Inficon MDC-260 Thin Film Deposition Controller Manuale Utente

OPERATION and SERVICE MANUALMDC-260Film Deposition ControllerIPN 622800 Rev. E

vSAFETY TERMS AND SYMBOLS Terms Used in This Manual WARNING. Warning statements identify conditions or practices that could result in personnel in

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-6 Figure 7-4 Source Output Driver circuit

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-18. CONTROLLER INSTALLATION 8.1 MOUNTING The MDC-260 is intended for either rack mounting or

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-2 8.3.2 POWER CORD WARNING: To avoid electrical shock, always connect the power cord to an

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-35. If fuse replacement is needed, pull out the fuse holders. Check and replace fuse(s) wi

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-4 8.3.9.1 CONFIGURING INPUT TYPE CAUTION: To avoid damage to the instrument, verify the in

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-58.5 CONTROLLER COVER REMOVAL WARNING: Under no circumstances should the controller cover

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-6Figure 8-3 MDC-260 Front Panel

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-7 Figure 8-4 MDC-260 Rear Panel

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-8 Figure 8-5 Source Socket Connector Pin Out Pin Signal Number Source-Sensor Bd #1 So

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-9 Figure 8-7 D37P Discrete I/O plug connector Pin Number Function 1, 20 Abort output 2

vi Table of Contents SAFETY PRECAUTION AND PREPARATION FOR USE...IV SAFETY TERMS AND SYMBOLS...

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-10 Figure 8-8 Front Panel Manual Power Connector Pin Number Signal 1 Decrease 2 GND 3 A

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-11 Figure 8-9 MDC-260 Top View (Cover Removed)

MDC-260 DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-12 IMPORTANT! RECOMMENDED GROUNDING METHOD Figure 8-10 Recommended Grounding Method1. As

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-19. SYSTEM INSTALLATION 9.1 SENSOR HEAD DESCRIPTION The sensor head is designed for simple inst

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-2 Use a shutter to shield the sensor during initial soak periods to protect the crystal from any

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-3connector to the sensor head. The feedthrough has a standard BNC connector for the coaxial con

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-4 3. Install a new crystal in the drawer. Observe its orientation. The pattern electrode shou

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-5Figure 9-1 Removing the Crystal Retainer Figure 9-2 Installing the Sensor Crystal CrystalRetaine

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-6 9.6 TYPICAL SYSTEM INSTALLATION A typical system installation is shown in Figure 9-7. Instal

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-7Figure 9-3 SO-100 Sensor Oscillator Outline

vii2.2.11 ALPHANUMERIC KEYPAD... 2-4 3. BENCH CHECKOUT & INSPECTI

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-8Figure 9-4 VPLO-6 Sensor Oscillator Outline

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-9Figure 9-5 IF-111 Instrumentation Feedthrough Outline

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-10Figure 9-6 SH-102 Sensor Head Outline

MDC-260 DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-11 Figure 9-7 Typical System Installation

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-1 10. THEORY OF OPERATION 10.1 BASIC MEASUREMENT The MDC-260 uses a quartz crystal as the bas

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-2 Improvements in sensor crystals and oscillator circuits resulted in a significant increase in

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-3 in the material. Note that if the acoustic impedance ratio is equal to one, quartz on quartz,

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-4 10.3.2 CRYSTAL STABILITY A sensor crystal cannot distinguish the difference between a frequen

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-5 The temperature induced drift is reversible, which means that, even if the temperature of the

viii 5.4 RESUMING AN ABORTED OR HALTED PROCESS... 5-2 5.5 GRAPH DISPLAYS...

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-6 become cracked and the deposited film, even the electrode, starts to show scratches and tears

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-7 of these parameters is not necessary. A library of material names, density and acoustic imped

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-8 Configure Sensors parameters to select which sensors will be used to measure this material.

