Inficon Cygnus 2 Thin Film Deposition Controller Manuale Utente Pagina 73
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IPN 074-545-P1E
Cygnus 2 Operating Manual
3.4 State Descriptions
Table 3-2 State descriptions
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter
Sensor
Shutter
1. READY The Cygnus 2 will accept a START
command.
Inactive Inactive 0
2. CRUCIBLE SWITCH
(Crucible Sw)
During this state, the crucible turret is
being moved from its current position to the
one called out for the given Material. If the
idle power of the Source in use is not zero
the power is set to zero before the crucible
position changes. Cygnus 2 advances to
next state when turret input goes low for
the programmed position or turret delay
has elapsed (depending on parameter
settings).
Inactive Inactive 1
3. PRECON RISE Source power rises to Precondition power
level over the precondition rise time.
[PreCon Rise Time]
Inactive Inactive 2
4. PRECON SOAK Source is maintained at precondition
power level for the precondition soak time.
[PreCon Soak Time, PreCon Soak Power]
Inactive Inactive 3
5. RISE 1 Source is rising to Soak Power 1 level.
[Rise Time 1]
Inactive Inactive 4
6. SOAK 1 Source is being maintained at Soak Power
1 level. [Soak Time 1, Soak Power 1]
Inactive Inactive 5
7. RISE 2 Source is rising to Soak Power 2 level.
[Rise Time 2]
Inactive Inactive 6
8. SOAK 2 Source is being maintained at Soak Power
2 level. [Soak Time 2, Soak Power 2]
Inactive Inactive 7
9. SHUTTER DLY Rate is being controlled. Advances to
Deposit State once the Source is in Rate
Control within Shutter Delay Accuracy for 5
seconds.
Inactive Active 8
10. DEPOSIT Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time]
Active Active 9
11. RATE RAMP 1 Rate control, desired rate changing. [New
Rate 1, Start Ramp 1, Ramp Time 1]
Active Active 10
12. RATE RAMP 2 Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2]
Active Active 11
- OPERATING MANUAL 1
- Trademarks 4
- Disclaimer 4
- Copyright 4
- Warranty 7
- Table Of Contents 9
- TOC - 2 10
- Chapter 2 10
- Installation and Interfaces 10
- Chapter 3 11
- Operation 11
- TOC - 4 12
- Chapter 4 12
- Sensor & Source Set-Up 12
- Chapter 5 12
- Material Set-Up 12
- TOC - 5 13
- TOC - 6 14
- Chapter 9 14
- Remote Communications 14
- TOC - 7 15
- TOC - 9 17
- TOC - 10 18
- 1.1 Introduction 19
- 1.2 Cygnus 2 Safety 20
- 1.2.3 Earth Ground 22
- 1.2.4 Main Power Connection 23
- 1.3 How To Contact INFICON 24
- 1.4 Cygnus 2 Specifications 25
- 1.4.1 Measurement 25
- 1.4.2 Screens and Hierarchy 25
- 1.4.3 Cygnus 2 Features 26
- 1 - 10 28
- 1 - 11 29
- 1.4.4 ‘Display 30
- 1.4.5 DAC Outputs 31
- 1.4.6 Logic Processing 32
- 1.4.7 Relays / Inputs 32
- 1 - 15 33
- 1.4.14 Size 34
- 1.4.16 Weight 34
- 1.4.17 Cleaning 34
- 1.5 Unpacking and Inspection 35
- 1.6.1 Base Configurations 35
- 1.6.3 Optional Accessories 36
- 1.6.4 Oscillator Packages 36
- 1.6.5 Sensors 36
- 1.6.6 Replacement Cables 36
- 1 - 19 37
- 2.1 Location Guidelines 39
- 2.1.1 Sensor Types 39
- 2.1.2 Sensor Installation 39
- 2.1.3 Cygnus 2 Installation 42
- . See Figure 43
- 2.3.1 Routing XIU Cables 45
- I/O Board #1 I/O Board #2 48
- I/O Board #3 48
- Signal Name Pin EIA Name 49
- TX Transmit Data 2 BA 49
- RX Receive Data 3 BB 49
- SG Signal Ground 5 AB 49
- GND Shield Ground 1 49
- 2 - 12 50
- 3.1 Front Panel Controls 51
- 3.2 Rear Panel Interfaces 53
- 3.3 Displays 55
- 3.3.1 Main Menu Display 55
- 3.3.2 Operate 56
- 3.3.3 Sensor Information 58
- 3 - 10 60
- 3 - 11 61
- Figure 3-7 Type/Freq display 61
- 3 - 12 62
- 3.3.4 Sensor Screen 63
- 3.3.5 Source 64
- 3.3.6 Material 65
- 3 - 16 66
- 3.3.7 General 67
- 3 - 18 68
- 3.3.8 Digital I/O 69
- 3.3.9 Logic 70
- 3.3.10 Maintenance 70
- 3.3.11 Counter / Timer 70
- 3.3.12 USB Storage 70
- See Figure 3-16 71
- 3 - 22 72
- 3.4 State Descriptions 73
- 3 - 24 74
- 3.5 Special Features 75
- 3.5.1 Crystal Switching 75
- 3 - 26 76
- 3 - 27 77
- 3 - 28 78
- 3.5.3 Auto-Z 79
- 3.5.4 Rate Watcher 81
