Inficon IC6 Thin Film Deposition Controller Manuale Utente

OPERATING MANUALIC6Thin Film Deposition ControllerPN 074-505-P1FCover Page

TOC - 2 PN 074-505-P1FIC6 Operating Manual1.4.11 Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3 - 46 PN 074-505-P1FIC6 Operating Manual3.6.11 DAC MonitoringIC6 continually compares the actual output voltages at the DAC BNC connectors with the

4 - 1PN 074-505-P1FIC6 Operating Manual Chapter 4Sensor & Source Setup4.1 Sensor Setup Introduction The basic IC6 has one sensor measurement bo

4 - 2 PN 074-505-P1FIC6 Operating ManualFigure 4-2 Sensor parameter editing4.1.2 Sensor ParametersSENSOR TYPE . . . . . . . . . . . . . . . . Singl

4 - 3PN 074-505-P1FIC6 Operating Manual SHUTTER OUT . . . . . . . . . . . . . . . . 0 to 38This parameter designates which of the 38 outputs is to b

4 - 4 PN 074-505-P1FIC6 Operating Manual4.2 Source Setup IntroductionThe IC6 provides the capability to configure the six source control channels. E

4 - 5PN 074-505-P1FIC6 Operating Manual 4.2.2 Source ParametersFigure 4-4 Source parameter pageThe following parameters can be edited for each of

4 - 6 PN 074-505-P1FIC6 Operating ManualDigital I/O Display. When running a layer containing the source for which the Shutter Output parameter is pro

4 - 7PN 074-505-P1FIC6 Operating Manual TURRET INPUT . . . . . . . . . . . . . . . . 0 to 28This parameter designates which of the 28 inputs is to b

4 - 8 PN 074-505-P1FIC6 Operating Manual4.3 DAC Output Selection RulesThe six standard DAC outputs, DAC1 to DAC 6, located on the back of the IC6 an

5 - 1PN 074-505-P1FIC6 Operating Manual Chapter 5Material Setup5.1 Introduction The IC6 can store definition parameters for up to 32 materials. Eac

TOC - 3PN 074-505-P1FIC6 Operating Manual Chapter 3Operation3.1 Front Panel Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 2 PN 074-505-P1FIC6 Operating ManualPress F4 to clear a Material of all programmed values. Move the cursor to a Material to be cleared. Press the

5 - 3PN 074-505-P1FIC6 Operating Manual 5.1.3 Material Screen Source Page ParametersFigure 5-3 Material source screenMATERIAL NUMBER . . . . . .

5 - 4 PN 074-505-P1FIC6 Operating ManualCONTROL LOOP . . . . . . . . . . . . . . NonPID (0), PI (1), PID (2)The bracketed value is used for chang

5 - 5PN 074-505-P1FIC6 Operating Manual DEAD TIME . . . . . . . . . . . . . . . . . . . 0.010 to 9999.99 sThis value is defined as the time differen

5 - 6 PN 074-505-P1FIC6 Operating ManualMINIMUM POWER . . . . . . . . . . . . . 0.00 to 99.98%This parameter is used to set the minimum permissible

5 - 7PN 074-505-P1FIC6 Operating Manual BACKUP SENSOR . . . . . . 0 to 8Select the sensor to use if the primary sensor fails. This parameter only ap

5 - 8 PN 074-505-P1FIC6 Operating ManualAGGREGATE RATE CALCULATION EXAMPLEDisplayed Rate = Applied Rate * Master Tooling * Sensor ToolingRelative Wei

5 - 9PN 074-505-P1FIC6 Operating Manual Desired process change when the sensor fails. PostDp (1) continues into post-deposit states. In Stop (2), al

5 - 10 PN 074-505-P1FIC6 Operating ManualIf the TOOLING parameter for a sensor is changed, the new TOOLING value is used for subsequent calculations

5 - 11PN 074-505-P1FIC6 Operating Manual If the TOOLING is changed, the new TOOLING value is used for subsequent calculation of the individual as we

TOC - 4 PN 074-505-P1FIC6 Operating Manual3.3.12 Counter / Timer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 12 PN 074-505-P1FIC6 Operating ManualNOTE: After a crystal fails due to exceeding the Counts value, the Crystal Fail can be cleared by installing

5 - 13PN 074-505-P1FIC6 Operating Manual SOAK POWER 1 . . . . . . . . . . . . . . . 0.00 to 99.99%This parameter is usually set to the power level a

5 - 14 PN 074-505-P1FIC6 Operating ManualCAUTIONThe Sensor must be positioned so the rate can be monitored with the source shutter closed when going

5 - 15PN 074-505-P1FIC6 Operating Manual SHUTTER DELAY ACCURACY . . . 1 to 99 %Specifies how close the rate value must be to the setpoint value for

5 - 16 PN 074-505-P1FIC6 Operating ManualPower level. The control voltage is maintained at the Idle Power level until the IC6 enters the STOP state o

5 - 17PN 074-505-P1FIC6 Operating Manual The Rate Filter Time may be used for enhanced resolution. If a source has a long time constant, rate may be

5 - 18 PN 074-505-P1FIC6 Operating ManualCAUTIONThe Sensor must be positioned so the rate can be monitored with the source shutter closed when going

5 - 19PN 074-505-P1FIC6 Operating Manual RateWatcher™ Sample and Hold FeatureTwo parameters, Ratewatcher Time and Ratewatcher Accuracy, define the S

5 - 20 PN 074-505-P1FIC6 Operating ManualRateWatcher OPTION. . . . . . . . . . . No (0), Yes (1)Default is No (0) which disables the function and gre

6 - 1PN 074-505-P1FIC6 Operating Manual Chapter 6Process Setup6.1 Process Setup IntroductionThe IC6 is capable of storing the descriptions and para

TOC - 5PN 074-505-P1FIC6 Operating Manual Chapter 5Material Setup5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6 - 2 PN 074-505-P1FIC6 Operating ManualProcesses that have at least one layer programmed are identified by a "greater than" character (>

6 - 3PN 074-505-P1FIC6 Operating Manual 6.4 Process Layers 1 - 10 etc.Layers are shown in groups of 10. Moving the cursor down to one of the layer

6 - 4 PN 074-505-P1FIC6 Operating ManualTo insert, first move the cursor to the layer in which to place the tagged layers. This can be in the current

6 - 5PN 074-505-P1FIC6 Operating Manual CRUC(IBLE) . . . . . . . . . . . . . . . . . . 1 to 64 The Crucible parameter is used in conjunction with t

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7 - 1PN 074-505-P1FIC6 Operating Manual Chapter 7General Parameters7.1 General Setup OverviewThe IC6 provides the capability to modify a series of

7 - 2 PN 074-505-P1FIC6 Operating ManualLAYER TO START. . . . . . . . . . . . . . 1 to 200 This selects the starting Layer from the sequence of Layer

7 - 3PN 074-505-P1FIC6 Operating Manual ACTIVE LAYER OUTPUT . . . . . . . . 0, 1 to 31Specifies the first of eight consecutive outputs that indicate

7 - 4 PN 074-505-P1FIC6 Operating Manual7.4 COMM Page ParametersFigure 7-3 General comm displayTest RS-232Once the cursor is in the parameter area,

7 - 5PN 074-505-P1FIC6 Operating Manual PROTOCOL . . . . . . . . . . . . . . . . . . . Standard (0), Dlog Page (1), Dlog Comma (2)Standard enables r

TOC - 6 PN 074-505-P1FIC6 Operating ManualChapter 9Logic Statement Setup9.1 Logic Statement Overview . . . . . . . . . . . . . . . . . . . . . . . .