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-9 Table 10-1 Material Density and Acoustic Impedance Value Material Symbol Density (mg/cm2) Im

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-10 Chromium Cr 7.20 28.95 Chromium Boride CrB 6.17 * Chromium Carbide Cr3C3 6.68 * Cobalt

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-11Lead Telluride PbTe 8.16 13.56 Lithium Li 0.53 1.50 Lithium Bromide LiBr 3.47 7.18 Lithi

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-12 Sodium Na 0.97 1.84 Sodium Bromide NaBr 3.20 * Sodium Chloride NaCl 2.17 5.62 Sodium F

MDC-260 DEPOSITION CONTROLLER THEORY OF OPERATION 10-13Zinc Zn 7.04 17.18 Zinc Antimonide Zn3Sb2 6.30 * Zinc Fluoride ZnF2 4.95 * Zinc Oxide Z

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-1 11. COMPUTER INTERFACE 11.1 GENERAL The MDC-260 Deposition Controller features two USB socket

ix8.1 MOUNTING ... 8-1 8.2 PROPER GR

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-2 11.2 HOST API FUNCTIONS The following is a list of the host API functions: SI_GetNumDevices(

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-3 SI_GetProductString Description: This function returns a NULL terminated serial number (S/N)

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-4 SI_Close Description: Closes an “open” MDC-260 using the handle provided by SI_Open and set

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-5 SI_Write Description: Writes the specified number of bytes from the specified buffer to the

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-6 SI_GetTimeouts Description: Returns the current read and write timeouts. Prototype: SI_ST

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-7 11.3 PROTOCOL Once you have established a connection to the MDC-260, the next step is to actu

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-8 are decimal values stored as integers. To convert these values to their decimal equivalent, u

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-9 controller to transmit data back to the host computer, an additional message is sent immediatel

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-10 11.7 INSTRUCTION SUMMARY Instruction Code Description 0 Remote Keypress Activation of Cont

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-1111.8 INSTRUCTION DESCRIPTIONS The following section describes all of the valid instructions a

x 11.5 TRANSMISSION RECEIPT ... 11-8 11.6 TRANSMITTING AND RE

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-12 Code #01: Send System Information Description: Instructs the controller to transmit the hard

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-13Code #02: Send Utility Parameters Description: Instructs the controller to send the utility par

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-14 Response: • In addition to the normal transmission receipt, the controller will respond wit

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-15 Code #06: Send a Material Description: Instructs the controller to send all the material para

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-16 Deposit Rate #2 2 52 1 0...9999 0.1 Å/Sec Deposit Rate #3 2 54 1 0...9999 0.1 Å/Sec T

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-17Code #07: Receive a Material Description: Instructs the controller to enter all the incoming ma

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-18 Response: • In addition to the normal transmission receipt, the controller will respond with

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-19Code #10: Send Process Description: Instructs the controller to send all the process parameters

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-20 Response: • In addition to the normal transmission receipt, the controller will respond with

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-21 Response: • The controller will respond with the normal transmission receipt. NOTE: To modif

xi14.4 INPUTS ...14-6 14.5 OU

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-22 Format/Example: • To instruct the controller to send the data for a Process #6, Layer #2, tr

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-23Format/Example: • To instruct the controller to insert a layer right in front of Layer #Y in P

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-24 Code #16: Delete Process Layer Description: Instructs the controller to delete Layer #Y from

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-25 Code #18: Send Source Setup Description: Instructs the controller to send the source setup par

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-26 Format/Example: • To instruct the controller to send the source setup parameter list, transm

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-27Code #20: Send Sensor Setup Description: Instructs the controller to send the sensor setup para

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-28 Response: • In addition to the normal transmission receipt, the controller will respond with

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-29Code #22: Send Input Setup Description: Instructs the controller to send the Input parameter li

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-30 Code #23: Receive Input Setup Description: Instructs the controller to enter the incoming Inp

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-31Format/Example: • To instruct the controller to send the parameter list for Output #2, transmi

xii Table of Figures FIGURE 2-1 ARROW KEYS... 2

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-32 Allowable Conditions for Output Programming Condition Name Condition Number Sub-condition

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-33Code #25: Receive Output Setup Description: Instructs the controller to enter the incoming para

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-34 Response: • In addition to the normal transmission receipt, the controller will respond with

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-35Code #27: Receive Action Setup Description: Instructs the controller to enter the incoming para

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-36 Code #28: Send Controller Status Description: Instructs the controller to send the controller

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-3716 = Deposit #3 17 = Ramp to feed 18 = Feed hold 19 = Ramp to idle 20 = Layer complete 21 = Pr

