Inficon Cygnus 2 Thin Film Deposition Controller Manuale Utente

OPERATING MANUALCygnus®2Thin Film Deposition ControllerIPN 074-545-P1ECover Page

TOC - 2 IPN 074-545-P1ECygnus 2 Operating Manual1.4.13 Warm Up Period. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 2 IPN 074-545-P1ECygnus 2 Operating Manual5.1.2 Material DefinitionFigure 5-2 Material library A - Hf displayThe three Material Libraries—Lib A

5 - 3IPN 074-545-P1ECygnus 2 Operating Manual 5.1.3 Material Source Page ParametersFigure 5-3 Material source screenMATERIAL NUMBER . . . . . . .

5 - 4 IPN 074-545-P1ECygnus 2 Operating ManualCONTROL LOOP . . . . . . . . . . . . . . NonPID (0), PI (1), PID (2)The bracketed value is used for

5 - 5IPN 074-545-P1ECygnus 2 Operating Manual DEAD TIME . . . . . . . . . . . . . . . . . . . 0.010 to 9999.99 sThis value is defined as the time di

5 - 6 IPN 074-545-P1ECygnus 2 Operating ManualMINIMUM POWER . . . . . . . . . . . . . 0.00 to 99.98%This parameter is used to set the minimum permis

5 - 7IPN 074-545-P1ECygnus 2 Operating Manual 5.1.4 Material Sensor Parameters PageFigure 5-6 Material sensor pageMATERIAL NUMBER . . . . . . . .

5 - 8 IPN 074-545-P1ECygnus 2 Operating ManualIf the Sensor type is XtalSix (CrystalSix) or Xtal12 (Crystal12)XTAL POSITION FIRST . . . 0 to 6 (12 f

5 - 9IPN 074-545-P1ECygnus 2 Operating Manual QUALITY COUNTS . . . . . . . . . . . . . 0 to 99This sets the number of measurements that must be outs

5 - 10 IPN 074-545-P1ECygnus 2 Operating Manual5.1.5 Pre/Post Screen Deposit Page ParametersFigure 5-7 Material pre/post pageMATERIAL NUMBER . . .

5 - 11IPN 074-545-P1ECygnus 2 Operating Manual RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sThis parameter provides the time

TOC - 3IPN 074-545-P1ECygnus 2 Operating Manual Chapter 3Operation3.1 Front Panel Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 12 IPN 074-545-P1ECygnus 2 Operating ManualDEP AFTER PRE-DEP . . . . . . . . . . Yes (1), No (0)Selects the state to follow the last Soak. Standa

5 - 13IPN 074-545-P1ECygnus 2 Operating Manual CONTROL DELAY TIME . . . . . . . . . 00:00 to 99:59This is the time interval for the Cygnus 2 to be

5 - 14 IPN 074-545-P1ECygnus 2 Operating ManualIDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 99.99%This value is the power level at which the

5 - 15IPN 074-545-P1ECygnus 2 Operating Manual TIME LIMIT . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sThis is the deposition time at

5 - 16 IPN 074-545-P1ECygnus 2 Operating ManualION ASSIST DEPOSIT . . . . . . . . . . No (0), Yes (1).Sets the logic condition to True if Yes (1) is

5 - 17IPN 074-545-P1ECygnus 2 Operating Manual RAMP 1 TIME . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sThis value determines the time per

5 - 18 IPN 074-545-P1ECygnus 2 Operating ManualIf the deposition rate meets the RateWatcher Accuracy requirement for the duration of the Acceptance W

6 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 6General Parameters6.1 General Set-Up OverviewThe Cygnus 2 provides the capability to modify

6 - 2 IPN 074-545-P1ECygnus 2 Operating ManualTHICKNESS EQUATION 1, 2, 3 . . . 0 to 654321Each of the three thickness equations can be set up to sum

6 - 3IPN 074-545-P1ECygnus 2 Operating Manual 6.4 COMM Page ParametersFigure 6-3 General comm displayDATALOG XTAL INFO . . . . . . . . . . Yes (1

TOC - 4 IPN 074-545-P1ECygnus 2 Operating Manual3.5 Special Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6 - 4 IPN 074-545-P1ECygnus 2 Operating ManualIf the Ethernet option is installed, the following parameters will be shownIP ADDRESS . . . . . . . . .

6 - 5IPN 074-545-P1ECygnus 2 Operating Manual 6.5 MESSAGE Page Set-upTen 19 character messages can be created by the user from the front panel or v

6 - 6 IPN 074-545-P1ECygnus 2 Operating Manual6.6 DATE / TIME Set UpFigure 6-5 General date/time pageDATE FORMAT . . . . . . . . . . . . . . . . MM

6 - 7IPN 074-545-P1ECygnus 2 Operating Manual 6.7 TEST Page Set UpFigure 6-6 General test pageTEST . . . . . . . . . . . . . . . . . . . . . . .

6 - 8 IPN 074-545-P1ECygnus 2 Operating Manual6.8 LOCK Page Code Set-upFigure 6-7 General lock pagePROGRAM LOCK CODE . . . . . . . . 1 to 9999The

6 - 9IPN 074-545-P1ECygnus 2 Operating Manual FILE ACCESS CODE . . . . . . . . . . . 1 to 9999The File Access Code allows configuration file retrie

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7 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 7Digital I/O7.1 Digital I/O ScreenThe Digital I/O screen is selected by moving the cursor on

7 - 2 IPN 074-545-P1ECygnus 2 Operating Manual7.3 All Output PageFigure 7-2 All output pageAll output names assigned by the Cygnus 2 or by the user

7 - 3IPN 074-545-P1ECygnus 2 Operating Manual 7.4 I/O Board PageFigure 7-3 I/O map board 1 pageNames, up to 15 characters in length, can be entere