7 - 6 PN 074-505-P1FIC6 Operating Manual7.5 MESSAGE Page SetupTen 19 character messages can be created by the user from the front panel or via commu

7 - 7PN 074-505-P1FIC6 Operating Manual 7.6 DATE / TIME Set UpFigure 7-5 General screen date/time pageDATE FORMAT . . . . . . . . . . . . . . . .

7 - 8 PN 074-505-P1FIC6 Operating Manual7.7 TEST Page Set UpFigure 7-6 General screen test pageTEST . . . . . . . . . . . . . . . . . . . . . . .

7 - 9PN 074-505-P1FIC6 Operating Manual 7.8 LOCK Page Code SetupFigure 7-7 General screen lock code pagePROGRAM LOCK CODE . . . . . . . . 1 to 99

7 - 10 PN 074-505-P1FIC6 Operating Manual7.9 AUDIO / VISUAL Page Set UpFigure 7-8 General screen audio visual pageAUDIO FEEDBACK. . . . . . . . . .

8 - 1PN 074-505-P1FIC6 Operating Manual Chapter 8Digital I/O8.1 Digital I/O ScreenThe Digital I/O screen is selected by moving the cursor on the Ma

8 - 2 PN 074-505-P1FIC6 Operating Manual8.3 All Output PageFigure 8-2 All output pageAll output names assigned by the IC6 or by the user are shown

8 - 3PN 074-505-P1FIC6 Operating Manual 8.4 I/O Board PageFigure 8-3 I/O map board 1 pageNames, up to 15 characters in length, can be entered by t

8 - 4 PN 074-505-P1FIC6 Operating ManualThis page is intentionally blank.

9 - 1PN 074-505-P1FIC6 Operating Manual Chapter 9Logic Statement Setup9.1 Logic Statement OverviewThe IC6 programmable logic capabilities allow it

TOC - 7PN 074-505-P1FIC6 Operating Manual 10.4.10 Query Process Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9 - 2 PN 074-505-P1FIC6 Operating Manual Inputs and outputs may be named on an I/O map display. Additionally on this display, the outputs may be def

9 - 3PN 074-505-P1FIC6 Operating Manual 9.2.1 Logic Statement GroupsTo view logic statements in groups of four, move the cursor in the left pane do

9 - 4 PN 074-505-P1FIC6 Operating Manual9.2.2 Logic Statement EditingFigure 9-3 Logic event IF selectionFigure 9-4 Logic action Then selection

9 - 5PN 074-505-P1FIC6 Operating Manual While in logic-edit, the select menu area will be cleared from the screen. This allows the whole screen to b

9 - 6 PN 074-505-P1FIC6 Operating ManualFigure 9-5 Function keys IF/THEN, REPLACE, INSERT With the cursor in the lower half of the Event page, the F

9 - 7PN 074-505-P1FIC6 Operating Manual Material, Sensor, Source, Layer End, Material End, Crystal Fail, Crystal Switching, Max Power, Min Power, Ba

9 - 8 PN 074-505-P1FIC6 Operating ManualBKUP SENS IN USESets the logic condition to be true while a backup sensor is in use. The condition remains tr

9 - 9PN 074-505-P1FIC6 Operating Manual FEED RAMP Sets the logic condition to be true at the start of Feed Ramp. The condition remains true until th

9 - 10 PN 074-505-P1FIC6 Operating ManualLAYER ### Sets the logic condition to be true at the beginning of Layer ### (when Layer ### is in the READ

9 - 11PN 074-505-P1FIC6 Operating Manual MAX POWERSets the logic condition to be true as long as any source is at Max(imum) Power. The condition rem

TOC - 8 PN 074-505-P1FIC6 Operating Manual10.4.35.15 Update Material Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9 - 12 PN 074-505-P1FIC6 Operating ManualPRECOND SOAKSets the logic condition to be true at the beginning of the Precond Soak state. The condition re

9 - 13PN 074-505-P1FIC6 Operating Manual RATE RAMP 2Sets the logic condition to be true at the beginning of Rate Ramp 2. The condition remains true

9 - 14 PN 074-505-P1FIC6 Operating ManualSOAK 1Sets the logic condition to be true at the start of Soak Time 1. The condition remains true until the

9 - 15PN 074-505-P1FIC6 Operating Manual TIME LIMITSets the logic condition to be true once the Time Limit is achieved. The condition remains true u

9 - 16 PN 074-505-P1FIC6 Operating Manual9.4 THEN Action DefinitionsNOTE: The following are level outputs that once turned on will remain active unt

9 - 17PN 074-505-P1FIC6 Operating Manual GO TO NONDEP ## . . . . . . . . . . . . 0 (any material) to 32Places the layer that uses the designated Ma

9 - 18 PN 074-505-P1FIC6 Operating ManualSOAK 1 HOLD (ON/OFF) ## . . . . . 0 (any material) to 32If active (ON), the designated Material ## will pau

9 - 19PN 074-505-P1FIC6 Operating Manual TRIG FNL THICK ## . . . . . . . . . . . . 0 (any material) to 32This action triggers Final Thickness for th

9 - 20 PN 074-505-P1FIC6 Operating Manual9.5 Logic Statement ExampleThe logic statement capability of the IC6 allows for automation of a thin film p

9 - 21PN 074-505-P1FIC6 Operating Manual 19 To return to the OPERATE display, press Menu.To run the multilayer process, press START once. As each la

TOC - 9PN 074-505-P1FIC6 Operating Manual Chapter 12Maintenance and Calibration Procedures12.1 Importance of Density, Tooling and Z-Ratio. . . . . .

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10 - 1PN 074-505-P1FIC6 Operating Manual Chapter 10Remote Communications10.1 Remote Communication Configuration OverviewThis IC6 can be remotely co

10 - 2 PN 074-505-P1FIC6 Operating Manual10.2.1 RS-232C Serial PortRS-232C serial communications are accomplished through an industry standard 9-pin

10 - 3PN 074-505-P1FIC6 Operating Manual 10.2.2.2 How to Set Up the Network Protocol on the PCMost personal computers (PC) are configured to obtain

10 - 4 PN 074-505-P1FIC6 Operating ManualOn the General tab, select Internet Protocol (TCP/IP) and press the Properties button. See Figure 10-3.Figur

10 - 5PN 074-505-P1FIC6 Operating Manual Select the button for Use the following IP address, enter the IP address and Subnet mask shown in Figure 10

10 - 6 PN 074-505-P1FIC6 Operating Manual10.3 Message FormatThe Standard message protocol serves as a structure for the contained command or respons

10 - 7PN 074-505-P1FIC6 Operating Manual Checksum . . . . . . . . . . . . . . . . . . . . 1 byte, sum, modulo 256, of all bytes, not including lengt

10 - 8 PN 074-505-P1FIC6 Operating Manual10.3.1.2 Response Packet (IC6 to Host Message)<Length><CCB><Timer><Response Message>

10 - 9PN 074-505-P1FIC6 Operating Manual Response Error Code = 1 byte ASCIIA = Illegal CommandB = Illegal parameter valueD= Illegal IDE = Data not a

TOC - 10 PN 074-505-P1FIC6 Operating ManualChapter 15 Troubleshooting, Status and Error Messages15.1 Status Messages . . . . . . . . . . . . . . . .

