-analog (DAC) function

3 - 13IPN 074-379-P1KCygnus Operating ManualDAC RATE RANGE. . . . . . . . . . . . . 0 - 999 (default = 0)This parameter determines the function of t

3 - 14 IPN 074-379-P1K Cygnus Operating ManualSENSOR SHUTTER OUTPUT . . . . 0 to 38 (default = 0)This parameter designates which of the 38 outputs i

3 - 15IPN 074-379-P1KCygnus Operating Manualthe outputs are binary encoded (actual coding is binary - 1, with 000 representing position 1 and 111 re

3 - 16 IPN 074-379-P1K Cygnus Operating ManualTURRET DELAY . . . . . . . . . . . . . . . 1 to 60 sec (default = 5)If Turret Feedback is not used a ti

4 - 1IPN 074-379-P1KCygnus Operating ManualChapter 4General Parameters4.1 IntroductionCygnus system level configuration is accomplished through the

4 - 2 IPN 074-379-P1K Cygnus Operating Manual4.2 General Parameter DisplayThe GENERAL PARAMETERS display is shown in Figure 4-2.Figure 4-2 GENERAL

4 - 3IPN 074-379-P1KCygnus Operating Manual4.3 General Parameters DefinitionNOTE: All general parameters can be changed only when all channels are

4 - 4 IPN 074-379-P1K Cygnus Operating ManualNOTE: If a configuration file from a unit with version 1.70 or earlier firmware is to be loaded into a u

4 - 5IPN 074-379-P1KCygnus Operating ManualDAC 4. . . . . . . . . Channel 4 PowerDAC 5. . . . . . . . . Channel 1 ThicknessDAC 6. . . . . . . . .

TOC - 1IPN 074-379-P1KCygnus Operating ManualTable Of ContentsChapter 1Introduction and Specifications1.1 Introduction. . . . . . . . . . . . . . .

4 - 6 IPN 074-379-P1K Cygnus Operating Manual Single or multiple actions may be triggered by Inputs or the fulfillment of a user specified logical c

4 - 7IPN 074-379-P1KCygnus Operating ManualFigure 4-3 Display Tree for Logic Statement Editing4.4.2.1 Logic Statement DirectoryFigure 4-4 Cygnus

4 - 8 IPN 074-379-P1K Cygnus Operating ManualFigure 4-5 Logic Directory DisplayLOGIC STATEMENTS Display Function KeysF1 PAGE FORWARDTo access the ne

4 - 9IPN 074-379-P1KCygnus Operating ManualLogic Statement Display Function KeysF1 SELECTIf the cursor is on IF (Event), or THEN (Action), pressing

4 - 10 IPN 074-379-P1K Cygnus Operating ManualEvent Selection Display Function KeysF1 REPLACEChanges the Event or Action in reverse video to what is

4 - 11IPN 074-379-P1KCygnus Operating ManualEXTERNAL IN ###Designates a hardware input which, when it changes state, can be used to trigger an Actio

4 - 12 IPN 074-379-P1K Cygnus Operating ManualRISE 1 ###Sets the logic condition to be true at the start of Rise Time 1 for the designated Channel. I

4 - 13IPN 074-379-P1KCygnus Operating ManualTIMER HH:MM ### HH:MMSets the logic condition to be true when the designated timer ### reaches the speci

4 - 14 IPN 074-379-P1K Cygnus Operating Manual4.4.2.4.1 Action Definitions (THEN)NOTE: The following are level outputs and once turned on will remai

4 - 15IPN 074-379-P1KCygnus Operating ManualGOTO POST DEP ###This action places the designated Channel ### into the Idle Ramp state. This action can