Inficon MDC-360 Thin Film Deposition Controller Manuale Utente

OPERATION AND SERVICE MANUAL MODEL MDC-360 MAXTEK FILM DEPOSITION CONTROLLER P/N 179800 S/N _____________ MAXTEK, INC. http://www

x List of Tables TABLE 5-1 TROUBLE CONDITIONS AND WARNINGS... 5-9 TABLE 8-1 DAC SYSTEM INTERFA

MDC-360 DEPOSITION CONTROLLER TICS 7-6 Figure 7-4 Sensor Input Buffer circuit INPUT/OUTPUT CHARACTERIS

MDC-360 DEPOSITION CONTROLLER 7-7 Figure 7-5 Source Output Driver circuitINPUT/OUTPUT CHARACTERISTICS

MDC-360 DEPOSITION CONTROLLER 8-1CONTROLLER INSTALLATION 8. CONTROLLER INSTALLATION 8.1 MOUNTING The MDC-360 is intended for rack mounting. For maxi

MDC-360 DEPOSITION CONTROLLER 8-2CONTROLLER INSTALLATION of the desired no nal input voltage y removing and reorienting the voltage selec n board.

MDC-360 DEPOSITION CONTROLLER 8-3CONTROLLER INSTALLATION data from the MDC-360 to the host; pin 3 ‘RxD’ receives data from the host. Pin 7 ‘CTS’ is

MDC-360 DEPOSITION CONTROLLER Figure 8-1 MDC-360 Front Panel CONTROLLER INSTALLATION 8-4

MDC-360 DEPOSITION CONTROLLER 8-5 Figure 8-2 MDC-360 Rear Panel CONTROLLER INSTALLATION

MDC-360 DEPOSITION CONTROLLER TION 8-6 Figure 8-3 DAC socket connector pin out Pin Number Signal 1 Output #1 2 Output #1 Return 3 Output #2 4 Ou

MDC-360 DEPOSITION CONTROLLER 8-7 Figure 8-5 D9S DTE Rear-panel RS-232 socket connector Pin Signal Number RS-232 RS-485 1 Not used Rx-

MDC-360 DEPOSITION CONTROLLER 1. GENERAL DESCRIPTION 1.1 PURPOSE The MDC-360 provides both automatic control of single or multi-layer film deposition

MDC-360 DEPOSITION CONTROLLER TION 8-8 Figure 8-6 D37P Discrete I/O plug connector Pin Number Function 1, 20 Abort output 2, 21, 11 Output 1 (Com

MDC-360 DEPOSITION CONTROLLER 8-9MDC-360 DEPOSITION CONTROLLER CONT 8-9 Figure 8-7 RJ11 Front Panel RS-232 Connector Pin Number Signal 1 Not used

MDC-360 DEPOSITION CONTROLLER TION 8-10 Figure 8-9 MDC-360 Top View (Cover Removed)CONTROLLER INSTALLA

MDC-360 DEPOSITION CONTROLLER 9-1SYSTEM INSTALLATION 9. SYSTEM INSTALLATION 9.1 SENSOR HEAD DESCRIPTION The sensor head is designed for simple insta

MDC-360 DEPOSITION CONTROLLER 9-2SYSTEM INSTALLATION Use a shutter to shield the sensor during initial soak periods to protect the crystal from any

MDC-360 DEPOSITION CONTROLLER 9-3SYSTEM INSTALLATION drawer with the full electrode side down and the pattern electrode side up. Make tom of the dra

MDC-360 DEPOSITION CONTROLLER 9-4Figure 9-1 Sensor Oscillator Schematic SYSTEM INSTALLATION

MDC-360 DEPOSITION CONTROLLER 9-5 Figure 9-2 Sensor Oscillator Outline SYSTEM INSTALLATION

MDC-360 DEPOSITION CONTROLLER 9-6 Figure 9-3 IF-111 Instrumentation Feedthrough Outline SYSTEM INSTALLATION

MDC-360 DEPOSITION CONTROLLER 9-7 Figure 9-4 SH-102 Sensor Head OutlineSYSTEM INSTALLATION