10 - 10 PN 074-505-P1FIC6 Operating Manual10.3.2.1 REAL_xXx and REAL_xFx  Real numbers contain a decimal point.  The resolution (or decimal precis

10 - 11PN 074-505-P1FIC6 Operating Manual 10.4 Communication CommandsThe following only include the command portion of the command packet and the r

10 - 12 PN 074-505-P1FIC6 Operating Manual10.4.2 Status CommandsStatus commands return pertinent information based on a specific request made. Comma

10 - 13PN 074-505-P1FIC6 Operating Manual 10.4.5 Update Source ParameterCommand = UC <Command ID> <Source number> <Parameter Value&g

10 - 14 PN 074-505-P1FIC6 Operating Manual10.4.6 Query General ParameterCommand = QG <Command ID>Command ID = <Byte> See Cmnd ID in Tabl

10 - 15PN 074-505-P1FIC6 Operating Manual 8(0x08)Active Layer Output 0/ 31/ 0 Integer 0 = Off1 -31 = First of 8 consecutive binary encoded outputs U

10 - 16 PN 074-505-P1FIC6 Operating Manual24(0x18)DAC 1 Scale 0.1/ 10.0/ 10.0REAL_3X1 Update not allowed if process is running.25(0x19)DAC 2 Scale26(

10 - 17PN 074-505-P1FIC6 Operating Manual 36(0x24)DAC 1 Polarity 0/ 1/ 1 Encode 0 = Negative1 = Positive Update not allowed if process is running.37

10 - 18 PN 074-505-P1FIC6 Operating Manual10.4.8 Query Input NameCommand = QI <Input Number>Input Number = <Byte> 1 - 28 Response = <

10 - 19PN 074-505-P1FIC6 Operating Manual 10.4.12 Query Logic StatementCommand = QL <Statement Number>Statement Number = <Byte> 1 - 100

TOC - 11PN 074-505-P1FIC6 Operating Manual Chapter 16Measurement and Control Theory16.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . .

10 - 20 PN 074-505-P1FIC6 Operating ManualEvent Terms1 First element of term can be (, a space, or an Event code .2 If space, there are no events, go

10 - 21PN 074-505-P1FIC6 Operating Manual 10.4.13 Update Logic StatementCommand = UL<Statement Number><Length of logic elements> <Se

10 - 22 PN 074-505-P1FIC6 Operating ManualSoak 1 0X4B 0xB5Rise 2 0x4C 0xB4Soak 2 0x4D 0xB3Shutter Delay 0x4E 0xB2Deposit 0x4F 0xB1Rate Ramp 1 0x50 0x

10 - 23PN 074-505-P1FIC6 Operating Manual Process End XXX Process #0 = Any0 50 0x67 0x99Last Layer 0x68 0x98Timer Minutes(See Notes 2 & 3)Timer

10 - 24 PN 074-505-P1FIC6 Operating Manual10.4.15 IC6 Action ListActions are triggered in the Logic Statement THEN section. Logic codes are used in

10 - 25PN 074-505-P1FIC6 Operating Manual Increment Count XXXCounter # 1 200x4FClear Counter XXX 0x50Start Timer XXXTimer # 1 200x51Cancel Timer XXX

10 - 26 PN 074-505-P1FIC6 Operating Manual10.4.16 Query Material ParameterCommand = QM <Command ID> <Material Number>Command ID = <By

10 - 27PN 074-505-P1FIC6 Operating Manual 10(0x0a)Minimum Power(%)0.00/ 99.98/ 0.0REAL_4X211(0x0b)Max Power Option 0/ 3/ 2 Encode 0 = Continue 1 = P

10 - 28 PN 074-505-P1FIC6 Operating Manual24(0x18)Control Delay Time(seconds)(mm:ss)0/ 5999/ 00/ 99:59/ 0Time See Time NoteGray font unless Delay opt

10 - 29PN 074-505-P1FIC6 Operating Manual 38(0x26)On Final Thickness 0/ 2/ 1 Encode 0 = Continue, 1 = Post-Dep2 = NonDepCont39(0x27)Ramp 1 Rate(Å/

TOC - 12 PN 074-505-P1FIC6 Operating ManualThis page is intentionally blank.

10 - 30 PN 074-505-P1FIC6 Operating Manual50(0x32)Sensor 1 Failure Action0/ 4/ 2Encode0 = Unused 1 = PostDp2 = Stop 3 = Suspnd4 = TimePwVisible only

10 - 31PN 074-505-P1FIC6 Operating Manual 66(0x42)Sensor 1 Weight(%)1/400.0/100.0REAL_4X1 Visible only if Multipoint is set to YesGray font is Failu

10 - 32 PN 074-505-P1FIC6 Operating Manual82(0x52)Sensor 1 CrystalTwo Tooling (%)1.0/ 999.9/ 100.0REAL_4X1Visible only if Multipoint is set to YesGra

10 - 33PN 074-505-P1FIC6 Operating Manual 98(0x62)Sensor 1 Xtal Position First0/12/0IntegerVisible only if Multipoint is set to YesGray font if Sens

10 - 34 PN 074-505-P1FIC6 Operating Manual115(0x73)Failure Action 1/ 4/ 2 Encode 1 = PostDp 2 = Stop 3 = Suspnd 4 = TimePwVisible only if Mu

10 - 35PN 074-505-P1FIC6 Operating Manual 10.4.18 Query Material NameCommand = QN <Material Number>Material Number = <Byte> 1-32 Respon

10 - 36 PN 074-505-P1FIC6 Operating Manual10.4.22 Query Process Layer ParameterCommand: QP <Command ID> <Process Number><Layer Number

10 - 37PN 074-505-P1FIC6 Operating Manual 10.4.24 Query Sensor ParameterCommand = QS <Command ID> <Sensor Number>Command ID = <Byte&

10 - 38 PN 074-505-P1FIC6 Operating ManualTable 10-11 Sensor parametersQS USCmd IDName(Units)Range:Low Limit/High Limit/DefaultData TypeNotesUpdate

10 - 39PN 074-505-P1FIC6 Operating Manual 10.4.26 Query Output TypeCommand = QT <Output Number>Output Number = <Byte> 1 - 38 Response =

1 - 1PN 074-505-P1FIC6 Operating Manual Chapter 1Introduction and Specifications1.1 IntroductionThe IC6 is a closed loop process controller designe