TOC - 5IPN 074-545-P1ECygnus 2 Operating Manual 5.1.3 Material Source Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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8 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 8Logic Statement Set-Up8.1 Logic Statement OverviewThe Cygnus 2 programmable logic capabiliti

8 - 2 IPN 074-545-P1ECygnus 2 Operating Manual Inputs and outputs may be named on an I/O map display. Additionally on this display, the outputs may

8 - 3IPN 074-545-P1ECygnus 2 Operating Manual 8.2.1 Logic Statement GroupsTo view logic statements in groups of four, move the cursor in the left p

8 - 4 IPN 074-545-P1ECygnus 2 Operating Manual8.2.2 Logic Statement EditingFigure 8-3 Logic event IF selectionFigure 8-4 Logic action Then selecti

8 - 5IPN 074-545-P1ECygnus 2 Operating Manual event or the action list. Events are displayed if the cursor is on the IF portion of the statement and

8 - 6 IPN 074-545-P1ECygnus 2 Operating ManualFigure 8-5 Function Keys IF/THEN, REPLACE, INSERT With the cursor in the lower half of the Event page,

8 - 7IPN 074-545-P1ECygnus 2 Operating Manual Thick Limit, Time Limit, Material, Material End, Crystal Fail, Crystal Switching, Max Power, Min Power

8 - 8 IPN 074-545-P1ECygnus 2 Operating ManualCRUC SWCH FAILSets the logic condition to be true if a Turret Feedback input is specified and is not re

8 - 9IPN 074-545-P1ECygnus 2 Operating Manual IDLESets the logic condition to be true at the beginning of the Idle state. The condition remains true

TOC - 6 IPN 074-545-P1ECygnus 2 Operating ManualChapter 9Remote Communications9.1 Remote Communication Configuration Overview . . . . . . . . . . .

8 - 10 IPN 074-545-P1ECygnus 2 Operating ManualMATERIAL END ## Sets the logic condition to be true when the specified Material ## enters the IDLE sta

8 - 11IPN 074-545-P1ECygnus 2 Operating Manual PRE-DEPOSITSets the logic condition to be true at the beginning of the Ready, Source Switch, Shutter

8 - 12 IPN 074-545-P1ECygnus 2 Operating ManualRISE 2Sets the logic condition to be true at the start of Rise Time 2. The condition remains true unt

8 - 13IPN 074-545-P1ECygnus 2 Operating Manual THICK SUM # ###Sets the logic condition to be true when the sum of thickness indicated by the designa

8 - 14 IPN 074-545-P1ECygnus 2 Operating Manual8.4 THEN Action DefinitionsNOTE: The following are level outputs that once turned on will remain acti

8 - 15IPN 074-545-P1ECygnus 2 Operating Manual GO TO NON-DEP ## . . . . . . . . . . . . 0 (any Material) to 6Places the designated Material ## into

8 - 16 IPN 074-545-P1ECygnus 2 Operating ManualSOAK 2 HOLD (ON/OFF) # . . . . . . 0 (any Material) to 6If active (ON), the designated Material # wil

8 - 17IPN 074-545-P1ECygnus 2 Operating Manual ZERO DEP TIME ## . . . . . . . . . . . . 0 (any Material) to 6This action will zero the Material Dep

8 - 18 IPN 074-545-P1ECygnus 2 Operating Manual14 Cursor down to START. Press F3 INSERT. Start ### will appear.15 Press F1 IF/THEN.Cursor to ### behi

9 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 9Remote Communications9.1 Remote Communication Configuration OverviewThe Cygnus 2 may be remo

TOC - 7IPN 074-545-P1ECygnus 2 Operating Manual 9.4.26 Cygnus 2 Event List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9 - 2 IPN 074-545-P1ECygnus 2 Operating Manual9.2.2 TCP/IP Ethernet Port The optional TCP/IP interface supports only the Standard Ethernet TCP/IP pr

9 - 3IPN 074-545-P1ECygnus 2 Operating Manual Select the Local Area Connection to be changed, right-click and select Properties. See Figure 9-2.Figu

9 - 4 IPN 074-545-P1ECygnus 2 Operating ManualSelect the button for Use the following IP address, enter the IP address and Subnet mask shown in Figur

9 - 5IPN 074-545-P1ECygnus 2 Operating Manual 9.3 Message FormatThe Standard message protocol serves as a structure for the contained command or re

9 - 6 IPN 074-545-P1ECygnus 2 Operating ManualChecksum . . . . . . . . . . . . . . . . . . . . 1 byte, sum, modulo 256, of all bytes, not including l

9 - 7IPN 074-545-P1ECygnus 2 Operating Manual 9.3.1.2 Data Type Codes All parameters are stored internally as four byte words. The data type codes

9 - 8 IPN 074-545-P1ECygnus 2 Operating ManualENCODE Encode parameters have a defined list of acceptable values.Usually two to five values are allowe

9 - 9IPN 074-545-P1ECygnus 2 Operating Manual Response Message . . . . . . . . . . . . <Command Response>...<Command Response>|<Pack

9 - 10 IPN 074-545-P1ECygnus 2 Operating Manual9.3.1.4 TimeoutsIf more than 3 seconds pass between characters of a command packet, the Cygnus 2 will

9 - 11IPN 074-545-P1ECygnus 2 Operating Manual 9.4.2 Status CommandsStatus commands return pertinent information based on a specific request made.

TOC - 8 IPN 074-545-P1ECygnus 2 Operating ManualChapter 10Maintenance and Calibration Procedures10.1 Importance of Density, Tooling and Z-Ratio. . .