MDC-360 DEPOSITION CONTROLLER 1.2.7 ABORT STATUS RETENTION In the event that the MDC-360 does abort during the deposition process, pertinent inform

MDC-360 DEPOSITION CONTROLLER 9-8 Figure 9-5 Typical System InstallationSYSTEM INSTALLATION

MDC-360 DEPOSITION CONTROLLER 10-110. THEORY OF OPER N MEASUREMENC-360 uses a quartz crys s the basic transducing element. The quartz lf is a flat

MDC-360 DEPOSITION CONTROLLER 10-3THEORY OF OPERATION in the material. Note that if the acoustic impedance ratio is equal to one, quartz a number of

MDC-360 DEPOSITION CONTROLLER 10-410.4 RATE CALCULATION The deposition rate is calculated by dividing the change in thickness between r to filter

MDC-360 DEPOSITION CONTROLLER 10-5THEORY OF OPERATION Determine the average film thickness on the test substrates and use the followequation to calcu

MDC-360 DEPOSITION CONTROLLER 10-6Table 10-1 Material Density an ance Value Material d Acoustic ImpedSymbol Density Impedance Aluminum Al 2.70 8.17

MDC-360 DEPOSITION CONTROLLER 10-7THEORY OF OPERATION Manganese Mn 7.20 23.42Manganese (II) Sulfide 9.39 MnS 3.99 Mercury Hg 13.46 11.93 Molybden

MDC-360 DEPOSITION CONTROLLER 11-1 COMPUTER INTERFACE 11. COMPUTER INTERFAree types of compute ith an RS-232 -488 interfaces are available as options

MDC-360 DEPOSITION CONTROLLER 1.3 SPECIFICATIONS 1.3.1 MEASUREMENT Frequency Resolution 0.03 Hz @6.0 MHz Mass Resolution 0.375 ng/cm2Thickness Acc

MDC-360 DEPOSITION CONTROLLER 11-2 COMPUTER INTERFACE lists pin signal assignments, including a definition whether t l is -360 o inpu the MDC 60.

MDC-360 DEPOSITION CONTROLLER 11-3 COMPUTER INTERFACE The checksum is the compliment of the one byte sum of all bytes from, and including, the instru

MDC-360 DEPOSITION CONTROLLER 11-4 COMPUTER INTERFACE 5 Invalid message. 6 Process undefined. Can’t add layer. 7 Insufficient layer space. Can’t

MDC-360 DEPOSITION CONTROLLER 11-5 COMPUTER INTERFACE 36 Send Process Log Directory 37 Send Process Log Data 38 Initiate Remote Action Command 39

MDC-360 DEPOSITION CONTROLLER 11-6 COMPUTER INTERFACE Parameter Name Length (bytes) Range DAC#1 Output 1 =Rate, 23=RateDev, 24=Pwr, 25=Thk) (22D

MDC-360 DEPOSITION CONTROLLER 11-7 COMPUTER INTERFACE Year 2 (0-99) Total 12 byt es Example: To instruct the controller to send the t e the comp

MDC-360 DEPOSITION CONTROLLER 11-8 COMPUTER INTERFACE Deposition Rate #2 2 49 1 0-9999 0.1 Å/sec Deposition Rate #3 2 51 1 0-9999 0.1 Å/s

MDC-360 DEPOSITION CONTROLLER 11-9 COMPUTER INTERFACE Exa he con terial lisChr$(255)+Chr$(254)+Chr$(1MDC’s message length is li to 249 by ller will

MDC-360 DEPOSITION CONTROLLER 11-10 COMPUTER INTERFACE The message number is included as a safeguard to insure that the all messagesreceived and ar

MDC-360 DEPOSITION CONTROLLER 11-11COMPUTER INTERFACE Example: To instruct the controller to send the process layer parameters for )+Chr$(0)+Cing la

MDC-360 DEPOSITION CONTROLLER Sensor # 1 to 4 Crystal # 1 to 8 Source # 1 to 4 Pocket # 1 to 8 Material Density 0.80 to 99.9 gm/cm3Acoustic Imp