10 - 40 PN 074-505-P1FIC6 Operating Manual10.4.30 Status General Command = SG <Command ID><Option>Command ID = <Byte> See Descript

10 - 41PN 074-505-P1FIC6 Operating Manual 7(0x07)Status Message Designators<Status Message Word>8 bytes1-13(Can have 12 DAC recorders)<Byte

10 - 42 PN 074-505-P1FIC6 Operating Manual17(0x11)System Configuration (What boards are present.)2 <Byte><Byte> Bit 0x0001 = Measurement

10 - 43PN 074-505-P1FIC6 Operating Manual 10.4.31 Status Layer Command = SL <Command ID><Layer>Command ID = <Byte> See Descriptio

10 - 44 PN 074-505-P1FIC6 Operating Manual10(0x0a)Deposit Average Rate4 or 24 <Float> KÅ Based on Averaging Time parameter. Only available w

10 - 45PN 074-505-P1FIC6 Operating Manual 10.4.32 Status SensorCommand = SS <Command ID><Sensor>Command ID = <Byte> See Descripti

10 - 46 PN 074-505-P1FIC6 Operating Manual6(0x06)Current Z-Ratio4 or 32 <Float> or<Float><Float><Float><Float><Float

10 - 47PN 074-505-P1FIC6 Operating Manual 10.4.33 Remote General ActionCommand = RG <Command ID> (<Action Value>) Command ID = <Byte

10 - 48 PN 074-505-P1FIC6 Operating Manual13(0x0d)Start Timer <Timer> <Byte> Timer Range is 1-2014(0x0e)Cancel Timer <Timer><Byt

10 - 49PN 074-505-P1FIC6 Operating Manual 28 (0x1c)Default Process <Process#><Byte> # Range is 1 to 50Removes all layers of the specifi

1 - 2 PN 074-505-P1FIC6 Operating Manual1.2 IC6 Safety1.2.1 Definition of Notes, Cautions and WarningsWhen using this manual, please pay attention

10 - 50 PN 074-505-P1FIC6 Operating Manual10.4.34 Remote Layer ActionCommand = RL <Command ID> <Layer Number> (<Action Value>) Com

10 - 51PN 074-505-P1FIC6 Operating Manual 9(0x09)Close Source shutter Only allowed if in Manual10(0x0a)Set Averaged Rate <Float> Range is 0-99

10 - 52 PN 074-505-P1FIC6 Operating Manual10.4.35 IC6 Communications Examples10.4.35.1 General Command Packet Format<Length(low/high, 2 byte)>

10 - 53PN 074-505-P1FIC6 Operating Manual 10.4.35.4 Query General ParameterActive Process (1)Command Format: QG <Command ID> QG1Command QG1

10 - 54 PN 074-505-P1FIC6 Operating Manual10.4.35.9 Update Sensor ParameterSensor Type (2), Sensor 1, CrystalTwo (1)Command Format: US <Command

10 - 55PN 074-505-P1FIC6 Operating Manual 10.4.35.13 Update Process Layer ParameterProcess 1, Layer 1, Material 3 (3)Command Format: UP <Comman

10 - 56 PN 074-505-P1FIC6 Operating Manual10.4.35.14 Query Material NameMaterial 1Command Format: QN <Material Number>QN 1Command QN 1: 03005

10 - 57PN 074-505-P1FIC6 Operating Manual 10.4.35.19 Update Input NameInput 1, “P1”Command Format: UI <Input Number> <Input Name> UI

10 - 58 PN 074-505-P1FIC6 Operating Manual10.4.35.24 Query User MessageMessage 1Command Format: QV <User Message Number> QV 1Command QV 1: 0

10 - 59PN 074-505-P1FIC6 Operating Manual 10.4.35.27 Update Logic StatementStatement 1, “IF External Input 1 THEN Start”Command Format: UL <Sta

1 - 3PN 074-505-P1FIC6 Operating Manual 1.2.2 General Safety InformationWARNING - Risk Of Electric ShockDo not open the IC6 case! There are no user

10 - 60 PN 074-505-P1FIC6 Operating Manual10.4.35.29 Status LayerThickness (4), Layer 1Command Format: SL <Command ID> <Layer>SL4 1Comm

10 - 61PN 074-505-P1FIC6 Operating Manual 10.4.35.33 Example for Interpreting Float ResponsesCommand used: SS 6 1, Status Sensor, Z-Ratio, Sensor

10 - 62 PN 074-505-P1FIC6 Operating ManualRewrite each individual "1" in the value above in exponent form:1.10001011000010100011111 x 23= (

11 - 1PN 074-505-P1FIC6 Operating Manual Chapter 11Applications11.1 Multiple Sensor Deposition ControlThe conventional method of controlling thin f

11 - 2 PN 074-505-P1FIC6 Operating ManualFigure 11-1 The essential advantage of multi-point deposition sensing

11 - 3PN 074-505-P1FIC6 Operating Manual 11.1.1 IC6 Parameters and Corrections for Multiple Sensor OperationFigure 11-2 Multipoint displayAGGREGAT

11 - 4 PN 074-505-P1FIC6 Operating ManualAGGREGATE MULTIPLIERThe parameter AGGREGATE MULTIPLY (Yes/No) determines whether an aggregate multiplier is

11 - 5PN 074-505-P1FIC6 Operating Manual 11.2 Trend AnalysisAlong with multiple sensor monitoring and control of the deposition process, the IC6 al

11 - 6 PN 074-505-P1FIC6 Operating Manual11.3 IC6 Cygnus Emulation The IC6 has features that allow it to meet the critical requirements of Cygnus ap

11 - 7PN 074-505-P1FIC6 Operating Manual 11.4 IC6 Four & Six Layer (Cygnus Emulation) ConfigurationNOTE: The same method applies to any smaller

1 - 4 PN 074-505-P1FIC6 Operating Manual1.2.3 Earth GroundThe IC6 is connected to earth ground through a sealed three-core (three-conductor) power c

11 - 8 PN 074-505-P1FIC6 Operating Manual11.4.1 Configure Sensors 1 to 6 (See section 4.1, Sensor Setup Introduction, on page 4-1.)Assign a unique D

11 - 9PN 074-505-P1FIC6 Operating Manual 11.4.4 Configure the Process (See Chapter 6, Process Setup.)Assign a different one of the six unique mater

11 - 10 PN 074-505-P1FIC6 Operating Manual11.4.7 State Descriptions (See section 3.5 on page 3-32.)11.4.7.1 NonDepCntl StateOnce a layer reaches it

12 - 1PN 074-505-P1FIC6 Operating Manual Chapter 12Maintenance and Calibration Procedures12.1 Importance of Density, Tooling and Z-RatioThe quartz

12 - 2 PN 074-505-P1FIC6 Operating Manual6 Determine the new density value with equation [1]:[1]where:D1 = Initial density settingTx = Thickness read

12 - 3PN 074-505-P1FIC6 Operating Manual 12.4 Laboratory Determination of Z-RatioNOTE: On the IC6, the Auto-Z function is available to automaticall