9 - 12 IPN 074-545-P1ECygnus 2 Operating Manual9.4.5 Update General ParameterCommand = UG <Command ID> <Parameter Value> Command ID = &l

9 - 13IPN 074-545-P1ECygnus 2 Operating Manual 19(0x13)Datalog Xtal Info 0/ 1/ 0 Encode 0 = No1 = Yes20(0x14)Graph Scale 0/ 2/ 2 Encode 0 = Power

9 - 14 IPN 074-545-P1ECygnus 2 Operating Manual24(0x18)DAC 1 Scale 0.1/ 10.0/ 10.0REAL_3X1 Update not allowed if Material using DAC is running.25(0x1

9 - 15IPN 074-545-P1ECygnus 2 Operating Manual 36(0x24)DAC 1 Polarity 0/ 1/ 1 Encode 0 = Negative1 = PositiveUpdate not allowed if Material using DA

9 - 16 IPN 074-545-P1ECygnus 2 Operating Manual9.4.6 Query Material ParameterCommand = QM <Command ID> <Material Number>Command ID = <

9 - 17IPN 074-545-P1ECygnus 2 Operating Manual 9(0x09)Maximum Power(%)0.01/ 99.99/ 90.0REAL_4X210(0x0a)Minimum Power(%)0.00/ 99.98/ 0.0REAL_4X211(0x

9 - 18 IPN 074-545-P1ECygnus 2 Operating Manual19(0x13)Rise Time 2(seconds)(mm:ss)0/ 5999/ 00/ 99:59/ 0Time See Time Note20(0x14)Soak Time 2(seconds)

9 - 19IPN 074-545-P1ECygnus 2 Operating Manual 34(0x22)Time Limit(seconds)(mm:ss)0/ 5999/ 00/ 99:59/ 0TimeSee Time Note35(0x23)Rate Filter Time(seco

9 - 20 IPN 074-545-P1ECygnus 2 Operating Manual115(0x73)Failure Action 1/ 4/ 3 Encode 1 = PostDp 2 = Stop All3 = Stop Matl 4 = TimePw 116(0x74)

9 - 21IPN 074-545-P1ECygnus 2 Operating Manual 9.4.8 Query Sensor ParameterCommand = QS <Command ID> <Sensor Number>Command ID = <By

TOC - 9IPN 074-545-P1ECygnus 2 Operating Manual 13.7.4 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9 - 22 IPN 074-545-P1ECygnus 2 Operating Manual9.4.10 Query Source ParameterCommand = QC <Command ID> <Source number>Command ID = <By

9 - 23IPN 074-545-P1ECygnus 2 Operating Manual Table 9-8 Source parametersQC & UCCmnd IDName(Units)Range:Low Limit/High Limit/DefaultDa

9 - 24 IPN 074-545-P1ECygnus 2 Operating Manual9.4.12 Query Process Material ParameterCommand: QP <Command ID> <Process Number><Mater

9 - 25IPN 074-545-P1ECygnus 2 Operating Manual 9.4.14 Query Material NameCommand = QN <Material Number>Material Number = <Byte> 1-6 Res

9 - 26 IPN 074-545-P1ECygnus 2 Operating Manual9.4.19 Update Output NameCommand = UO <Output Number> <Output Name> Output Number = <B

9 - 27IPN 074-545-P1ECygnus 2 Operating Manual 9.4.23 Update User MessageCommand = UV < User Message Number> < User Message Name> User

9 - 28 IPN 074-545-P1ECygnus 2 Operating ManualNote 1: For definition of event and action codes see section 9.4.26 on page 9-29 for the Event list an

9 - 29IPN 074-545-P1ECygnus 2 Operating Manual 9.4.25 Update Logic StatementCommand = UL<Statement Number><Length of logic elements> &l

9 - 30 IPN 074-545-P1ECygnus 2 Operating ManualPreCond Soak 0x49 0xB7Rise 1 0x4A 0xB6Soak 1 0X4B 0xB5Rise 2 0x4C 0xB4Soak 2 0x4D 0xB3Shutter Delay 0x

9 - 31IPN 074-545-P1ECygnus 2 Operating Manual Timer Minutes(See Notes 2 & 3)Timer # 1 20 Number of minutes00:00 99:59 0x69 0x97Timer Seconds (S

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9 - 32 IPN 074-545-P1ECygnus 2 Operating ManualTest 0x7D 0x83Not Used 0x7E 0x82Rate Dev(iation) Err(or)0x7F 0x81Note 1: Seconds are entered via remot

9 - 33IPN 074-545-P1ECygnus 2 Operating Manual 9.4.27 Cygnus 2 Action ListActions are triggered in the Logic Statement THEN section. Logic codes ar

9 - 34 IPN 074-545-P1ECygnus 2 Operating Manual* PreCond S/H Off XXXMaterial # 0 60x54* PreCond S/H On XXX 0x55* Soak 1 Hold Off XXX 0x56* Soak 1 Ho

9 - 35IPN 074-545-P1ECygnus 2 Operating Manual 9.4.28 Status General Command = SG <Command ID><Option>Command ID = <Byte> See &qu

9 - 36 IPN 074-545-P1ECygnus 2 Operating Manual7(0x07)Status Message Designators<Status Message Word>8 bytes1-13(Can have 12 DAC recorders)<

9 - 37IPN 074-545-P1ECygnus 2 Operating Manual 16(0x10)Get time 12 <Integer><Integer><Integer>Integers for the hour, minute and th

9 - 38 IPN 074-545-P1ECygnus 2 Operating Manual9.4.29 Status Material Command = SL <Command ID><Material>Command ID = <Byte> See “

9 - 39IPN 074-545-P1ECygnus 2 Operating Manual 10(0x0a)Deposit Average Rate4 or 24 <Float> KÅ Based on Averaging Time parameter. Only avail

9 - 40 IPN 074-545-P1ECygnus 2 Operating Manual9.4.30 Status SensorCommand = SS <Command ID><Sensor>Command ID = <Byte> See "

9 - 41IPN 074-545-P1ECygnus 2 Operating Manual 5(0x05)Fundamental Activity4 or 24 <Integer> or <Integer><Integer><Integer>&l