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-38 Alert Errors 1 Bit 3 = Sound Alert Action Bit 4 = Minimum Power Alert Bit 5 = Maximum Powe

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-39Code #29: Start Process Description: Instructs the controller to start Process #N starting from

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-40 # Value Description Length Format Units 1 Power 4 String % 2 Average Thickness 5 Str

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-4129 Controller State 1 Binary (0...25) N/A 30 Abort Process Errors 1 Bit 6: Max Rate/Min

xiiiFIGURE 13-1 PLUG PIN OUT - SOURCE CABLE CONNECTOR...13-1 FIGURE 16-1 MAP OF STATUS AND GRAPH SCREENS...

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-42 35 Attention 2 Errors 1 Bit 1 = Sensor Calibration Done Bit 2 = Not Sampling (Sample Mod

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-43Code #31: Initiate Automatic Data Logging Description: This operation allows the computer to se

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-44 Byte # Bit # Description Length(bytes) Format Units 1 0 Power 4 String % 1 Thickness

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-45Response: • The controller will respond with the normal transmission receipt. • Every 100 mil

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-46 Code #35: Internal Command Description: Instruction Code #32 is used by the software interfac

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-47Hex FF FE 01 26 01 06 D2 Response: • The controller will respond with the normal transmis

MDC-260 DEPOSITION CONTROLLER COMPUTER INTERFACE 11-48 Code #40: Enable/Disable the Front Panel Keyboard Description: Instructs the controller to ei

MDC-260 DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-112. REPAIR AND MAINTENANCE 12.1 HANDLING PRECAUTIONS Integrated Circuits (I.C.’s) can be d

MDC-260 DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-2Symptom Possible Cause Remedy a) Line voltage selection wheel is not installed to agree wi

MDC-260 DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-3a) Improperly wired cable, or shorted wires. a) Verify the cable connection against Table 8-

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-11. GENERAL DESCRIPTION 1.1 PURPOSE The MDC-260 is a full-featured deposition controller which c

MDC-260 DEPOSITION CONTROLLER APPENDIX A – MATING CABLE COLOR CODES 13-113. APPENDIX A – MATING CABLE COLOR CODES Pin Number Color Signal 1 Blac

APPENDIX B – PARAMETER TEMPLATES 14-114. APPENDIX B – PARAMETER TEMPLATES The following pages are blank templates, provided to manually archive the

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.1 MATERIAL Material Number Material Name Sensor # Crystal # Source

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: MATERIAL CONT’D Maximum Power Max Power Alarm Delay Minimum Power Rate

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.2 PROCESS Page ___ of ___ Process Number Process Name Edit password

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.3 DISPLAY SETUP Pause On Layer Complete  Yes  No Display Negatives

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.4 INPUTS Input # Input Name True Logic Type Pin # Return Pin # 1  L

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.5 OUTPUTS Output # Output Name Conditions Pin # Return Pin # 1

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-2 1.2.6 FAIL SAFE ABORTS In the event of an MDC-260 failure, as evidenced by unsatisfactory in

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.6 ACTIONS Output # Action Name Conditions 1 2 3 4 5 6

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.7 SENSOR SETUP Sensor #  1  2  1 

MDC-260 DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.9 UTILITY SETUP Crystal Frequency (MHz)  2.5  3.0  5.0

MDC-260 DEPOSITION CONTROLLER INDEX 15. INDEX A alpha characters, entering, 4-1 automatic crystal switching. See crystal switching C contrast, 2-2, 4

MDC-260 DEPOSITION CONTROLLER INDEX O operating keys, 5-6 Abort, 2-3 Alphanumeric Keyboard, 2-4 Arrow, 2-4 Graph, 2-2 Manual, 2-2 Reset, 2-3 Shutter

MDC-260 DEPOSITION CONTROLLER INDEX states, 5-7 status displays, 5-3 substrate heat control, 4-10 T theory of operation, 10-1, 11-1 basic measurement

MDC-260 DEPOSITION CONTROLLER MENU MAP 16-1 16. MENU MAPS Figure 16-1 Map of Status and Graph Screens