12 - 4 PN 074-505-P1FIC6 Operating Manual6 Using the density value from step 1 and the recorded values for Fco and Fc, adjust the Z-Ratio value in th

12 - 5PN 074-505-P1FIC6 Operating Manual 12.5 AutoTuningThe AutoTune feature of the IC6 is used to automatically characterize the response of a sys

12 - 6 PN 074-505-P1FIC6 Operating Manual4 Press F1 START AUTOTUNE and increase the power level with the Hand-Held Controller until the rate is appro

12 - 7PN 074-505-P1FIC6 Operating Manual The Auto Tune feature of the IC6 is accessed via the Main Menu Maintenance display.Figure 12-1 AutoTune ov

1 - 5PN 074-505-P1FIC6 Operating Manual 1.2.4 Main Power ConnectionWARNING - Risk Of Electric ShockThis IC6 has line voltage present on the primary

12 - 8 PN 074-505-P1FIC6 Operating Manual12.5.2 AutoTune ParametersMATERIAL INDEX. . . . . . . . . . . . . . 1 to 32This parameter is used to select

12 - 9PN 074-505-P1FIC6 Operating Manual 12.5.3 AutoTune Manual DisplayThe AutoTune Manual display is entered from the AutoTune Maint Stop display

12 - 10 PN 074-505-P1FIC6 Operating Manual12.5.4 AutoTune Tuning Display After a stable rate has been achieved in Manual, the AutoTune Tuning displ

12 - 11PN 074-505-P1FIC6 Operating Manual deposition exceeds the Maximum Rate value during this transition, the power level is returned to the initi

12 - 12 PN 074-505-P1FIC6 Operating ManualFigure 12-5 AutoTune success displayFigure 12-6 AutoTune complete displayWhen AutoTune is complete, the n

12 - 13PN 074-505-P1FIC6 Operating Manual 12.6 Determining Cross Talk Calibration For Co-DepositionThe automatic Cross Talk Calibration feature of

12 - 14 PN 074-505-P1FIC6 Operating ManualIf two Layers to be co-deposited have Cross Talk percentages greater than 100%, the Process will STOP and t

12 - 15PN 074-505-P1FIC6 Operating Manual entering the partially completed results is given. Only the CONTINUE setting on MAX POWER will allow the c

12 - 16 PN 074-505-P1FIC6 Operating ManualFigure 12-8 Cross talk maint stop display12.6.1.2 Cross Talk Calibrate ParametersMATERIAL NUMBER . . .

12 - 17PN 074-505-P1FIC6 Operating Manual 12.6.2 Cross Talk Calibration MANUAL displayUpon pressing the TOGGLE MANUAL function key while in MAINT S

1 - 6 PN 074-505-P1FIC6 Operating Manual1.3 How To Contact INFICONWorldwide customer support information is available under Support at www.inficon.c

12 - 18 PN 074-505-P1FIC6 Operating Manual12.6.3 Cross Talk Calibration CALIBRATE displayUpon entering this display the thickness values are zeroed

12 - 19PN 074-505-P1FIC6 Operating Manual 12.6.4 Cross Talk Calibration SELECT displayAfter the RAMP down state the IC6 enters the SELECT display,

12 - 20 PN 074-505-P1FIC6 Operating Manual12.7 Source MaintenanceThe Source Maintenance page allows toggling source and sensor shutters and rotating

12 - 21PN 074-505-P1FIC6 Operating Manual 12.7.1 Source Maintenance ParametersSOURCE MAINTENANCE . . . . . . . Enabled/DisabledIC6 must be in Read

12 - 22 PN 074-505-P1FIC6 Operating Manual12.8 System StatusFigure 12-13 System status displayThe System Status display shows installed option boar

13 - 1PN 074-505-P1FIC6 Operating Manual Chapter 13Counters & Timers13.1 IntroductionThe IC/6 has twenty counters and twenty timers. These coun

13 - 2 PN 074-505-P1FIC6 Operating ManualThis page is intentionally blank.

14 - 1PN 074-505-P1FIC6 Operating Manual Chapter 14USB Storage14.1 File Handling (USB)File handling is achieved via a USB port. Three types of file

14 - 2 PN 074-505-P1FIC6 Operating Manual14.3 Configuration FilesWith the instrument in the READY state, the configuration of the IC6 may be sent to

14 - 3PN 074-505-P1FIC6 Operating Manual 14.4 Data LogsNOTE: To prevent loss of data, do not allow the number of files on the USB storage device to

1 - 7PN 074-505-P1FIC6 Operating Manual 1.4 IC6 Specifications1.4.1 MeasurementMeasurement Frequency Range . . . 6.0 to 4.5 MHz (fixed)Frequency R

14 - 4 PN 074-505-P1FIC6 Operating Manual14.5 Screen CapturesA BMP file of the screen can be sent to the USB port storage device. Pressing the Print

15 - 1PN 074-505-P1FIC6 Operating Manual Chapter 15Troubleshooting, Status and Error Messages15.1 Status MessagesSome IC6 status messages will have

15 - 2 PN 074-505-P1FIC6 Operating ManualMin Power X..X While in a rate control state, whenever the source power reaches the programmed minimum power

15 - 3PN 074-505-P1FIC6 Operating Manual Abbr(eviated) Average X..XDuring a rate control state, a crystal failure occurred after more then one minut

15 - 4 PN 074-505-P1FIC6 Operating ManualSource Conflict When attemting to load two Codep layers during a reset and both layers call for the same sou

15 - 5PN 074-505-P1FIC6 Operating Manual 15.2 User MessagesTable 15-2 messages are a subgroup of status messages. The user defines these messages.

15 - 6 PN 074-505-P1FIC6 Operating Manual15.3 AutoTune and Calibration MessagesTable 15-3 is a subgroup of the Status messages. They will appear onl

15 - 7PN 074-505-P1FIC6 Operating Manual 15.4 STOP messagesWhen the IC6 goes into STOP, a cause of stop message appears on the line below STOP. Som

15 - 8 PN 074-505-P1FIC6 Operating ManualCrossTalk > 100% One or both of the co-deposited layers has a Cross Talk percentage ≥100%.When starting a

15 - 9PN 074-505-P1FIC6 Operating Manual 15.5 Transient MessagesTransient messages, see Table 15-5, are displayed as the condition happens. The mes

1 - 8 PN 074-505-P1FIC6 Operating Manual1.4.3 IC6 Features1.4.3.1 Recipe Storage & DataloggingUSB Memory Device1.4.3.2 Sensor Parameters Up to

15 - 10 PN 074-505-P1FIC6 Operating ManualDatalog Failure The IC6 is sending the Datalog information faster then the receiving device can accept the

15 - 11PN 074-505-P1FIC6 Operating Manual USB (File Check Sum) Error: Data CorruptThe message is removed from the screen on any key press or if anot

15 - 12 PN 074-505-P1FIC6 Operating ManualCan’t Delete: Co-Dep An attempt was made to delete one layer of a co-dep pair of layers.The message is remo