1 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 1Introduction and Specifications1.1 IntroductionThe Cygnus®2 is a closed loop process control

9 - 42 IPN 074-545-P1ECygnus 2 Operating Manual9.4.31 Remote General ActionCommand = RG <Command ID> (<Action Value>) Command ID = <B

9 - 43IPN 074-545-P1ECygnus 2 Operating Manual 11(0x0b)Zero Counter <Counter><Byte> Counter Range is 0-200 = All12(0x0c)Zero Timer <T

9 - 44 IPN 074-545-P1ECygnus 2 Operating Manual24 (0x18)Clear Failed Crystals X<Byte> Clears all failed crystals except the current crystal for

9 - 45IPN 074-545-P1ECygnus 2 Operating Manual 9.4.32 Remote Material ActionCommand = RL <Command ID> <Material Number> (<Action Val

9 - 46 IPN 074-545-P1ECygnus 2 Operating Manual10(0x0a)Set Averaged Rate<Float> Range is 0-999.9. Only in Time power or Non Deposit Hold - the

9 - 47IPN 074-545-P1ECygnus 2 Operating Manual 9.4.33 Cygnus 2 Communications Examples9.4.33.1 General Command Packet Format<Length(low/high, 2

9 - 48 IPN 074-545-P1ECygnus 2 Operating Manual9.4.33.4 Query Material Parameter, Z-Ratio (2), Material 1Command Format: QM <Command ID> <

9 - 49IPN 074-545-P1ECygnus 2 Operating Manual 9.4.33.10 Query Material Name, Material 1Command Format: QN <Material Number>QN 1Command QN 1

9 - 50 IPN 074-545-P1ECygnus 2 Operating Manual9.4.33.16 Query Output Type, Output 1Command Format: QT <Output Number> QT 1Command QT 1: 030

9 - 51IPN 074-545-P1ECygnus 2 Operating Manual 9.4.33.21 Update Logic statement, Statement 1, “IF External Input 1 THEN Start 1”Command Format: UL

1 - 2 IPN 074-545-P1ECygnus 2 Operating Manual1.2 Cygnus 2 Safety1.2.1 Definition of Notes, Cautions and WarningsWhen using this manual, please pay

9 - 52 IPN 074-545-P1ECygnus 2 Operating Manual9.4.33.22 Status Material, Thickness (4), Material 1Command Format: SL <Command ID> <Materi

9 - 53IPN 074-545-P1ECygnus 2 Operating Manual 9.4.33.26 Example for Interpreting Float ResponsesCommand used: SS 6 1, Status Sensor, Z-Ratio, Sen

9 - 54 IPN 074-545-P1ECygnus 2 Operating ManualRewrite each individual "1" in the value above in exponent form:1.10001011000010100011111 x

10 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 10Maintenance and Calibration Procedures10.1 Importance of Density, Tooling and Z-RatioThe q

10 - 2 IPN 074-545-P1ECygnus 2 Operating Manual6 Determine the new density value with equation [1]:[1]where:D1 = Initial density settingTx = Thicknes

10 - 3IPN 074-545-P1ECygnus 2 Operating Manual 10.4 Laboratory Determination of Z-RatioNOTE: On the Cygnus 2, the Auto-Z function is available to a

10 - 4 IPN 074-545-P1ECygnus 2 Operating Manual6 Using the density value from step 1 and the recorded values for Fco and Fc, adjust the Z-Ratio value

10 - 5IPN 074-545-P1ECygnus 2 Operating Manual 10.5 Source MaintenanceThe Source Maintenance page allows toggling Source and Sensor shutters and ro

10 - 6 IPN 074-545-P1ECygnus 2 Operating Manual10.5.1 Source Maintenance ParametersNOTE: Remote Comm is not allowed while in Source Maintenence.SOUR

10 - 7IPN 074-545-P1ECygnus 2 Operating Manual 10.6 System StatusFigure 10-2 System status displayThe System Status display shows installed option

1 - 3IPN 074-545-P1ECygnus 2 Operating Manual 1.2.2 General Safety InformationWARNING - Risk Of Electric ShockDo not open the Cygnus 2 case! There

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11 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 11Counters & Timers11.1 IntroductionThe Cygnus 2 has twenty counters and twenty timers.

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12 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 12USB Storage12.1 File Handling (USB)File handling is achieved via a USB port. Three types o

12 - 2 IPN 074-545-P1ECygnus 2 Operating Manual12.3 Configuration FilesWith all Materials in the READY or STOP state, the configuration of the Cygnu

12 - 3IPN 074-545-P1ECygnus 2 Operating Manual 12.4 Data LogsNOTE: To prevent loss of data, do not allow the number of files on the USB storage dev

12 - 4 IPN 074-545-P1ECygnus 2 Operating Manual12.5 Screen CapturesA BMP file of the screen can be sent to the USB port storage device. Pressing the

13 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 13Troubleshooting, Status and Error Messages13.1 Status MessagesSome Cygnus 2 status message

13 - 2 IPN 074-545-P1ECygnus 2 Operating ManualMin Power X..X While in a rate control state, whenever the Source power reaches the programmed minimum

13 - 3IPN 074-545-P1ECygnus 2 Operating Manual Abbr(eviated) Average X..XDuring a rate control state, a crystal failure occurred after more then one

1 - 4 IPN 074-545-P1ECygnus 2 Operating Manual1.2.3 Earth GroundThe Cygnus 2 is connected to earth ground through a sealed three-core (three-conduct

13 - 4 IPN 074-545-P1ECygnus 2 Operating Manual13.2 User MessagesTable 13-2 messages are a subgroup of status messages. The user defines these messa

13 - 5IPN 074-545-P1ECygnus 2 Operating Manual 13.3 STOP messagesWhen a Cygnus 2 Material goes into STOP, a cause of stop message appears on the li

13 - 6 IPN 074-545-P1ECygnus 2 Operating Manual13.4 Transient MessagesTransient messages, see Table 13-4, are displayed as the condition happens. Th

13 - 7IPN 074-545-P1ECygnus 2 Operating Manual Datalog Failure The Cygnus 2 is sending the Datalog information faster then the receiving device can

13 - 8 IPN 074-545-P1ECygnus 2 Operating ManualUSB (File Check Sum) Error: Data CorruptThe message is removed from the screen on any key press or if

13 - 9IPN 074-545-P1ECygnus 2 Operating Manual In Crucible Switch An attempt was made to navigate or change a parameter in the Source Maintenance sc

13 - 10 IPN 074-545-P1ECygnus 2 Operating Manual13.5 Input Error MessagesKeyboard Input Error Messages come up on the entry of invalid parameters.