MDC-360 DEPOSITION CONTROLLER 11-12 COMPUTER INTERFACE Parameter Name Length (bytes) Decimal Pt. Position Range Units Number of Pockets 1 None

MDC-360 DEPOSITION CONTROLLER 11-13COMPUTER INTERFACE 46=None, 47=Dual Control 1 * 68=Direct, 69=BCD, 70=Indiv, None 71=Manual Drive 1 63=Inline, 64

MDC-360 DEPOSITION CONTROLLER 11-14 COMPUTER INTERFACE The Type paraminternal. 0=Undeter defines whether the input is undefined, user defined, or

MDC-360 DEPOSITION CONTROLLER 11-15COMPUTER INTERFACE Condition Name Condition Number Sub-condition Range Controller State 128 0-25| Input 129 0-

MDC-360 DEPOSITION CONTROLLER 11-16 COMPUTER INTERFACE Format: Header, Address, Instruction=25, Length=44,Output #(0-15),1 byte Type, 16 byte Name

MDC-360 DEPOSITION CONTROLLER 11-17COMPUTER INTERFACE 28. Receive Action setup (Code #27) Inst enter the parameters for Ac into ption of the Acti

MDC-360 DEPOSITION CONTROLLER 11-18 COMPUTER INTERFACE bit 7 = System Setup Corrupted Alarm 2 Errors 1 bit 3 = Sound Alarm Action bit 4 = Rate De

MDC-360 DEPOSITION CONTROLLER 11-19COMPUTER INTERFACE Position Source #3 Pocket Position 1 (1-8) Source #4 Pocket Position 1 (1-8) Source #1 Power 2

MDC-360 DEPOSITION CONTROLLER Power 4 String % Thickness 5 String KÅ Deposition rate 4 String Å/sec Time to go 7 String Seconds Crystal health

MDC-360 DEPOSITION CONTROLLER 11-21COMPUTER INTERFACE 34. Set Active Source Power (Code #33) power value into the active the controller is in the

MDC-360 DEPOSITION CONTROLLER 1.3.7 INPUT/OUTPUT CAPABILITY Sensor Inputs 2 Standard and 2 optional BNC inputs Source Outputs 2 Standard and 2 opti

MDC-360 DEPOSITION CONTROLLER 11-22 COMPUTER INTERFACE digit of 2 and a second digit of 9. The 2 comes from the four MSbits and the 9 comes from t

MDC-360 DEPOSITION CONTROLLER 11-23COMPUTER INTERFACE Parameter Name Length (bytes) Units Message Number 2 1-1125 Thickness 3 Angstroms Rate 3

MDC-360 DEPOSITION CONTROLLER action indefinitely. So the set hold in state action will cause the controller to hold in the current state until the

MDC-360 DEPOSITION CONTROLLER 11-25Instructs the controller to either enable or disable the MDC-360's front panel keys A value of 255 disables t

MDC-360 DEPOSITION CONTROLLER 12. REPAIR AND MAINTENANCE 12.1 HANDLING PRECAUTIONS Integrated Circuits (I.C.’s) can be damaged by static discharge

MDC-360 DEPOSITION CONTROLLER CAUTION Remove AC line power before disassembling the controller to avoid electrical shock. 12.3 TROUBLE SHOOTING AI

MDC-360 DEPOSITION CONTROLLER power through the Remote Power b) Controller is in Abort mode. c) Faulty Remote Power Handset. d) Bad connection from

MDC-360 DEPOSITION CONTROLLER 13. APPENDIX A -1 Source Control Cable Color Code - (4 pin Mini DIN) ber Color Signal Table 13Pin Num1 Black S

MDC-360 DEPOSITION CONTROLLER Rotator Delay 0 to 99 sec Source Voltage Range 2.5, 5, 10 volts 1.3.10 RECORDER PARAMETERS Recorder #1/#2 Output R

MDC-360 DEPOSITION CONTROLLER Table 13-2 DAC Cable Color Code - (7 pin Mini DIN) Color Signal Pin Number 1 Black tput #1 DAC ou2 Green DAC