MDC-260 DEPOSITION CONTROLLER MENU MAP 16-2 Figure 16-2 Map of Programming Menu Screens

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-31.3 SPECIFICATIONS 1.3.1 MEASUREMENT Frequency Resolution 0.03 Hz @ 6.0 MHz Mass Resolution

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-4 1.3.6 MATERIAL PARAMETERS Material Name 10 character string Sensor # 1 to 2 Crystal # 1 to

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-5 The MDC-260 also has a built in material library that contains many common material names alon

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-6 1.3.9 SOURCE PARAMETERS Number of Pockets 1 to 16 Shutter Relay Type Normally open, normally

MDC-260 DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-71.4 ACCESSORIES The table below lists the most commonly used accessories. Refer to the Price L

MDC-260 DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-12. FRONT PANEL DISPLAYS AND CONTROLS Using the front panel is the most direct met

MDC-260 DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-2 2.1.3.4 ACTIVE LAYER PARAMETER UPDATE SCREEN The Active Layer Parameter Update

MDC-260 DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-3In the Manual mode the control voltage remains constant unless incremented up or d

OPERATION and SERVICE MANUALMDC-260Film Deposition ControllerIPN 622800 Rev. Ewww.inficon.com [email protected] to our continuing program of

MDC-260 DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-4 2.2.10 ARROW KEYS The arrow keys are used to navigate through the programming an

MDC-260 DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-13. BENCH CHECKOUT & INSPECTION 3.1 INSPECTION Your MDC-260 was released to the

MDC-260 DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-2 3.4.1 MATERIAL #1 PARAMETERS Material Name Cr Sensor # 1 Crystal # 1 Source #

MDC-260 DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-33.4.2 MATERIAL #2 PARAMETERS Material Name Au Sensor # 1 Crystal # 1 Source # 1

MDC-260 DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-4 3.4.3 PROCESS PARAMETERS Process Name Layer No. Thickness Material Sample 1 0

MDC-260 DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-5 Figure 3-1 Remote Power Handset TO MDC-260 FRONT PANEL

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-14. PROGRAMMING AND CONTROLLER SETUP 4.1 GENERAL 4.1.1 NAVIGATING THE MENU STRUCTUR

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-2 4.1.3 ENTERING TIME PARAMETERS The MDC-260 expresses time in 24-hour h:mm:ss for

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-3up asking for verification to change the password. Press 1 to confirm and 0 to can

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.INFICON® is a trademark of INFICON Inc.A

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-4 4.2.1 UTILITY SETUP The only critical parameter in the Utility Setup is the Cryst

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-5Source Voltage - This parameter must be set to correspond to the input voltage rang

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-6 c. Motor Driven Inline Source - Select Inline for the Drive type parameter. Two

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-7inputs. With pocket one in position, all inputs will be false. With poctket four

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-8 Crystals parameter defines the number of crystals in the sensor head. The Rotato

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-9b. BCD - With BCD format , the MDC-260 will create from one to three outputs base

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-10The following are a few examples of some typical uses for the MDC-260’s programma

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-114.2.6 MATERIAL SETUP The next step in the initial setup of the controller is to de

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-124.2.6.2 AUTOMATIC CRYSTAL SWITCHING To enable automatic crystal switching upon

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-13To enable the rate sample feature, set the Sample Dwell % parameter to the percent

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-14Soak or Rise to Predeposit power states. Once in deposit, the thickness will con

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-15Each process is referenced by a twelve-character alphanumeric process name. You e

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-16To select a material, move the cursors to the material parameter for that layer a

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-171. Material Name (A ten character material name) The material name parameter allo

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-18GCAI ⋅=⋅=ρρ Where: AI= Acoustic Impedance ρ= Density (gm/cm3) C= Transverse (sh

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-19φc = The angle of the crystal off of normal from the source. φs = The angle of the

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-20Predeposit Time will result in unnecessary buildup of material on the shutter and

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-21These parameters define the layer thickness percentage that will trigger the end o

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-22The rate deviation attention parameter sets the allowable percent deviation from

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-2339. Backup Crystal # (1 to 16) This parameter is available when the Crystal Fail

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-244.3.3 SYSTEM SETUP Choosing the Edit System Setup option from the Main Menu scree