13 - 11IPN 074-545-P1ECygnus 2 Operating Manual 13.6 Troubleshooting GuideIf the Cygnus 2 fails to work, or appears to have diminished performance,

13 - 12 IPN 074-545-P1ECygnus 2 Operating Manual13.6.1 Troubleshooting the Cygnus 2Table 13-6 Troubleshooting the Cygnus 2SYMPTOM CAUSE REMEDY1. Po

13 - 13IPN 074-545-P1ECygnus 2 Operating Manual 4. Some keys on front panel function while others do nota. Faulty keypad or faulty keypad ribbon cab

1 - 5IPN 074-545-P1ECygnus 2 Operating Manual 1.2.4 Main Power ConnectionWARNING - Risk Of Electric ShockThis Cygnus 2 has line voltage present on

13 - 14 IPN 074-545-P1ECygnus 2 Operating Manual9 Crystal fail message is always ona. XIU/oscillator not connecteda. Verify proper sensor/oscillator

13 - 15IPN 074-545-P1ECygnus 2 Operating Manual 13.6.2 Troubleshooting Transducers/SensorsNOTE: Many sensor head problems may be diagnosed with a D

13 - 16 IPN 074-545-P1ECygnus 2 Operating Manual2. Crystal ceases to oscillate during deposition before it reaches the end its normal lifea. Crystal

13 - 17IPN 074-545-P1ECygnus 2 Operating Manual 4. Crystal oscillates in vacuum but stops oscillation after open to aira. Crystal was near the end o

13 - 18 IPN 074-545-P1ECygnus 2 Operating Manual6. Poor thickness reproducibilitya. Variable source flux distributiona. Move sensor to a more central

13 - 19IPN 074-545-P1ECygnus 2 Operating Manual 13.6.3 Troubleshooting Computer Communications8. XtalSix, Xtal12, or Generic crystal switch problem

13 - 20 IPN 074-545-P1ECygnus 2 Operating Manual13.7 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all tra

13 - 21IPN 074-545-P1ECygnus 2 Operating Manual Figure 13-1 Front load crystal sensor (exploded)13.7.2 Cool DrawerFollow the procedure below to re

13 - 22 IPN 074-545-P1ECygnus 2 Operating Manual4 Hold the retainer by its sides. Align its orientation notch with the drawer then gently and evenly

13 - 23IPN 074-545-P1ECygnus 2 Operating Manual 13.7.3 Shuttered and Dual SensorsThere is no difference in the crystal replacement procedure betwee

1 - 6 IPN 074-545-P1ECygnus 2 Operating Manual1.3 How To Contact INFICONWorldwide customer support information is available under Support at www.inf

13 - 24 IPN 074-545-P1ECygnus 2 Operating Manual13.7.5 Sputtering SensorObserve the general precautions for replacing crystals and follow the instru

13 - 25IPN 074-545-P1ECygnus 2 Operating Manual 13.7.6 Crystal SnatcherUse the crystal snatcher, supplied with the sensor, as follows:1 Insert crys

13 - 26 IPN 074-545-P1ECygnus 2 Operating Manual13.8 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: Crystal Sensor Emulator 760-601-G1 (ob

13 - 27IPN 074-545-P1ECygnus 2 Operating Manual 13.8.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator

13 - 28 IPN 074-545-P1ECygnus 2 Operating Manual13.8.1.2 Feedthrough Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 13-8 on page 13-26. Re

13 - 29IPN 074-545-P1ECygnus 2 Operating Manual 12 Verify electrical continuity from the center pin of the Microdot connector on the feedthrough to

13 - 30 IPN 074-545-P1ECygnus 2 Operating Manual5 Connect the in-vacuum cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the

13 - 31IPN 074-545-P1ECygnus 2 Operating Manual 13.8.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement sys

13 - 32 IPN 074-545-P1ECygnus 2 Operating Manual13.8.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature

14 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 14Measurement and Control Theory14.1 BasicsThe Quartz Crystal deposition Monitor, or QCM, ut

1 - 7IPN 074-545-P1ECygnus 2 Operating Manual 1.4 Cygnus 2 Specifications1.4.1 MeasurementCrystal Frequency . . . . . . . . . . . . . . 6.0 MHz (

14 - 2 IPN 074-545-P1ECygnus 2 Operating Manualeffect provides a means of determining how much material is being deposited on a substrate in a vacuum

14 - 3IPN 074-545-P1ECygnus 2 Operating Manual reduces the intensity of response of the generally unwanted anharmonic modes; hence, the potential fo

14 - 4 IPN 074-545-P1ECygnus 2 Operating ManualFigure 14-3 Thickness shear displacement14.1.2 Period Measurement TechniqueAlthough instruments usin

14 - 5IPN 074-545-P1ECygnus 2 Operating Manual monitor crystal’s period is (n/Fr)/m where n is the number of counts in the second accumulator. The p

14 - 6 IPN 074-545-P1ECygnus 2 Operating Manualfor a number of materials, and has been found to be valid for frequency shifts equivalent to Ff = 0.4F