B – PARAMETER TEMPLATES 14. APPENDIX

MDC-360 DEPOSITION CONTROLLER 14.1 MATERIAL Material Nu mber Material Na me Sensor # Crystal # Source # Pocket # Material De sity nAcoustic Imped

MDC-360 DEPOSITION CONTROLLER MATERIAL CONT’D Maximum Power Max Power Alarm Delay Minimum Power Rate Deviation Attention Rate Deviation Alarm R

MDC-360 DEPOSITION CONTROLLER 14.2 PROCESS Page ___ of ___ Process Number Process Name Edit password Run/View password Layer # Material Thickne

MDC-360 DEPOSITION CONTROLLER 14.3 DISPLAY SETUP Pause On Layer Complete  Yes  No Display Negatives  Enabled  Disabled Thickness Graph Scal

MDC-360 DEPOSITION CONTROLLER 14.4 INPUTS True/Logic Card # Pin # Return Pin # Input # Input Name 1  LOW  HIGH 2  LOW  HIGH 3  LO

MDC-360 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.5 OUTPUTS Output # Output Name Conditions Card # Pin # Return Pin #

MDC-360 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.6 ACTIONS Output # Action Name Conditions 1 2 3 4 5

MDC-360 DEPOSITION CONTROLLER 130200-2 IF-111 Instrument Feedthrough, 1" O-Ring with 1 electrical connector and dual 3/16" water tubes. 130

MDC-360 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.7 SENSOR SETUP Sensor #  1  2  3  4 Num

MDC-360 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.9 DAC SETUP DAC Output #1  Rate  Rate Dev.  Power  Th

15. Figure 15-1 Menu Map

MDC-360 DEPOSITION CONTROLLER 2. FRONT PANEL DISPLAYS AND CONTROLS The front panel is divided into two sections, the operating section and the progr

ii© 1995-2002 MAXTEK, INC. All rights reserved. First Edition, March 1995 Second Edition, Revision A, March 1996 Revision B, June 1996

MDC-360 DEPOSITION CONTROLLER 2.1.6 TIME TO GO Time To Go is displayed in hours, minutes and seconds. This display can be configured to show the e

MDC-360 DEPOSITION CONTROLLER 2.3.2 START KEY The Start key starts a process, starts a layer, or resumes an aborted process. A green light behind t

MDC-360 DEPOSITION CONTROLLER Figure 2-3 Programming Section 2.3.8 ARROW KEYS The arrow keys are used to navigate through the programming and setu

MDC-360 DEPOSITION CONTROLLER 2.3.10 ALPHANUMERIC KEYBOARD The alphanumeric keyboard is used to edit controller programs. Refer to Section 4 for t

MDC-360 DEPOSITION CONTROLLER 3-1BENCH CHECKOUT & INSPECTION 3. BENCH CHECKOUT & INSPECTION 3.1 INSPECTION Your MDC-360 was released to the

MDC-360 DEPOSITION CONTROLLER 3-2 BENCH CHECKOUT & INSPECTION 3.3.1 MATERIAL #1 PARAMETERS Material Name Cr Sensor # 1 Crystal # 1 Source #

MDC-360 DEPOSITION CONTROLLER 3-3BENCH CHECKOUT & INSPECTION 3.3.2 MATERIAL #2 PARAMETERS Material Name Au Sensor # 2 Crystal # 1 Source # 1

MDC-360 DEPOSITION CONTROLLER 3-4 BENCH CHECKOUT & INSPECTION 3.3.3 PROCESS PARAMETERS Process Name Layer No. Thickness Material Sample 1 0.