- 3.5.5 Handheld Controller 81
- 3.5.6 Test Mode 82
- 3.5.7 USB Storage Device 83
- 3.5.8 Lock and Access Codes 84
- 3.5.9 Datalog 85
- 3 - 36 86
- 3 - 37 87
- Table 3-3 Sensor 1 to 6 87
- 3 - 38 88
- 3 - 39 89
- 3.5.10 DAC Monitoring 90
- 3.5.11 Trend Analysis 90
- 4.1.2 Sensor Parameters 92
- 4.2.1 Source Navigation 94
- 4.2.2 Source Parameters 95
- 5.1 Introduction 99
- 5.1.1 Material Overview Page 99
- 5.1.2 Material Definition 100
- Cygnus 2 Operating Manual 101
- Figure 5-4 Time constant 102
- TOOLING TF 105
- 5 - 10 108
- 5 - 11 109
- 5 - 12 110
- 5 - 13 111
- 5 - 14 112
- 5 - 15 113
- 5 - 16 114
- 5.2.1 Skip Deposit 115
- 5 - 18 116
- 6.1 General Set-Up Overview 117
- 6.2 General Process Page 117
- 6.3 DACs Page Parameters 118
- 6.4 COMM Page Parameters 119
- 6.5 MESSAGE Page Set-up 121
- 6.6 DATE / TIME Set Up 122
- 6.7 TEST Page Set Up 123
- 6.8 LOCK Page Code Set-up 124
- 6 - 10 126
- 7.1 Digital I/O Screen 127
- 7.2 All Input Page 127
- 7.3 All Output Page 128
- 7.4 I/O Board Page 129
- 7.4.1 Output Type 129
- 8.1 Logic Statement Overview 131
- 8.2.1 Logic Statement Groups 133
- 8.3 IF Event Definitions 137
- 8 - 10 140
- 8 - 11 141
- 8 - 12 142
- 8 - 13 143
- 8.4 THEN Action Definitions 144
- 8 - 15 145
- 8 - 16 146
- 8.5 Logic Statement Example 147
- 8 - 18 148
- 9.2 Physical Connections 149
- 9.2.1 RS-232C Serial Port 149
- 9.2.2 TCP/IP Ethernet Port 150
- Properties. See Figure 9-2 151
- 9.3 Message Format 153
- 9.3.1 Protocol 153
- Table 9-1 Data type codes 155
- 9.4 Communication Commands 158
- 9.4.2 Status Commands 159
- 9.4.3 HELLO Command 159
- 9 - 12 160
- QG 160
- 9 - 14 162
- 9 - 16 164
- IPN 074-545-P1E 165
- 9 - 18 166
- 9 - 20 168
- 9.4.8 Query Sensor Parameter 169
- 9 - 22 170
- 9 - 24 172
- 9.4.14 Query Material Name 173
- 9.4.15 Update Material Name 173
- 9.4.16 Query Input Name 173
- 9.4.17 Update Input Name 173
- 9.4.18 Query Output Name 173
- 9.4.19 Update Output Name 174
- 9.4.20 Query Output Type 174
- 9.4.21 Update Output Type 174
- 9.4.22 Query User Message 174
- 9.4.23 Update User Message 175
- 9.4.24 Query Logic Statement 175
- 9.4.26 Cygnus 2 Event List 177
- 9 - 30 178
- 9 - 31 179
- 9 - 32 180
- 9.4.27 Cygnus 2 Action List 181
- 9 - 34 182
- 9.4.28 Status General 183
- 9 - 36 184
- 9 - 37 185
- 9.4.29 Status Material 186
- 9 - 39 187
- 9.4.30 Status Sensor 188
- Command 188
- 9.4.31 Remote General Action 190
- 9 - 43 191
- 9 - 44 192
- 9 - 45 193
- Table 9-16 Remote material 193
- 9 - 46 194
- 9 - 47 195
- 9 - 48 196
- 9 - 49 197
- 9 - 50 198
- 9 - 51 199
- 9 - 52 200
- 9 - 53 201
- 9 - 54 202
- 10.2 Determining Density 203
- 10.3 Determining Tooling 204
- 10 - 3 205
- 10.5 Source Maintenance 207
- 10 - 6 208
- 10.6 System Status 209
- 10 - 8 210
- 11.1 Introduction 211
- 11 - 2 212
- Chapter 12 213
- USB Storage 213
- 12.3 Configuration Files 214
- 12.4 Data Logs 215
- 12.5 Screen Captures 216
- 13.1 Status Messages 217
- 13 - 2 218
- 13.2 User Messages 220
- 13.3 STOP messages 221
- 13.4 Transient Messages 222
- 13 - 8 224
- Maintenance 225
- 13.5 Input Error Messages 226
- 13.6 Troubleshooting Guide 227
- 13 - 12 228
- 13 - 13 229
- 13 - 14 230
- 13 - 15 231
- 13 - 16 232
- 13 - 17 233
- 13 - 18 234
- 13 - 19 235
- 13.7 Replacing the Crystal 236
- 13.7.1 Front Load 236
- 13.7.2 Cool Drawer 237
- 13 - 22 238
- 13.7.4 Bakeable Sensor 239
- 13.7.5 Sputtering Sensor 240
- 13.7.6 Crystal Snatcher 241
- 13.7.7 CrystalSix (XtalSix) 241
- 13.8 Crystal Sensor Emulator 242
- IPN 760-601-G1 or 760-601-G2 242
- 13.8.1 Diagnostic Procedures 243
- 13 - 29 245
- 13.8.2 % XTAL Life 246
- 13 - 31 247
- 13.8.4 Specifications 248
- 14.1 Basics 249
- 14.1.1 Monitor Crystals 250
- Frequency (in MHz) 251
- 14.1.3 Z-match Technique 253
- 14.1.4 Active Oscillator 254
- 14.1.5 ModeLock Oscillator 255
- 14 - 8 256
- 14.1.6 Auto-Z Theory 257
- 14.1.7 Control Loop Theory 259
- [controller] [process] 261
- A.1 Introduction 263
- A - 10 272
- Index - 1 273
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