14 - 7IPN 074-545-P1ECygnus 2 Operating Manual into a greater frequency shift than that which would be produced with a new crystal. In the extreme,

14 - 8 IPN 074-545-P1ECygnus 2 Operating Manualmeasurement system uses the phase/frequency properties of the quartz crystal to determine the resonant

14 - 9IPN 074-545-P1ECygnus 2 Operating Manual fundamental mode continuously, but also it can be implemented to alternate between one or more other

14 - 10 IPN 074-545-P1ECygnus 2 Operating Manualassignment refer to the number of phase reversals in the wave motion along the three axes of the crys

14 - 11IPN 074-545-P1ECygnus 2 Operating Manual Needless to say, similar errors occur with the Z-match™ technique under similar circumstances. Howev

1 - 8 IPN 074-545-P1ECygnus 2 Operating Manual1.4.3 Cygnus 2 Features1.4.3.1 Recipe Storage & DataloggingUSB Memory Device1.4.3.2 Sensor Param

14 - 12 IPN 074-545-P1ECygnus 2 Operating ManualIn general, it is not possible to characterize all processes exactly; some approximation must be appl

14 - 13IPN 074-545-P1ECygnus 2 Operating Manual  Ti = integral time Td = derivative time E(s) = process errorFigure 14-8 represents the controlle

14 - 14 IPN 074-545-P1ECygnus 2 Operating ManualGraham and Lathrop12 introduced the Integral of Time multiplied by the Absolute Error (ITAE) as an al

A - 1IPN 074-545-P1ECygnus 2 Operating Manual Appendix AMaterial TableA.1 IntroductionThe following Table A-1 represents the content of the Cygnus

A - 2 IPN 074-545-P1ECygnus 2 Operating Manual17 BaF24.886 0.793 Barium Fluoride18 BaN2O63.244 1.261 Barium Nitrate19 BaO 5.720 *1.000 Barium Oxide20

A - 3IPN 074-545-P1ECygnus 2 Operating Manual 50 Co 8.900 0.343 Cobalt51 CoO 6.440 0.412 Cobalt Oxide52 Cr 7.200 0.305 Chromium53 Cr2O35.210 *1.000

A - 4 IPN 074-545-P1ECygnus 2 Operating Manual83 Gd2O37.410 *1.000 Gadolinium Oxide84 Ge 5.350 0.516 Germanium85 Ge3N25.200 *1.000 Germanium Nitride8

A - 5IPN 074-545-P1ECygnus 2 Operating Manual 116 LiF 2.638 0.778 Lithium Fluoride117 LiNbO34.700 0.463 Lithium Niobate118 Lu 9.840 *1.000 Lutetium1

A - 6 IPN 074-545-P1ECygnus 2 Operating Manual149 Ni 8.910 0.331 Nickel150 NiCr 8.500 *1.000 Nichrome151 NiCrFe 8.500 *1.000 Inconel152 NiFe 8.700 *1

A - 7IPN 074-545-P1ECygnus 2 Operating Manual 182 Sc2O33.860 *1.000 Scandium Oxide183 Se 4.810 0.864 Selenium184 Si 2.320 0.712 Silicon185 Si3N43.44

1 - 9IPN 074-545-P1ECygnus 2 Operating Manual 1.4.3.4 Material Parameters 6 Materials can be specified and given unique names (15 character max.).D

A - 8 IPN 074-545-P1ECygnus 2 Operating Manual215 TiC 4.930 *1.000 Titanium Carbide216 TiN 5.430 *1.000 Titanium Nitride217 TiO 4.900 *1.000 Titanium

A - 9IPN 074-545-P1ECygnus 2 Operating Manual 248 ZnSe 5.260 0.722 Zinc Selenide249 ZnTe 6.340 0.770 Zinc Telluride250 Zr 6.490 0.600 Zirconium251 Z

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Index - 1IPN 074-545-P1ECygnus 2 Operating Manual IndexAacoustic impedance 14-9active oscillator 14-6, 14-8Activity 3-12aerial mass density 14-10agg

Index - 2 IPN 074-545-P1ECygnus 2 Operating ManualMmass sensitivity 14-1materialdefinition 3-20dielectric 3-10measured deposition rate 14-13measureme

1 - 10 IPN 074-545-P1ECygnus 2 Operating ManualTime Limit (in Deposit) . . . . . . . . . . . 00:00 to 99:59 min:sRate Filter Time . . . . . . . . . .

1 - 11IPN 074-545-P1ECygnus 2 Operating Manual 1.4.3.5 General Global Parameters Date Format . . . . . . . . . . . . . . . . . . . DDMMYYYY or MMDD

www.inficon.com [email protected]©2012 INFICON®OPERATING MANUALCygnus®2Thin Film Deposition ControllerIPN 074-545-P1ETitle Page

1 - 12 IPN 074-545-P1ECygnus 2 Operating Manual1.4.4 ‘DisplayType/Color/Size . . . . . . . . . . . . . . . . LCD/Color/TFT/7 inch diagonalDimming Fe

1 - 13IPN 074-545-P1ECygnus 2 Operating Manual 1.4.5 DAC OutputsQuantity and Type . . . . . . . . . . . . . . 6 with BNC, 6 optional with 15 pin m

1 - 14 IPN 074-545-P1ECygnus 2 Operating Manual1.4.6 Logic ProcessingType . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements Logic

1 - 15IPN 074-545-P1ECygnus 2 Operating Manual 1.4.8 Remote CommunicationsRS232C Serial Port . . . . . . . . . . . . . Standard; INFICON binary pr

1 - 16 IPN 074-545-P1ECygnus 2 Operating Manual1.4.14 SizeNot including mounts or user connectors5.25 in. H x 17.625 in. W x 13 in. D(133.4 mm H x 4

1 - 17IPN 074-545-P1ECygnus 2 Operating Manual 1.5 Unpacking and Inspection1 If the Cygnus 2 has not been removed from its shipping container, do s