MDC-360 DEPOSITION CONTROLLER 3-5BENCH CHECKOUT & INSPECTION they are installed. One exception for the Discrete I/O boards is that the jumper J2

WARRANTY Maxtek, Inc. warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with i

MDC-360 DEPOSITION CONTROLLER 3-6 BENCH CHECKOUT & INSPECTION In addition to the individual channel output pins there are two control pins whic

MDC-360 DEPOSITION CONTROLLER 3-7 Figure 3-1 Remote Power HandsetBENCH CHECKOUT & INSPECTION

MDC-360 DEPOSITION CONTROLLER 4-1PROGRAMMING AND CONTROLLER SETUP 4. PROGRAMMING AND CONTROLLER SETUP 4.1 GENERAL 4.1.1 NAVIGATING THE MENU STRUCTUR

MDC-360 DEPOSITION CONTROLLER 4-2 PROGRAMMING AND CONTROLLER SETUP key to go back to the Main Menu. Each of the programming screens is described ey

MDC-360 DEPOSITION CONTROLLER 4-3PROGRAMMING AND CONTROLLER SETUP record passwords, because if you forget a password it will not be possible togain a

MDC-360 DEPOSITION CONTROLLER 4-4 PROGRAMMING AND CONTROLLER SETUP 4.2 GETTING STARTED at you g on the crystal. This mode is useful for testing th

MDC-360 DEPOSITION CONTROLLER 4-5PROGRAMMING AND CONTROLLER SETUP If th. The setsource manualSinMu multiple pocket source, you need only set the Numb

MDC-360 DEPOSITION CONTROLLER 4-6 PROGRAMMING AND CONTROLLER SETUP activate either the drive up or drive down outputs to rotate to the required pock

MDC-360 DEPOSITION CONTROLLER 4-7PROGRAMMING AND CONTROLLER SETUP BCD - Binary Coded Decimal position feedback. This feedback type ht pocket sourc

iv Table of Contents 1. GENERAL DESCRIPTION... 1-1 1.1 P

MDC-360 DEPOSITION CONTROLLER 4-8 PROGRAMMING AND CONTROLLER SETUP b. Automatic Crystal Position Control - There are two parameters requiring defin

MDC-360 DEPOSITION CONTROLLER 4-9PROGRAMMING AND CONTROLLER SETUP output “Senso N tal2r Crys ” will be true while all the other position e lse. C-36

MDC-360 DEPOSITION CONTROLLER 4-10 PROGRAMMING AND CONTROLLER SETUP Monitor” for future identification. Note the I/O card and the pin numbersof the

MDC-360 DEPOSITION CONTROLLER 4-11PROGRAMMING AND CONTROLLER SETUP all materials and the parameters which must be set to utilize the different featur

MDC-360 DEPOSITION CONTROLLER 4-12 PROGRAMMING AND CONTROLLER SETUP 4.2.7.2 AUTOMATIC CRYSTAL SWITCHING To enable automatic Crystal switching upon

MDC-360 DEPOSITION CONTROLLER 4-13clear when within the limit. The process will abort when the abort level is eeded and the power is at the maximum

MDC-360 DEPOSITION CONTROLLER 4-14 PROGRAMMING AND CONTROLLER SETUP Figure 4-2 Select Process screen 4.3.1.1 DEFINE A PROCESS Figure 4-3 Define

MDC-360 DEPOSITION CONTROLLER 4-15PROGRAMMING AND CONTROLLER SETUP 1 to confirm and 0 to cancel the change. Each time you want to edit this procesyo

MDC-360 DEPOSITION CONTROLLER 4-16 PROGRAMMING AND CONTROLLER SETUP Figure 4-4 Select Layer Material screen ill present the Select 4.3.2 VIEW/EDIT

MDC-360 DEPOSITION CONTROLLER 4-17 Figure 4-6 Define Material screen Sensor 1 Crystal 1 Source 1 Pocket

3.3 SAMPLE PROGRAM... 3-1 3.3.1 MATERIAL #1 PARAMET

MDC-360 DEPOSITION CONTROLLER 4-18used. A list of the more commonly used film densities is presented in Table 10-1. .99 gm/cm2/sec) y the MDC-360

MDC-360 DEPOSITION CONTROLLER 4-19PROGRAMMING AND CONTROLLER SETUP ds= Distance from source to substrate. Empirical calibration of the tooling facto

MDC-360 DEPOSITION CONTROLLER 4-20 PROGRAMMING AND CONTROLLER SETUP power before the source shutter is opened. In the rate establish state the crys

MDC-360 DEPOSITION CONTROLLER 4-21PROGRAMMING AND CONTROLLER SETUP This parameter defines the fourth deposition rate. 30. Ramp Start Thk #4 (0.000 t