15 - 13PN 074-505-P1FIC6 Operating Manual Crucible Switch Fail Crucible switch fail while in Source Maintenance.The message is removed from the scre

15 - 14 PN 074-505-P1FIC6 Operating Manual15.6 Input Error MessagesKeyboard Input Error Messages come up on the entry of invalid parameters. These

15 - 15PN 074-505-P1FIC6 Operating Manual Co-Dep Crosstalk Error An attempt is being made to turn on a sensor that will cause a Crosstalk error.Each

15 - 16 PN 074-505-P1FIC6 Operating Manual15.7 Troubleshooting GuideIf the IC6 fails to work, or appears to have diminished performance, the followi

15 - 17PN 074-505-P1FIC6 Operating Manual 15.7.1 Troubleshooting the IC6Table 15-7 Troubleshooting the IC6SYMPTOM CAUSE REMEDY1. Power on LED not

15 - 18 PN 074-505-P1FIC6 Operating Manual6. Control voltage output does not function properlya. DAC board damaged from applying voltage to the contr

15 - 19PN 074-505-P1FIC6 Operating Manual 15.7.2 Troubleshooting Transducers/SensorsNOTE: Many sensor head problems may be diagnosed with a DVM (Di

1 - 9PN 074-505-P1FIC6 Operating Manual 1.4.3.4 Material Parameters 32 materials can be specified and given unique names (15 character max.).Densit

15 - 20 PN 074-505-P1FIC6 Operating ManualNOTE: A more detailed troubleshooting guide is shipped with the sensor. Refer to that manual for more detai

15 - 21PN 074-505-P1FIC6 Operating Manual 3. Crystal does not oscillate or oscillates intermittently (both in vacuum and in air) a. Intermittent or

15 - 22 PN 074-505-P1FIC6 Operating Manual5. Thermal instability: large changes in thickness reading during source warm-up (usually causes thickness

15 - 23PN 074-505-P1FIC6 Operating Manual 15.7.3 Troubleshooting Computer Communications7. Large drift in thickness (greater than 200 Å for a densi

15 - 24 PN 074-505-P1FIC6 Operating Manual2. Error code returned a. A = illegal command a. The command sent was not valid; verify command syntax as s

15 - 25PN 074-505-P1FIC6 Operating Manual 15.8 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all transduc

15 - 26 PN 074-505-P1FIC6 Operating Manual15.8.1 Front LoadFollow the procedure below to replace the crystal in the Front Load sensor: (see Figure 1

15 - 27PN 074-505-P1FIC6 Operating Manual 15.8.2 Cool DrawerFollow the procedure below to replace the crystal in a Next Generation Cool Drawer™ sen

15 - 28 PN 074-505-P1FIC6 Operating Manual15.8.3 Shuttered and Dual SensorsThere is no difference in the crystal replacement procedure between shutt

15 - 29PN 074-505-P1FIC6 Operating Manual 15.8.5 Sputtering SensorObserve the general precautions for replacing crystals and follow the instruction

OPERATING MANUALIC6Thin Film Deposition ControllerPN 074-505-P1FTitle Pagewww.inficon.com [email protected]©2014 INFICON®

1 - 10 PN 074-505-P1FIC6 Operating ManualIdle Ramp. . . . . . . . . . . . . . . . . . . . . 1 per SourceIdle Power . . . . . . . . . . . . . . . . .

15 - 30 PN 074-505-P1FIC6 Operating Manual15.8.6 Crystal SnatcherUse the crystal snatcher, supplied with the sensor, as follows:1 Insert crystal sna

15 - 31PN 074-505-P1FIC6 Operating Manual 15.9 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: Crystal Sensor Emulator 760-601-G1 (obsolet

15 - 32 PN 074-505-P1FIC6 Operating Manual15.9.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to anal

15 - 33PN 074-505-P1FIC6 Operating Manual 15.9.1.2 Feedthrough Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 15-8 on page 15-31. Remove

15 - 34 PN 074-505-P1FIC6 Operating Manual12 Verify electrical continuity from the center pin of the Microdot connector on the feedthrough to the un-

15 - 35PN 074-505-P1FIC6 Operating Manual 5 Connect the in-vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the leaf

15 - 36 PN 074-505-P1FIC6 Operating Manual15.9.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system for

15 - 37PN 074-505-P1FIC6 Operating Manual 15.9.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature Rang

15 - 38 PN 074-505-P1FIC6 Operating ManualThis page is intentionally blank.

16 - 1PN 074-505-P1FIC6 Operating Manual Chapter 16Measurement and Control Theory16.1 BasicsThe Quartz Crystal deposition Monitor, or QCM, utilizes

1 - 11PN 074-505-P1FIC6 Operating Manual Backup Sensor . . . . . . . . . . . . . . . . . 0 to 8 Backup Tooling . . . . . . . . . . . . . . . . . 1.0

16 - 2 PN 074-505-P1FIC6 Operating Manualeffect provides a means of determining how much material is being deposited on a substrate in a vacuum syste

16 - 3PN 074-505-P1FIC6 Operating Manual reduces the intensity of response of the generally unwanted anharmonic modes; hence, the potential for an o

16 - 4 PN 074-505-P1FIC6 Operating ManualFigure 16-3 Thickness shear displacement16.1.2 Period Measurement TechniqueAlthough instruments using equa

16 - 5PN 074-505-P1FIC6 Operating Manual monitor crystal’s period is (n/Fr)/m where n is the number of counts in the second accumulator. The precisi

16 - 6 PN 074-505-P1FIC6 Operating Manualfor a number of materials, and has been found to be valid for frequency shifts equivalent to Ff = 0.4Fq. Kee

16 - 7PN 074-505-P1FIC6 Operating Manual into a greater frequency shift than that which would be produced with a new crystal. In the extreme, the ba

16 - 8 PN 074-505-P1FIC6 Operating Manualdetermine the resonant frequency. It operates by applying a synthesized sine wave of specific frequency to t

16 - 9PN 074-505-P1FIC6 Operating Manual fundamental mode continuously, but also it can be implemented to alternate between one or more other modes.

16 - 10 PN 074-505-P1FIC6 Operating Manualassignment refer to the number of phase reversals in the wave motion along the three axes of the crystal. T

16 - 11PN 074-505-P1FIC6 Operating Manual Needless to say, similar errors occur with the Z-match™ technique under similar circumstances. However, th

1 - 12 PN 074-505-P1FIC6 Operating ManualLCD Dimmer Time . . . . . . . . . . . . . . 0 for Always On or # of Minutes till Off0 to 99 minutesGraph Sca

16 - 12 PN 074-505-P1FIC6 Operating ManualTechniques for calculating optimum source control parameters can be classified by the type of data used for

16 - 13PN 074-505-P1FIC6 Operating Manual Figure 16-7 Response of process to an open loop step change (At t=0 control signal is increased)A control

16 - 14 PN 074-505-P1FIC6 Operating ManualFigure 16-8 PID controller block diagramThe key to using any control system is to choose the proper values

16 - 15PN 074-505-P1FIC6 Operating Manual ITAE is insensitive to the initial and somewhat unavoidable errors, but it will weight heavily any errors

16 - 16 PN 074-505-P1FIC6 Operating Manualtowards zero error. This technique works well when there is little or no dead time. If this technique is us

A - 1PN 074-505-P1FIC6 Operating Manual Appendix AMaterial TableA.1 IntroductionThe following Table A-1 represents the content of the IC6's ma

A - 2 PN 074-505-P1FIC6 Operating Manual18 BaN2O63.244 1.261 barium nitrate19 BaO 5.720 *1.000 barium oxide20 BaTiO35.999 0.464 barium titanate (tetr

A - 3PN 074-505-P1FIC6 Operating Manual 54 Cr3C26.680 *1.000 chromium carbide55 CrB 6.170 *1.000 chromium boride56 Cs 1.870 *1.000 cesium57 Cs2SO44.