1 - 18 IPN 074-545-P1ECygnus 2 Operating Manual1.6.3 Optional AccessoriesPneumatic Shutter Actuator Control Valve . . . . . . . . . . . 750-420-G1Se

1 - 19IPN 074-545-P1ECygnus 2 Operating Manual 1.7 Initial Power-On VerificationA preliminary functional check of the Cygnus 2 can be made before f

1 - 20 IPN 074-545-P1ECygnus 2 Operating Manual1 Confirm that AC line voltage is supplied and proper for the Cygnus 2. 2 Confirm that the back panel

2 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 2Installation and Interfaces2.1 Location GuidelinesBefore permanently installing the Cygnus 2

TrademarksThe trademarks of the products mentioned in this Operating Manual are held by the companies that produce them.CAJON® is a registered tradema

2 - 2 IPN 074-545-P1ECygnus 2 Operating ManualFigure 2-1 Typical installationMounting BracketCoax Cable(Routed withWater Tubes)Or,Customer SuppliedC

2 - 3IPN 074-545-P1ECygnus 2 Operating Manual Generally, install the sensor as far as possible from the evaporation source (a minimum of 10 in. (25.

2 - 4 IPN 074-545-P1ECygnus 2 Operating Manual2.1.3 Cygnus 2 InstallationThe Cygnus 2 is designed to be rack mounted. It may be also used on a table

2 - 5IPN 074-545-P1ECygnus 2 Operating Manual 2.2.2 Connections to Earth GroundThere are two required earth ground connections: The earth ground c

2 - 6 IPN 074-545-P1ECygnus 2 Operating ManualIn many cases, a braided ground strap is sufficient. However, there are cases when a solid copper strap

2 - 7IPN 074-545-P1ECygnus 2 Operating Manual 2.3 Connecting the ControllerThe operation of the Cygnus 2 depends on the proper connection of power

2 - 8 IPN 074-545-P1ECygnus 2 Operating Manual2.3.2.1 Source Control ConnectionSix Digital-to-Analog (DAC) outputs are provided as standard equipmen

2 - 9IPN 074-545-P1ECygnus 2 Operating Manual 2.3.2.4 I/O Expansion OptionsOne I/O Relay module is included as standard equipment with the Cygnus 2

2 - 10 IPN 074-545-P1ECygnus 2 Operating ManualTable 2-3 Input/Relay pin connectionsI/O Board #1 I/O Board #2Relay # Pins TTLInput #Pin Relay # Pins

2 - 11IPN 074-545-P1ECygnus 2 Operating Manual 2.3.2.5 RS-232C CommunicationsRS-232C serial communications is included in the Cygnus 2 as standard

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place

2 - 12 IPN 074-545-P1ECygnus 2 Operating Manual2.3.2.6 Isolated +24 V (dc) SupplyAn isolated +24 V (dc) power supply is available on a 9-pin D-Sub c

3 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 3Operation3.1 Front Panel ControlsOperational controls for the Cygnus 2 are located on the fr

3 - 2 IPN 074-545-P1ECygnus 2 Operating Manual4 System SwitchesAn array of three keys that provide START, STOP ALL and RESET for process control. STA

3 - 3IPN 074-545-P1ECygnus 2 Operating Manual 3.2 Rear Panel InterfacesInterfaces for the Cygnus 2 are located on the rear panel, see Figure 3-2. F

3 - 4 IPN 074-545-P1ECygnus 2 Operating Manual8 Sensor Connectors - Channels 5 & 6 (optional)Expansion panel to accommodate the optional addition

3 - 5IPN 074-545-P1ECygnus 2 Operating Manual 3.3 DisplaysThe Cygnus 2 has many display screens for monitoring and programming processes. The five

3 - 6 IPN 074-545-P1ECygnus 2 Operating Manual3.3.2 Operate The default Operate display shows all six Materials, see Operate screen show all materia

3 - 7IPN 074-545-P1ECygnus 2 Operating Manual Operate Display Description1Rate2 Thickness3 Power Level4 State of Material5State Timer6 Material Time

3 - 8 IPN 074-545-P1ECygnus 2 Operating ManualFigure 3-5 6 Material display3.3.3 Sensor Information 3.3.3.1 Sensor Information Rate/Xtal Display D

3 - 9IPN 074-545-P1ECygnus 2 Operating Manual Sensor (Number field)These numbers correspond to the Sensor connector channel numbers on the rear pane

3 - 10 IPN 074-545-P1ECygnus 2 Operating ManualS SIngle (Crystal Stability value field)This field displays the positive single frequency shift curren

3 - 11IPN 074-545-P1ECygnus 2 Operating Manual taken on the Sensor indicated by the box cursor if the Cygnus 2 is in Ready, Stop or all active Mater

3 - 12 IPN 074-545-P1ECygnus 2 Operating ManualMatl indicates the Z-Ratio being used for thickness calculation is the value found in the Material par

3 - 13IPN 074-545-P1ECygnus 2 Operating Manual 3.3.4 Sensor Screen From the main MENU display, placing the cursor on Sensor and pressing MENU bring

3 - 14 IPN 074-545-P1ECygnus 2 Operating Manual3.3.5 Source The Source Overview display, see Figure 3-9, shows the current configuration for all six

3 - 15IPN 074-545-P1ECygnus 2 Operating Manual 3.3.6 Material This display is organized into eight sub pages accessible thru the Select Menu descri

3 - 16 IPN 074-545-P1ECygnus 2 Operating Manual3.3.6.3 Sensor PageThe Material Sensor page, see Figure 3-11, allows selecting the Tooling factor. Ot

3 - 17IPN 074-545-P1ECygnus 2 Operating Manual 3.3.6.6 Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-DisplaysThese three libraries allow convenient selection o