MDC-360 DEPOSITION CONTROLLER 4-22 PROGRAMMING AND CONTROLLER SETUP by the Power Alarm Delay parameter then a Minimum Power Alert warninbe given. g

MDC-360 DEPOSITION CONTROLLER 4-23any of its six crystals while the dual sensor head uses two sensor inputs to measure either crystal. d (4 digit str

MDC-360 DEPOSITION CONTROLLER 4-24 PROGRAMMING AND CONTROLLER SETUP 1. Pause On Layer Complete (Yes or No) This parameter determines whether the

MDC-360 DEPOSITION CONTROLLER 4-25PROGRAMMING AND CONTROLLER SETUP Inputs function. By itself a user defined input has no effect, it can only be usew

MDC-360 DEPOSITION CONTROLLER 4-26 Input Input Name True Card Pin-Ret PROGRAMMING AND CONTROLLER SETUP 4.3.3.3 PROGRAM OUTPUTS The contro

MDC-360 DEPOSITION CONTROLLER 4-27Two screens are required to program the Discrete outputs. The first screen provides for selecting the output to be

vi 5.4 RESUMING AN ABORTED OR HALTED PROCESS... 5-2 5.5 STATUS DISPLAYS ...

MDC-360 DEPOSITION CONTROLLER 4-284.3.3.3.1 ENTERING A CONDITION STRING ring comprises one or more individual conditions linked together by erators

MDC-360 DEPOSITION CONTROLLER 4-29 PROGRAMMING AND CONTROLLER SETUP 4.3.3.3.2 CONDITION TYPES e: Soak Rise Rate Ramp 1 Deposit 2 Rate Ramp 2 Deposi

MDC-360 DEPOSITION CONTROLLER 4-30 PROGRAMMING AND CONTROLLER SETUP Ramp To Idle Layer Complete Process Complete r ess Resume ontroller Events are:

MDC-360 DEPOSITION CONTROLLER 4-31Process - The process condition is evaluated true whenever the selected procethe current process. ss is r dition is

MDC-360 DEPOSITION CONTROLLER 4-32Action Name: > < Conditions : Valid operators: 1=!, 2

MDC-360 DEPOSITION CONTROLLER 4-33SouAct Parameter/Status display. Sound Alert - in tSouActSta ger the start of the currently selected process. T

MDC-360 DEPOSITION CONTROLLER 4-34 PROGRAMMING AND CONTROLLER SETUP sensor head, this parameter would be set to the number of crystals that the sens

MDC-360 DEPOSITION CONTROLLER 4-35PROGRAMMING AND CONTROLLER SETUP possible. Therefore to get from position 6 to 1, the direction must be dothrough

MDC-360 DEPOSITION CONTROLLER 4-36NO used. 6. Rotator 0 t ondThis param s ere ions. If the feedback type is “None” (Not recom nded. S ons nstal

MDC-360 DEPOSITION CONTROLLER 4-37PROGRAMMING AND CONTROLLER SETUP 4. Control (Manual, Direct, BCD, Indv) nder control of the MDC-360. Under manua

8.3.2 VOLTAGE SELECTION ... 8-1 8.3.3 GROUND LUG...

MDC-360 DEPOSITION CONTROLLER 4-38 PROGRAMMING AND CONTROLLER SETUP BCD - Binary Coded Decimal position feedback. This feedback type uses binary

MDC-360 DEPOSITION CONTROLLER 4-394.3.3.7 EDIT DAC SETUP Se p from menu will present the DA allow eter and its signal range for each of the two DA

MDC-360 DEPOSITION CONTROLLER This parameter determines the uncoated crystal frequency type for all sensor inputs. The default setting is 6.0 MHz.