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-25This parameter determines the value displayed in the Sensor Status screen. The av

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-264.3.3.2 PROGRAM INPUTS The controller has ‘logical’ discrete inputs which are use

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-27 Figure 4-9 Program Input Screen 4.3.3.3 PROGRAM OUTPUTS The controller has ‘logi

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-28Selecting Program Outputs from the System Setup menu will present the Select Outp

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-29The screen symbols will change depending on the contents of the condition string t

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-30States - State conditions are evaluated true whenever the controller is in the re

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-31• Time Setpoint • Last Layer • Crystal Failure • Crystal Marginal • Min Rate&

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-32Soft Node (1-8) - Each Soft node defaults to false but can be set to true by a &q

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-33Once you have selected the required action, pressing the Right-arrow key will pres

INFICON warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with its published sp

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-34Step From State - Steps controller to next state. Sound Attention - Triggers the

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-35 Figure 4-17 Sensor Setup Screen 1. Number of crystals (1 to 16) This paramete

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-36Direct is used when the actuating device is driven directly. In this case the co

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-373 OPEN GND OPEN 4 OPEN GND GND 5 GND OPEN OPEN 6 GND OPEN GND 7 GND GND OPEN 8 GND

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-38This parameter defines the number of pockets, or crucibles, available for the sou

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-39appropriate output. The Inline drive type informs the controller that continuous

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-407. Rotator Delay (0 to 99 seconds) This parameter serves two different functions

MDC-260 DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-41This parameter sets the controller’s computer interface address for the USB interf

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-15. OPERATING THE MDC-260 5.1 SIGN-ON SCREEN Upon a power-up, a series of tests are performed o

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-2 the condition of the system, and if everything appears to be in order, will start the proces

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-3 Figure 5-4 Rate Deviation vs. Time Graph Figure 5-5 Thickness vs. Time Graph Figure 5

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-4 5.6.1 MAIN RUN SCREEN Figure 5-7 Main Run Screen The Main Run Screen provides an easy-to-

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-55.6.3 I/O STATUS SCREEN Figure 5-9 I/O Status Screen The I/O Status screen indicates the sta

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-6 The Position Control Screen is only available when the controller is in idle (not in process

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-75.7.5 NOT SAMPLING This mode indicates that the sensor crystal is shuttered from the source an

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-8 Warning Messages Type Clear Action Min Rate&Max Power Alarm Abort Max Rate&Min

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-95.9.1.2 MAX RATE&MIN POWER This message indicates that the output power is at the minimum

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-105.9.1.10 NO SENSORS ENABLED This condition indicates that no sensors were enabled for measu

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-115.9.1.20 XTAL MRGN SWITCH This message indicates the primary crystal is marginal and the sen

iv SAFETY PRECAUTION AND PREPARATION FOR USE Input Power Requirements The MDC-260 Thin Film Controller can be set to operate one of the following l

MDC-260 DEPOSITION CONTROLLER OPERATING THE MDC-260 5-12 Figure 5-12 Typical Process Profile

MDC-260 DEPOSITION CONTROLLER TUNING THE MDC-260 CONTROL LOOP 6-16. TUNING THE MDC-260 CONTROL LOOP 6.1 CONTROL LOOP BASICS If evaporation rate we

MDC-260 DEPOSITION CONTROLLER TUNING THE MDC-260 CONTROL LOOP 6-2 soon as we’ve learned them, we know what we have to do to correct for errors and w

MDC-260 DEPOSITION CONTROLLER TUNING THE MDC-260 CONTROL LOOP 6-3gone 48 miles because of some traffic earlier on. Our Integral error is 2 miles. I

MDC-260 DEPOSITION CONTROLLER TUNING THE MDC-260 CONTROL LOOP 6-4 manual power mode and adjust the source power using the remote handset to establis

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-17. INPUT/OUTPUT CHARACTERISTICS The following section describes the electrical characte

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-2 The Passive inputs are activated by shorting the input’s pins together. The inputs a

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-3 Figure 7-1 Passive Input Buffer circuit

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-4 Figure 7-2 Active Input Buffer Circuit

MDC-260 DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-5 Figure 7-3 Sensor Input Buffer circuit