3 - 18 IPN 074-545-P1ECygnus 2 Operating Manual3.3.7.3 Comm PageDatalogging of crystal data is enabled here and RS232 and optional Ethernet paramete

3 - 19IPN 074-545-P1ECygnus 2 Operating Manual 3.3.8 Digital I/O The Digital I/O displays show configuration of all inputs, see Figure 3-13, and ou

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

3 - 20 IPN 074-545-P1ECygnus 2 Operating Manual3.3.9 Logic 100 logic statements can be set up. Logic statements are evaluated sequentially, 10 times

3 - 21IPN 074-545-P1ECygnus 2 Operating Manual Figure 3-15 Process state diagramNormalSequenceAlternateSequenceHand denotes key pressKeySee Figure

3 - 22 IPN 074-545-P1ECygnus 2 Operating ManualFigure 3-16 Simplified Cygnus 2 state sequence diagramSTOPSTOPNONONOONYESYESYESON / STBYSTBY POWERFAI

3 - 23IPN 074-545-P1ECygnus 2 Operating Manual 3.4 State DescriptionsTable 3-2 State descriptionsSTATE CONDITION RELAY CONTACT STATUSREMOTECOMMENC

3 - 24 IPN 074-545-P1ECygnus 2 Operating Manual13. TIME POWER Crystal failed; Source maintained at average control power and average rate prior to cr

3 - 25IPN 074-545-P1ECygnus 2 Operating Manual 3.5 Special FeaturesThe Cygnus 2 has several special features to enhance the performance of the inst

3 - 26 IPN 074-545-P1ECygnus 2 Operating Manual During a state of STOP, READY or IDLE. When the designated Sensor fails during pre-deposit. (A Sto

3 - 27IPN 074-545-P1ECygnus 2 Operating Manual 3.5.1.2 XtalSix (CrystalSix) On power-up, all crystals are read to determine how many good and bad c

3 - 28 IPN 074-545-P1ECygnus 2 Operating ManualWhen configured for a Xtal12, the relay contacts are only pulsed closed for one second then opened aga

3 - 29IPN 074-545-P1ECygnus 2 Operating Manual 3.5.2.1 Example: Programming Turret Source Crucible SelectionInterfacing a turret source controller

3 - 30 IPN 074-545-P1ECygnus 2 Operating Manual1 New CrystalThe first category is for a "new" crystal, one that does not have any material

3 - 31IPN 074-545-P1ECygnus 2 Operating Manual 3.5.4 Rate WatcherThe Cygnus 2 includes a sample and hold function which enables periodic sampling o

3 - 32 IPN 074-545-P1ECygnus 2 Operating Manual3.5.5.1 Determining Soak Power with the Handheld ControllerThe Handheld Controller is a useful tool t

3 - 33IPN 074-545-P1ECygnus 2 Operating Manual 3.5.7 USB Storage DeviceThe USB port allows storage of all parameter information, screen shots as we

3 - 34 IPN 074-545-P1ECygnus 2 Operating Manual3.5.8 Lock and Access CodesThe Cygnus 2 has several forms of protection to prevent unauthorized chang

3 - 35IPN 074-545-P1ECygnus 2 Operating Manual 3.5.9 DatalogWhen a Source Shutter closes, an end of deposit occurs, or following a Stop, a set of d

3 - 36 IPN 074-545-P1ECygnus 2 Operating Manual3.5.9.1 Datalog contents:The following values make up the data in the datalog. The data is sent in AS

3 - 37IPN 074-545-P1ECygnus 2 Operating Manual NOTE: If Data Log Xtal Info Parameter is set to Yes, the following Crystal History will be sent for e

3 - 38 IPN 074-545-P1ECygnus 2 Operating Manual3.5.9.2 Page Format ASCII Example: To USB Storage Device and/or RS-232 Protocol Dlog Page for Materia

3 - 39IPN 074-545-P1ECygnus 2 Operating Manual 3.5.9.3 Comma Format ASCII Example to USB Storage Device:"09/15/2010","14:04", 1

TOC - 1IPN 074-545-P1ECygnus 2 Operating Manual Table Of ContentsCover PageTitle PageTrademarksDisclaimerCopyrightDeclaration Of ConformityWarrantyC

3 - 40 IPN 074-545-P1ECygnus 2 Operating Manual3.5.10 DAC MonitoringCygnus 2 continually compares the actual output voltages at the DAC BNC connecto

4 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 4Sensor & Source Set-Up4.1 Sensor Set-Up Introduction The basic Cygnus 2 has one sensor m

4 - 2 IPN 074-545-P1ECygnus 2 Operating ManualFigure 4-2 Sensor parameter editing4.1.2 Sensor ParametersSENSOR TYPE . . . . . . . . . . . . . . . .

4 - 3IPN 074-545-P1ECygnus 2 Operating Manual SHUTTER OUT . . . . . . . . . . . . . . . . 0 to 38This parameter designates which of the 38 outputs i

4 - 4 IPN 074-545-P1ECygnus 2 Operating Manual4.2 Source Set-Up IntroductionThe Cygnus 2 provides the capability to configure the six Source control

4 - 5IPN 074-545-P1ECygnus 2 Operating Manual 4.2.2 Source ParametersFigure 4-4 Source parameter pageThe following parameters can be edited for ea

4 - 6 IPN 074-545-P1ECygnus 2 Operating ManualNUMBER OF CRUCIBLES . . . . . . . One(0), Four(1), Eight(2), 16(3), 32(4), 64(5)Values in brackets are

4 - 7IPN 074-545-P1ECygnus 2 Operating Manual will never proceed past the Source switching state. If a value other than 0 is entered, the input chos

4 - 8 IPN 074-545-P1ECygnus 2 Operating ManualThis page is intentionally blank.

5 - 1IPN 074-545-P1ECygnus 2 Operating Manual Chapter 5Material Set-Up5.1 Introduction The Cygnus 2 can store definition parameters for up to 6 Mat