MDC-360 DEPOSITION CONTROLLER 4-41 me (minutes) Data Points/Minute Aprox. Storage Ti30 900 60 450 120 225 300 90 600 45 8. Time (00:00-23:59) This

MDC-360 DEPOSITION CONTROLLER 5-15. OPERATING THE MDC-360 5.1 SIGN-ON SCREEN At power-on the Parameter/Status display will present a screen which det

MDC-360 DEPOSITION CONTROLLER 5-2 OPERATING THE MDC-360 Figure 5-2 Run Process Selection Screen inition and the rrective t key to abort the proce

MDC-360 DEPOSITION CONTROLLER 5-35.5 STATUS DISPLAYS There are six different run time status screens that can be displayed at any timepressing the St

MDC-360 DEPOSITION CONTROLLER 5-4Sample Cr Process Ready 5 P o w e r % 0 1 Figure 5-6

MDC-360 DEPOSITION CONTROLLER 5-5OPERATING THE MDC-360 The data log option provides storage for up to 16 process logs and/or 27,000 data ck such that

viii 14.10 UTILITY SETUP... 14-11

MDC-360 DEPOSITION CONTROLLER 5-6 Process Name Run# Time Date 0002 12:05 12/28/ < Aborted us94 Normal Stat>Sample Sample

MDC-360 DEPOSITION CONTROLLER 5-7OPERATING THE MDC-360 5.7 MODES Modes are conditions which the controller can occupy. Some modes are indicatedby th

MDC-360 DEPOSITION CONTROLLER 5-8 OPERATING THE MDC-360 5.7.7 MANUAL This mode is indicated by the red LED behind the Manual key. In this mode the

MDC-360 DEPOSITION CONTROLLER 5-9OPERATING THE MDC-360 Alert Action Alert * Xtal Fail Switch Attention Crystal Switch Xtal Mrgn Switch Atten

MDC-360 DEPOSITION CONTROLLER 5-10 OPERATING THE MDC-360 5.9.1.5 MATERIAL MEMORY CORRUPTED The integrity of the selected material has been changed s

MDC-360 DEPOSITION CONTROLLER 5-11OPERATING THE MDC-360 5.9.1.14 RATE DEV. ALERT The deposition rate deviation is greater than the value set in the R

MDC-360 DEPOSITION CONTROLLER 5-12 OPERATING THE MDC-360 5.9.1.24 CHANGE CRYSTAL... Prompts the operator to switch the sensor to the correct crystal

MDC-360 DEPOSITION CONTROLLER 5-13 Figure 5-11 Typical Process ProfileOPERATING THE MDC-360

MDC-360 DEPOSITION CONTROLLER 6-1Tuning the MDC-360 Control Loop 6. TUNING THE MDC-360 CONTROL LOOP 6.1 Control Loop Basics If evaporation rate wer

Table of Figures FIGURE 2-1 OPERATING DISPLAY... 2-1 FIGURE 2-

MDC-360 DEPOSITION CONTROLLER 6-2 Tuning the MDC-360 Control Loop soon as we’ve learned them, we know what we have to do to correct for errors and w

MDC-360 DEPOSITION CONTROLLER 6-3Tuning the MDC-360 Control Loop gone 48 miles because of some traffic earlier on. Our Integral error is 2 miles. I

MDC-360 DEPOSITION CONTROLLER 6-4 Tuning the MDC-360 Control Loop The following table lists some recommended PID values for different types of ent a

MDC-360 DEPOSITION CONTROLLER 6-5Tuning the MDC-360 Control Loop With the Proportional Gain at an acceptable value, the next step is to adjust the De

MDC-360 DEPOSITION CONTROLLER 7-1INPUT/OUTPUT CHARACTERISTICS 7. INPUT/OUTPUT CHARACTERISTICS The following section describes the electrical characte

MDC-360 DEPOSITION CONTROLLER Figure 7-1. The Passive inputs are activated by shorting the input’s pins together. The inputs are internally pulled

MDC-360 DEPOSITION CONTROLLER 7-3 Figure 7-1 Passive Input Buffer circuit INPUT/OUTPUT CHARACTERISTICS

MDC-360 DEPOSITION CONTROLLER TICS 7-4 Figure 7-2 Active Input Buffer Circuit INPUT/OUTPUT CHARACTERIS

MDC-360 DEPOSITION CONTROLLER 7-5 Figure 7-3 DAC Output circuit INPUT/OUTPUT CHARACTERISTICS