A - 4 PN 074-505-P1FIC6 Operating Manual90 HfC 12.200 *1.000 hafnium carbide91 HfN 13.800 *1.000 hafnium nitride92 HfO29.680 *1.000 hafnium oxide93 H

A - 5PN 074-505-P1FIC6 Operating Manual 126 MnS 3.990 0.940 manganese (II) sulfide127 Mo 10.200 0.257 molybdenum128 Mo2C 9.180 *1.000 molybdenum car

1 - 13PN 074-505-P1FIC6 Operating Manual 1.4.4 DisplayType/Color/Size . . . . . . . . . . . . . . . . LCD/Color/TFT/7 inch diagonalDimming Feature

A - 6 PN 074-505-P1FIC6 Operating Manual162 PbSnO38.100 *1.000 lead stannate163 PbTe 8.160 0.651 lead telluride164 Pd 12.038 0.357 palladium165 PdO 8

A - 7PN 074-505-P1FIC6 Operating Manual 198 SrO 4.990 0.517 strontium oxide199 Ta 16.600 0.262 tantalum200 Ta2O58.200 0.300 tantalum (V) oxide201 Ta

A - 8 PN 074-505-P1FIC6 Operating Manual234 WB210.770 *1.000 tungsten boride235 WC 15.600 0.151 tungsten carbide236 WO37.160 *1.000 tungsten trioxide

1 - 14 PN 074-505-P1FIC6 Operating Manual1.4.5 DAC OutputsQuantity and Type . . . . . . . . . . . . . . 6 with BNC, 6 optional with 15 pin miniatur

1 - 15PN 074-505-P1FIC6 Operating Manual 1.4.6 Logic ProcessingType . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements Logical Fu

1 - 16 PN 074-505-P1FIC6 Operating Manual1.4.8 Remote CommunicationsRS232C Serial Port . . . . . . . . . . . . . Standard; INFICON binary protocolBa

1 - 17PN 074-505-P1FIC6 Operating Manual 1.4.14 SizeHeight-Width-Depth, not including mounts or user connectors133.4 x 447.7 x 330 mm (5.25 x 17.62

1 - 18 PN 074-505-P1FIC6 Operating Manual1.5 Unpacking and Inspection1 If the IC6 has not been removed from its shipping container, do so now.2 Care

1 - 19PN 074-505-P1FIC6 Operating Manual 1.6.3 Optional AccessoriesPneumatic Shutter Actuator Control Valve . . . . . . . . . . . 750-420-G1Sensor

TrademarksThe trademarks of the products mentioned in this Operating Manual are held by the companies that produce them.CAJON® is a registered tradema

1 - 20 PN 074-505-P1FIC6 Operating Manual1.7 Initial Power-On VerificationA preliminary functional check of the IC6 can be made before formal instal

1 - 21PN 074-505-P1FIC6 Operating Manual 1 Confirm that AC line voltage is supplied and proper for the IC6. 2 Confirm that the back panel (main) AC

1 - 22 PN 074-505-P1FIC6 Operating ManualThis page is intentionally blank.

2 - 1PN 074-505-P1FIC6 Operating Manual Chapter 2Installation and Interfaces2.1 Location GuidelinesBefore permanently installing the IC6, read this

2 - 2 PN 074-505-P1FIC6 Operating ManualFigure 2-1 Typical installationMounting BracketCoax Cable(Routed withWater Tubes)Or,Customer SuppliedCajon C

2 - 3PN 074-505-P1FIC6 Operating Manual Generally, install the sensor as far as possible from the evaporation source (a minimum of 10 in. (25.4 cm)

2 - 4 PN 074-505-P1FIC6 Operating Manual2.1.3 IC6 InstallationThe IC6 is designed to be rack mounted. It may be also used on a table. The IC6 is for

2 - 5PN 074-505-P1FIC6 Operating Manual 2.2.2 Connections to Earth GroundThere are two required earth ground connections: The earth ground connect

2 - 6 PN 074-505-P1FIC6 Operating ManualIn many cases, a braided ground strap is sufficient. However, there are cases when a solid copper strap (0.03

2 - 7PN 074-505-P1FIC6 Operating Manual 2.3 Connecting the ControllerThe operation of the IC6 depends on the proper connection of power and signal

Declaration Of ConformityPage 1

2 - 8 PN 074-505-P1FIC6 Operating Manual2.3.2.2 Crucible Indexer ConnectionsExample: 4 pocket crucible using outputs 6 and 7Number of crucibles = 4C

2 - 9PN 074-505-P1FIC6 Operating Manual 2.3.2.4 I/O Expansion OptionsOne I/O Relay module is included as standard equipment with the IC6 and is use

2 - 10 PN 074-505-P1FIC6 Operating ManualTable 2-3 Input/Relay pin connectionsI/O Board #1 I/O Board #2Relay # Pins TTLInput #Pin Relay # Pins TTLIn

2 - 11PN 074-505-P1FIC6 Operating Manual 2.3.2.5 RS-232C CommunicationsRS-232C serial communication is included in the IC6 as standard equipment. I

2 - 12 PN 074-505-P1FIC6 Operating Manual2.3.2.6 Isolated +24 V (dc) SupplyAn isolated +24 V (dc) power supply is available on a 9-pin D-Sub connect

3 - 1PN 074-505-P1FIC6 Operating Manual Chapter 3Operation3.1 Front Panel ControlsOperational controls for the IC6 are located on the front panel,

3 - 2 PN 074-505-P1FIC6 Operating Manual6 F1, F2, F3, F4 Function KeysThe function keys. They are used to select displays or menu items. Their functi

3 - 3PN 074-505-P1FIC6 Operating Manual 3.2 Rear Panel InterfacesInterfaces for the IC6 are located on the rear panel, see Figure 3-2. Figure 3-2

3 - 4 PN 074-505-P1FIC6 Operating Manual8 Sensor Connectors - Channels 5 & 6 (optional)Expansion panel to accommodate the optional addition of tw

3 - 5PN 074-505-P1FIC6 Operating Manual 3.3 DisplaysThe IC6 has many display screens for monitoring and programming processes. The six main types o

Declaration Of ConformityPage 2

3 - 6 PN 074-505-P1FIC6 Operating Manual3.3.2 Operate The Operate display, see Figure 3-4, provides information about the current layer(s) in proces

3 - 7PN 074-505-P1FIC6 Operating Manual Operate Display Description1 Aggregate Rate2 Layer Thickness3 Power Level4 State of Layer5State Timer6 Layer

3 - 8 PN 074-505-P1FIC6 Operating ManualFigure 3-5 Co-deposition operate displayFigure 3-6 4 layer display

3 - 9PN 074-505-P1FIC6 Operating Manual Figure 3-7 6 layer display3.3.3 Sensor Information 3.3.3.1 Sensor Information Rate/Xtal Display Descripti

3 - 10 PN 074-505-P1FIC6 Operating ManualSensor (Number field)These numbers correspond to the sensor connector channel numbers on the rear panel of t

3 - 11PN 074-505-P1FIC6 Operating Manual S Total (Crystal Stability value field)This field displays the positive total frequency shift currently acc

3 - 12 PN 074-505-P1FIC6 Operating Manual3.3.3.3.1 Function Key Selection Choices for the Sensor Information Rate/Xtal DisplayTo enable the function

3 - 13PN 074-505-P1FIC6 Operating Manual 3.3.3.4 Sensor Information Type/Freq Display DescriptionFigure 3-9 Type/Freq displaySensor Sensor identif

3 - 14 PN 074-505-P1FIC6 Operating ManualAct(ivity)Activity is a measure of the sensor circuit health or ability to conduct current. The values range

3 - 15PN 074-505-P1FIC6 Operating Manual Figure 3-10 Sensor overview displayMoving the cursor onto one of the sensor numbers and pressing F1 Select

WarrantyStandard INFICON Two Year Page 1

3 - 16 PN 074-505-P1FIC6 Operating Manual3.3.5 Source The Source Overview display, see Figure 3-11, shows the current configuration for all six sour

3 - 17PN 074-505-P1FIC6 Operating Manual 3.3.6 Material This display is organized into eight sub pages accessible thru the Select Menu described be

3 - 18 PN 074-505-P1FIC6 Operating Manualmaterial. If Multipoint is set to No, a Backup Sensor and its Tooling factor can be specified. Other choices

3 - 19PN 074-505-P1FIC6 Operating Manual 3.3.6.6 Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-DisplaysThese three libraries allow convenient selection of a ma

3 - 20 PN 074-505-P1FIC6 Operating Manual3.3.7.2 Current ProcessThe Curr(ent) Proc(ess) display, see Figure 3-15, shows the layer sequence for the l

3 - 21PN 074-505-P1FIC6 Operating Manual Figure 3-16 Process pageActive Process . . . . . . . . . . . . . . . . specify which of the 50 processes t

3 - 22 PN 074-505-P1FIC6 Operating Manual3.3.8.2 DACs PagePolarity and full scale voltage for all DAC outputs are configured here. 0 output correspo

3 - 23PN 074-505-P1FIC6 Operating Manual 3.3.8.8 Audio/Visual PageAudio Feedback: turns key beep on or off.LCD Dimmer Time: 0 disables, sets time i

3 - 24 PN 074-505-P1FIC6 Operating ManualFigure 3-18 All outputs display3.3.10 Logic 100 logic statements can be set up. Logic statements are evalu

3 - 25PN 074-505-P1FIC6 Operating Manual 3.4 Process DescriptionThe IC6 allows sequential deposition control for a maximum of 200 layers in all of

Standard INFICON Two Year WarrantyPage 2

3 - 26 PN 074-505-P1FIC6 Operating Manual2 Configure the sensors.Configuring the sensors involves designating whether the sensor is a single or multi

3 - 27PN 074-505-P1FIC6 Operating Manual 3.4.2 Executing a ProcessOnce a process has been defined, it is ready to execute. The IC6 will not allow c

3 - 28 PN 074-505-P1FIC6 Operating ManualFigure 3-20 Process state diagram1 Make sure the IC6 is in READY. If not, press STOP then RESET.2 Press STA

3 - 29PN 074-505-P1FIC6 Operating Manual of critical errors. Assuming the error has been remedied, the process can be continued where it left off by

3 - 30 PN 074-505-P1FIC6 Operating Manual3.4.5 Multiple Layer StartsIt is possible to run up to six layers independent of each other at the same tim

3 - 31PN 074-505-P1FIC6 Operating Manual Figure 3-21 Simplified IC6 state sequence diagramSTOPSTOPNONONOONYESYESYESON/STBYSTBY/PowerFAILSTANDBYRESE

3 - 32 PN 074-505-P1FIC6 Operating Manual3.5 State DescriptionsTable 3-2 State descriptionsSTATE CONDITION RELAY CONTACT STATUSREMOTECOMMENCODESSou

3 - 33PN 074-505-P1FIC6 Operating Manual 12. RATE RAMP 2 Rate control, desired rate changing. [New Rate 2, Start Ramp 2, Ramp Time 2]Active Active 1

3 - 34 PN 074-505-P1FIC6 Operating Manual3.6 Special FeaturesThe IC6 has several special features to enhance the performance of the instrument.3.6.1

3 - 35PN 074-505-P1FIC6 Operating Manual A crystal switch will automatically occur when: The IC6 is configured for a XtalTwo (CrystalTwo) sensor ty

TOC - 1PN 074-505-P1FIC6 Operating Manual Table Of ContentsCover PageTitle PageTrademarksDisclaimerCopyrightDeclaration Of ConformityWarrantyChapter

3 - 36 PN 074-505-P1FIC6 Operating ManualPower-up initialization is performed on a dual sensor to verify that the back-up crystal is good. If a cryst

3 - 37PN 074-505-P1FIC6 Operating Manual Rotate Sensor function must be initiated in the Sensor Information screen or via Remote Communication to en

3 - 38 PN 074-505-P1FIC6 Operating Manualcrucible into position. This will be signified on the OPERATE screen by the state indicator CRUCIBLE SW(ITCH

3 - 39PN 074-505-P1FIC6 Operating Manual 3.6.3 Auto-ZThe Auto-Z feature of the IC6 automatically determines the Z-Ratio of a crystal. This feature

3 - 40 PN 074-505-P1FIC6 Operating ManualIf the IC6 loses the ability to measure the fundamental frequency and all available crystals in a multi-posi

3 - 41PN 074-505-P1FIC6 Operating Manual 3.6.6 Handheld ControllerAn optional Handheld Controller (IPN 755-262-G1), see Figure 3-22, is available a

3 - 42 PN 074-505-P1FIC6 Operating ManualDetermining Soak 2After ~30 - 60 seconds of Soak 1, using the Handheld Controller, again slowly increase the

3 - 43PN 074-505-P1FIC6 Operating Manual The IC6 supports the writing of filenames using alphanumeric characters selected using the cursor keys. Cha

3 - 44 PN 074-505-P1FIC6 Operating ManualAt each source shutter close, the datalog information will be appended to the file (when saved to USB) until

3 - 45PN 074-505-P1FIC6 Operating Manual  Ending Thickness kÅ (Float) Average Rate Å/s (Float)  Average Rate Deviation Å/s (Float)  Ending Power